Abstract

Although plasmonic photolithography can break through the diffraction limit and produce super-resolution patterns, the intrinsic high loss from metal severely obstructs its application in practice. Here we proposed a novel photolithography method based on a dielectric photonic crystal (PC) structure, where the nanofilms are analyzed systematically. It is shown that the PC can efficiently transmit the desired high-k waves, which is advantageous in generating deep subwavelength patterns and realizing super-resolution lithography. Typically, a PC composed of stacked nine films of a multilayer is demonstrated. The nanopatterns with a period of 60 nm are formed in the photoresist layer. Furthermore, this PC-based lithography system is tolerant to the surface roughness in a multilayer. The analyses indicate that this dielectric PC-based design is applicable for super-resolution lithography to produce periodic patterns with strong field intensity, high aspect ratios, and great uniformity.

© 2019 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Deep subwavelength interference lithography with tunable pattern period based on bulk plasmon polaritons

Hongchao Liu, Weijie Kong, Kaipeng Liu, Chengwei Zhao, Wenjuan Du, Changtao Wang, Ling Liu, Ping Gao, Mingbo Pu, and Xiangang Luo
Opt. Express 25(17) 20511-20521 (2017)

Large area deep subwavelength interference lithography with a 35 nm half-period based on bulk plasmon polaritons

Hongchao Liu, Yunfei Luo, Weijie Kong, Kaipeng Liu, Wenjuan Du, Chengwei Zhao, Ping Gao, Zeyu Zhao, Changtao Wang, Mingbo Pu, and Xiangang Luo
Opt. Mater. Express 8(2) 199-209 (2018)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription