Abstract

We experimentally study the optical properties of Al-${{\rm SiO}_2}$ hyperbolic metamaterials. The hyperbolic dispersion and ultrathin Al film ${\sim}{12}\;{\rm nm}$ make the Al-${{\rm SiO}_2}$ multilayers possess transmission efficiency ${\sim}{0.3}$ for the spatial frequency ranging from ${k_0}$ to 1.42 ${k_0}$ at 363.8 nm illumination. The atomic concentration of 3% Cu-doping is experimentally demonstrated to obtain Al film ${\sim}{12}\;{\rm nm}$ with root-mean-square roughness ${\sim}{0.49}\;{\rm nm}$. The fabricated Al-${{\rm SiO}_2}$ multilayers combined with the optimized ${{\rm ZrO}_2}$ resonant grating with period 280 nm serves as a structured illumination device, which efficiently converts the $P$-polarized normal field to the spatial frequency 1.3 ${k_0}$ structured field. The measured average transmission intensity of the ${\pm}1$ order is ${\sim}{0.14}$, and the intensity ratio of the ${\pm}1$ order and 0 order is ${\sim}{65}$. This Letter is promising for structured illumination, spontaneous emission enhancement, Cherenkov radiation, etc.

© 2020 Optical Society of America

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