Abstract

A low-energy etalon-tuned KrF discharge laser is used as a source to injection lock a 70-mJ KrF unstable resonator oscillator in a very simple configuration. Operating parameters and synchronization are discussed. Degradation of KrF discharge laser output with time is also studied and inferred to be partly a result of absorption at 248–249 nm by CF2 formed in the discharge.

© 1977 Optical Society of America

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