Abstract

We describe a new interferometer designed to obtain high immunity to vibration by generating the reference wave by means of fiber diffraction so as to share a common path with the measurement wave. A spatial phase shifter is added to secure vibration desensitization by capturing four phase-shifted interferograms simultaneously without time delay. Experimental results prove that the proposed interferometer is capable of providing stable measurements with a level of fringe stabilization of less than 1nm in a typical workshop environment equipped with no excessive ground isolation for antivibration.

© 2005 Optical Society of America

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2004

J. E. Millerd, N. J. Brock, J. B. Hayes, M. B. North-Morris, M. Novak, and J. C. Wyant, Proc. SPIE 5531, 304 (2004).
[CrossRef]

J. E. Millerd, N. J. Brock, J. B. Hayes, and J. C. Wyant, Proc. SPIE 5531, 264 (2004).
[CrossRef]

H. Kihm and S.-W. Kim, Opt. Lett. 29, 2366 (2004).
[CrossRef] [PubMed]

2003

J. C. Wyant, Opt. Photonics News 14(4), 36 (2003).
[CrossRef]

2002

1998

1997

W.-J. Cho and S.-W. Kim, Opt. Eng. 36, 896 (1997).
[CrossRef]

1996

I. Yamaguchi, J. Liu, and J.-I. Kato, Opt. Eng. 35, 2930 (1996).
[CrossRef]

1995

1991

H. Hanafusa and M. Horiguchi, Electron. Lett. 27, 1968 (1991).
[CrossRef]

1986

1984

O. Y. Kwon, Opt. Lett. 9, 59 (1984).
[CrossRef] [PubMed]

R. Smythe and R. Moore, Opt. Eng. 23, 361 (1984).
[CrossRef]

1982

1975

R. N. Smartt and W. H. Steel, Jpn. J. Appl. Phys. 14, 351 (1975).
[CrossRef]

Brock, N. J.

J. E. Millerd, N. J. Brock, J. B. Hayes, M. B. North-Morris, M. Novak, and J. C. Wyant, Proc. SPIE 5531, 304 (2004).
[CrossRef]

J. E. Millerd, N. J. Brock, J. B. Hayes, and J. C. Wyant, Proc. SPIE 5531, 264 (2004).
[CrossRef]

J. E. Millerd and N. J. Brock, “Methods and apparatus for splitting, imaging, and measuring wave fronts in interferometry,” U.S. patent 6,304,330 (October 16, 2001).

Cho, W.-J.

W.-J. Cho and S.-W. Kim, Opt. Eng. 36, 896 (1997).
[CrossRef]

Creath, K.

K. Creath, Proc. SPIE 680, 19 (1986).
[CrossRef]

Hanafusa, H.

H. Hanafusa and M. Horiguchi, Electron. Lett. 27, 1968 (1991).
[CrossRef]

Hayes, J. B.

J. E. Millerd, N. J. Brock, J. B. Hayes, and J. C. Wyant, Proc. SPIE 5531, 264 (2004).
[CrossRef]

J. E. Millerd, N. J. Brock, J. B. Hayes, M. B. North-Morris, M. Novak, and J. C. Wyant, Proc. SPIE 5531, 304 (2004).
[CrossRef]

Horiguchi, M.

H. Hanafusa and M. Horiguchi, Electron. Lett. 27, 1968 (1991).
[CrossRef]

Ina, H.

Kato, J.-I.

I. Yamaguchi, J. Liu, and J.-I. Kato, Opt. Eng. 35, 2930 (1996).
[CrossRef]

Kihm, H.

Kim, S.-W.

Kobayashi, S.

Kokal, J. V.

Kwon, O. Y.

Liu, J.

I. Yamaguchi, J. Liu, and J.-I. Kato, Opt. Eng. 35, 2930 (1996).
[CrossRef]

Love, J. D.

A. W. Snyder and J. D. Love, Optical Waveguide Theory (Chapman & Hall, 1983), Chap. 23, p. 474.
[CrossRef]

Mazzoni, A.

Melozzi, M.

Millerd, J. E.

J. E. Millerd, N. J. Brock, J. B. Hayes, and J. C. Wyant, Proc. SPIE 5531, 264 (2004).
[CrossRef]

J. E. Millerd, N. J. Brock, J. B. Hayes, M. B. North-Morris, M. Novak, and J. C. Wyant, Proc. SPIE 5531, 304 (2004).
[CrossRef]

J. E. Millerd and N. J. Brock, “Methods and apparatus for splitting, imaging, and measuring wave fronts in interferometry,” U.S. patent 6,304,330 (October 16, 2001).

Moore, R.

R. Smythe and R. Moore, Opt. Eng. 23, 361 (1984).
[CrossRef]

North-Morris, M. B.

J. E. Millerd, N. J. Brock, J. B. Hayes, M. B. North-Morris, M. Novak, and J. C. Wyant, Proc. SPIE 5531, 304 (2004).
[CrossRef]

M. B. North-Morris, J. VanDelden, and J. C. Wyant, Appl. Opt. 41, 668 (2002).
[CrossRef] [PubMed]

Novak, M.

J. E. Millerd, N. J. Brock, J. B. Hayes, M. B. North-Morris, M. Novak, and J. C. Wyant, Proc. SPIE 5531, 304 (2004).
[CrossRef]

Pezzati, L.

Ransom, P. L.

Smartt, R. N.

R. N. Smartt and W. H. Steel, Jpn. J. Appl. Phys. 14, 351 (1975).
[CrossRef]

Smythe, R.

R. Smythe and R. Moore, Opt. Eng. 23, 361 (1984).
[CrossRef]

Snyder, A. W.

A. W. Snyder and J. D. Love, Optical Waveguide Theory (Chapman & Hall, 1983), Chap. 23, p. 474.
[CrossRef]

Steel, W. H.

R. N. Smartt and W. H. Steel, Jpn. J. Appl. Phys. 14, 351 (1975).
[CrossRef]

Takeda, M.

VanDelden, J.

Wyant, J. C.

J. E. Millerd, N. J. Brock, J. B. Hayes, M. B. North-Morris, M. Novak, and J. C. Wyant, Proc. SPIE 5531, 304 (2004).
[CrossRef]

J. E. Millerd, N. J. Brock, J. B. Hayes, and J. C. Wyant, Proc. SPIE 5531, 264 (2004).
[CrossRef]

J. C. Wyant, Opt. Photonics News 14(4), 36 (2003).
[CrossRef]

M. B. North-Morris, J. VanDelden, and J. C. Wyant, Appl. Opt. 41, 668 (2002).
[CrossRef] [PubMed]

Yamaguchi, H.

Yamaguchi, I.

I. Yamaguchi, J. Liu, and J.-I. Kato, Opt. Eng. 35, 2930 (1996).
[CrossRef]

Yoshino, T.

Appl. Opt.

Electron. Lett.

H. Hanafusa and M. Horiguchi, Electron. Lett. 27, 1968 (1991).
[CrossRef]

J. Opt. Soc. Am.

Jpn. J. Appl. Phys.

R. N. Smartt and W. H. Steel, Jpn. J. Appl. Phys. 14, 351 (1975).
[CrossRef]

Opt. Eng.

W.-J. Cho and S.-W. Kim, Opt. Eng. 36, 896 (1997).
[CrossRef]

I. Yamaguchi, J. Liu, and J.-I. Kato, Opt. Eng. 35, 2930 (1996).
[CrossRef]

R. Smythe and R. Moore, Opt. Eng. 23, 361 (1984).
[CrossRef]

Opt. Lett.

Opt. Photonics News

J. C. Wyant, Opt. Photonics News 14(4), 36 (2003).
[CrossRef]

Proc. SPIE

J. E. Millerd, N. J. Brock, J. B. Hayes, M. B. North-Morris, M. Novak, and J. C. Wyant, Proc. SPIE 5531, 304 (2004).
[CrossRef]

J. E. Millerd, N. J. Brock, J. B. Hayes, and J. C. Wyant, Proc. SPIE 5531, 264 (2004).
[CrossRef]

K. Creath, Proc. SPIE 680, 19 (1986).
[CrossRef]

Other

A. W. Snyder and J. D. Love, Optical Waveguide Theory (Chapman & Hall, 1983), Chap. 23, p. 474.
[CrossRef]

J. E. Millerd and N. J. Brock, “Methods and apparatus for splitting, imaging, and measuring wave fronts in interferometry,” U.S. patent 6,304,330 (October 16, 2001).

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Figures (4)

Fig. 1
Fig. 1

Fiber-diffraction interferometer with fringe stabilization capability against the presence of vibration on the test surface.

Fig. 2
Fig. 2

Spatial phase shifter: (a) optical configuration for simultaneous phase shifting and (b) four 90° phase-shifted interferograms captured from a spherical concave mirror (curvature radius of 150 mm and diameter of 25.4 mm ).

Fig. 3
Fig. 3

Waveguide fibers: (a) 3 μ m core at the exit end face (left) and an enlarged core at the inlet end face by thermal diffusion expansion (right) and (b) cascading design for progressive expansion of a fiber core.

Fig. 4
Fig. 4

Test results: (a) vibration level measured on the system table and (b) fluctuation of measured surface profiles from the proposed interferometer subject to the table vibration of (a).

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