Abstract

This Letter reports on a high-power, narrow-linewidth deep-UV laser platform built upon a frequency-quintupled, Yb-fiber master-oscillator and power-amplifier system. The source, emitting at a pulse repetition rate of 120 MHz with a linewidth of 90 GHz and beam quality of MX/Y22.1/1.5, has been stably maintained over two weeks by successively changing positions and temperatures of nonlinear crystals in parallel, while outputting a 0.5-W average power at 213 nm.

© 2019 Optical Society of America

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Deep UV light generation by a fiber/bulk hybrid amplifier at 199 nm

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Appl. Opt. 48(9) 1668-1674 (2009)

References

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2019 (1)

2018 (3)

Z. Zhao, C. Qu, H. Igarashi, H. Xuan, T. Miura, S. Ito, and Y. Kobayashi, Opt. Express 26, 19435 (2018).
[Crossref]

D. Opalevs, M. Scholz, J. Stuhler, C. Gilfert, L. J. Liu, X. Y. Wang, A. Vetter, R. Kirner, T. Scharf, W. Noell, C. Rockstuhl, R. K. Li, C. Chen, R. Voelkel, and P. Leisching, Proc. SPIE 10511, 105112C (2018).
[Crossref]

K. Kato, S. G. Grechin, and N. Umemura, Laser Phys. 28, 095403 (2018).
[Crossref]

2017 (1)

2015 (1)

2013 (1)

M. Scholz, D. Opalevs, P. Leisching, W. Kaenders, G. Wang, X. Wang, R. Li, and C. Chen, App. Phys. Lett. 103, 051114 (2013).
[Crossref]

2011 (1)

L. Desbiens, M. Drolet, V. Roy, M. M. Sisto, and Y. Taillon, Proc. SPIE 7914, 791420 (2011).
[Crossref]

2010 (3)

P. Laperle, L. Desbiens, H. Zheng, M. Drolet, A. Proulx, and Y. Taillon, Proc. SPIE 7580, 75801Y (2010).
[Crossref]

S. Imai, K. Matsuki, N. Kikuiri, K. Takayama, O. Iwase, Y. Urata, T. Shinozaki, Y. Wada, and S. Wada, Proc. SPIE 7580, 75800H (2010).
[Crossref]

K. Kato, N. Umemura, and T. Mikami, Proc. SPIE 7582, 78821L (2010).

2009 (3)

2004 (3)

J. Sakuma, Y. Asakawa, T. Sumiyoshi, and H. Sekita, IEEE J. Sel. Top. Quantum Electron. 10, 1244 (2004).
[Crossref]

J. Sakuma, Y. Asakawa, T. Imahoko, and M. Obara, Opt. Lett. 29, 1096 (2004).
[Crossref]

A. J. Merriam, J. J. Jacob, D. Van Den Broeke, S. Hsu, J. F. Chen, and B. Kasprowicz, Proc. SPIE 5567, 894 (2004).
[Crossref]

2003 (1)

K. F. Wall, J. S. Smucz, B. Pati, Y. Isyanova, P. F. Moulton, and J. G. Manni, IEEE J. Quantum Electron. 39, 1160 (2003).
[Crossref]

2002 (1)

D. A. V. Kliner, F. Di Teodoro, J. P. Koplow, S. W. Moore, and A. V. Smith, Opt. Commun. 210, 393 (2002).
[Crossref]

1998 (1)

S. Stokowski and M. Vaez-Iravani, AIP Conf. Proc. 449, 405 (1998).
[Crossref]

1994 (1)

K. Kato, IEEE J. Quantum Electron. 30, 2950 (1994).
[Crossref]

Adachi, S.

Andres, T.

B. Köhler, T. Andres, A. Nebel, and R. Wallenstein, Conference on Lasers and Electro-Optics, OSA Technical Digest (Optical Society of America, 2000), paper CTuA8.

Asakawa, Y.

J. Sakuma, Y. Asakawa, T. Sumiyoshi, and H. Sekita, IEEE J. Sel. Top. Quantum Electron. 10, 1244 (2004).
[Crossref]

J. Sakuma, Y. Asakawa, T. Imahoko, and M. Obara, Opt. Lett. 29, 1096 (2004).
[Crossref]

Chen, C.

D. Opalevs, M. Scholz, J. Stuhler, C. Gilfert, L. J. Liu, X. Y. Wang, A. Vetter, R. Kirner, T. Scharf, W. Noell, C. Rockstuhl, R. K. Li, C. Chen, R. Voelkel, and P. Leisching, Proc. SPIE 10511, 105112C (2018).
[Crossref]

M. Scholz, D. Opalevs, P. Leisching, W. Kaenders, G. Wang, X. Wang, R. Li, and C. Chen, App. Phys. Lett. 103, 051114 (2013).
[Crossref]

T. Kanai, X. Wang, S. Adachi, S. Watanabe, and C. Chen, Opt. Express 17, 8696 (2009).
[Crossref]

Chen, J. F.

A. J. Merriam, J. J. Jacob, D. Van Den Broeke, S. Hsu, J. F. Chen, and B. Kasprowicz, Proc. SPIE 5567, 894 (2004).
[Crossref]

Desbiens, L.

L. Desbiens, M. Drolet, V. Roy, M. M. Sisto, and Y. Taillon, Proc. SPIE 7914, 791420 (2011).
[Crossref]

P. Laperle, L. Desbiens, H. Zheng, M. Drolet, A. Proulx, and Y. Taillon, Proc. SPIE 7580, 75801Y (2010).
[Crossref]

V. Roy, C. Paré, H. Zheng, P. Laperle, L. Desbiens, and Y. Taillon, Conference on Lasers and Electro-Optics Europe—European Quantum Electronics Conference, OSA Technical Digest (Optical Society of America, 2013), paper Cj_11_4.

Di Teodoro, F.

D. A. V. Kliner, F. Di Teodoro, J. P. Koplow, S. W. Moore, and A. V. Smith, Opt. Commun. 210, 393 (2002).
[Crossref]

Doi, M.

H. Kawai, A. Tokuhisa, M. Doi, S. Miwa, H. Matsuura, H. Kitano, and S. Owa, Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference, OSA Technical Digest (Optical Society of America, 2003), paper CTuT4.

Drolet, M.

L. Desbiens, M. Drolet, V. Roy, M. M. Sisto, and Y. Taillon, Proc. SPIE 7914, 791420 (2011).
[Crossref]

P. Laperle, L. Desbiens, H. Zheng, M. Drolet, A. Proulx, and Y. Taillon, Proc. SPIE 7580, 75801Y (2010).
[Crossref]

Furukawa, Y.

Gilfert, C.

D. Opalevs, M. Scholz, J. Stuhler, C. Gilfert, L. J. Liu, X. Y. Wang, A. Vetter, R. Kirner, T. Scharf, W. Noell, C. Rockstuhl, R. K. Li, C. Chen, R. Voelkel, and P. Leisching, Proc. SPIE 10511, 105112C (2018).
[Crossref]

Grechin, S. G.

K. Kato, S. G. Grechin, and N. Umemura, Laser Phys. 28, 095403 (2018).
[Crossref]

Hirohashi, J.

Hsu, S.

A. J. Merriam, J. J. Jacob, D. Van Den Broeke, S. Hsu, J. F. Chen, and B. Kasprowicz, Proc. SPIE 5567, 894 (2004).
[Crossref]

Igarashi, H.

Imahoko, T.

Imai, S.

S. Imai, K. Matsuki, N. Kikuiri, K. Takayama, O. Iwase, Y. Urata, T. Shinozaki, Y. Wada, and S. Wada, Proc. SPIE 7580, 75800H (2010).
[Crossref]

Y. Urata, T. Shinozaki, Y. Wada, Y. Kaneda, S. Wada, and S. Imai, Appl. Opt. 48, 1668 (2009).
[Crossref]

Ishida, T.

Isyanova, Y.

K. F. Wall, J. S. Smucz, B. Pati, Y. Isyanova, P. F. Moulton, and J. G. Manni, IEEE J. Quantum Electron. 39, 1160 (2003).
[Crossref]

Ito, S.

Iwase, O.

S. Imai, K. Matsuki, N. Kikuiri, K. Takayama, O. Iwase, Y. Urata, T. Shinozaki, Y. Wada, and S. Wada, Proc. SPIE 7580, 75800H (2010).
[Crossref]

Jacob, J. J.

A. J. Merriam, J. J. Jacob, D. Van Den Broeke, S. Hsu, J. F. Chen, and B. Kasprowicz, Proc. SPIE 5567, 894 (2004).
[Crossref]

Kaenders, W.

M. Scholz, D. Opalevs, P. Leisching, W. Kaenders, G. Wang, X. Wang, R. Li, and C. Chen, App. Phys. Lett. 103, 051114 (2013).
[Crossref]

Kanai, T.

Kaneda, Y.

Kasprowicz, B.

A. J. Merriam, J. J. Jacob, D. Van Den Broeke, S. Hsu, J. F. Chen, and B. Kasprowicz, Proc. SPIE 5567, 894 (2004).
[Crossref]

Kato, K.

K. Kato, S. G. Grechin, and N. Umemura, Laser Phys. 28, 095403 (2018).
[Crossref]

K. Kato, N. Umemura, and T. Mikami, Proc. SPIE 7582, 78821L (2010).

K. Kato, IEEE J. Quantum Electron. 30, 2950 (1994).
[Crossref]

Kawai, H.

H. Kawai, A. Tokuhisa, M. Doi, S. Miwa, H. Matsuura, H. Kitano, and S. Owa, Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference, OSA Technical Digest (Optical Society of America, 2003), paper CTuT4.

Kikuiri, N.

S. Imai, K. Matsuki, N. Kikuiri, K. Takayama, O. Iwase, Y. Urata, T. Shinozaki, Y. Wada, and S. Wada, Proc. SPIE 7580, 75800H (2010).
[Crossref]

Kirner, R.

D. Opalevs, M. Scholz, J. Stuhler, C. Gilfert, L. J. Liu, X. Y. Wang, A. Vetter, R. Kirner, T. Scharf, W. Noell, C. Rockstuhl, R. K. Li, C. Chen, R. Voelkel, and P. Leisching, Proc. SPIE 10511, 105112C (2018).
[Crossref]

Kitano, H.

H. Kawai, A. Tokuhisa, M. Doi, S. Miwa, H. Matsuura, H. Kitano, and S. Owa, Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference, OSA Technical Digest (Optical Society of America, 2003), paper CTuT4.

Kliner, D. A. V.

D. A. V. Kliner, F. Di Teodoro, J. P. Koplow, S. W. Moore, and A. V. Smith, Opt. Commun. 210, 393 (2002).
[Crossref]

Kobayashi, Y.

Köhler, B.

B. Köhler, T. Andres, A. Nebel, and R. Wallenstein, Conference on Lasers and Electro-Optics, OSA Technical Digest (Optical Society of America, 2000), paper CTuA8.

Koplow, J. P.

D. A. V. Kliner, F. Di Teodoro, J. P. Koplow, S. W. Moore, and A. V. Smith, Opt. Commun. 210, 393 (2002).
[Crossref]

Kusunose, H.

Laperle, P.

P. Laperle, L. Desbiens, H. Zheng, M. Drolet, A. Proulx, and Y. Taillon, Proc. SPIE 7580, 75801Y (2010).
[Crossref]

V. Roy, C. Paré, H. Zheng, P. Laperle, L. Desbiens, and Y. Taillon, Conference on Lasers and Electro-Optics Europe—European Quantum Electronics Conference, OSA Technical Digest (Optical Society of America, 2013), paper Cj_11_4.

Leisching, P.

D. Opalevs, M. Scholz, J. Stuhler, C. Gilfert, L. J. Liu, X. Y. Wang, A. Vetter, R. Kirner, T. Scharf, W. Noell, C. Rockstuhl, R. K. Li, C. Chen, R. Voelkel, and P. Leisching, Proc. SPIE 10511, 105112C (2018).
[Crossref]

M. Scholz, D. Opalevs, P. Leisching, W. Kaenders, G. Wang, X. Wang, R. Li, and C. Chen, App. Phys. Lett. 103, 051114 (2013).
[Crossref]

Li, R.

M. Scholz, D. Opalevs, P. Leisching, W. Kaenders, G. Wang, X. Wang, R. Li, and C. Chen, App. Phys. Lett. 103, 051114 (2013).
[Crossref]

Li, R. K.

D. Opalevs, M. Scholz, J. Stuhler, C. Gilfert, L. J. Liu, X. Y. Wang, A. Vetter, R. Kirner, T. Scharf, W. Noell, C. Rockstuhl, R. K. Li, C. Chen, R. Voelkel, and P. Leisching, Proc. SPIE 10511, 105112C (2018).
[Crossref]

Liu, L. J.

D. Opalevs, M. Scholz, J. Stuhler, C. Gilfert, L. J. Liu, X. Y. Wang, A. Vetter, R. Kirner, T. Scharf, W. Noell, C. Rockstuhl, R. K. Li, C. Chen, R. Voelkel, and P. Leisching, Proc. SPIE 10511, 105112C (2018).
[Crossref]

Manni, J. G.

K. F. Wall, J. S. Smucz, B. Pati, Y. Isyanova, P. F. Moulton, and J. G. Manni, IEEE J. Quantum Electron. 39, 1160 (2003).
[Crossref]

Matsuki, K.

S. Imai, K. Matsuki, N. Kikuiri, K. Takayama, O. Iwase, Y. Urata, T. Shinozaki, Y. Wada, and S. Wada, Proc. SPIE 7580, 75800H (2010).
[Crossref]

Matsuura, H.

H. Kawai, A. Tokuhisa, M. Doi, S. Miwa, H. Matsuura, H. Kitano, and S. Owa, Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference, OSA Technical Digest (Optical Society of America, 2003), paper CTuT4.

Merriam, A. J.

A. J. Merriam, J. J. Jacob, D. Van Den Broeke, S. Hsu, J. F. Chen, and B. Kasprowicz, Proc. SPIE 5567, 894 (2004).
[Crossref]

Mikami, T.

K. Kato, N. Umemura, and T. Mikami, Proc. SPIE 7582, 78821L (2010).

Miura, T.

Miwa, S.

H. Kawai, A. Tokuhisa, M. Doi, S. Miwa, H. Matsuura, H. Kitano, and S. Owa, Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference, OSA Technical Digest (Optical Society of America, 2003), paper CTuT4.

Miyata, K.

K. Miyata, F. Rotermnd, and V. Petrov, IEEE Photon. Technol. Lett. 21, 1417 (2009).
[Crossref]

Moore, S. W.

D. A. V. Kliner, F. Di Teodoro, J. P. Koplow, S. W. Moore, and A. V. Smith, Opt. Commun. 210, 393 (2002).
[Crossref]

Moriizumi, K.

Moulton, P. F.

K. F. Wall, J. S. Smucz, B. Pati, Y. Isyanova, P. F. Moulton, and J. G. Manni, IEEE J. Quantum Electron. 39, 1160 (2003).
[Crossref]

Nakao, H.

Nebel, A.

B. Köhler, T. Andres, A. Nebel, and R. Wallenstein, Conference on Lasers and Electro-Optics, OSA Technical Digest (Optical Society of America, 2000), paper CTuA8.

Noell, W.

D. Opalevs, M. Scholz, J. Stuhler, C. Gilfert, L. J. Liu, X. Y. Wang, A. Vetter, R. Kirner, T. Scharf, W. Noell, C. Rockstuhl, R. K. Li, C. Chen, R. Voelkel, and P. Leisching, Proc. SPIE 10511, 105112C (2018).
[Crossref]

Obara, M.

Oka, N.

Opalevs, D.

D. Opalevs, M. Scholz, J. Stuhler, C. Gilfert, L. J. Liu, X. Y. Wang, A. Vetter, R. Kirner, T. Scharf, W. Noell, C. Rockstuhl, R. K. Li, C. Chen, R. Voelkel, and P. Leisching, Proc. SPIE 10511, 105112C (2018).
[Crossref]

M. Scholz, D. Opalevs, P. Leisching, W. Kaenders, G. Wang, X. Wang, R. Li, and C. Chen, App. Phys. Lett. 103, 051114 (2013).
[Crossref]

Owa, S.

H. Kawai, A. Tokuhisa, M. Doi, S. Miwa, H. Matsuura, H. Kitano, and S. Owa, Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference, OSA Technical Digest (Optical Society of America, 2003), paper CTuT4.

Paré, C.

V. Roy, C. Paré, H. Zheng, P. Laperle, L. Desbiens, and Y. Taillon, Conference on Lasers and Electro-Optics Europe—European Quantum Electronics Conference, OSA Technical Digest (Optical Society of America, 2013), paper Cj_11_4.

Pati, B.

K. F. Wall, J. S. Smucz, B. Pati, Y. Isyanova, P. F. Moulton, and J. G. Manni, IEEE J. Quantum Electron. 39, 1160 (2003).
[Crossref]

Petrov, V.

K. Miyata, F. Rotermnd, and V. Petrov, IEEE Photon. Technol. Lett. 21, 1417 (2009).
[Crossref]

Proulx, A.

P. Laperle, L. Desbiens, H. Zheng, M. Drolet, A. Proulx, and Y. Taillon, Proc. SPIE 7580, 75801Y (2010).
[Crossref]

Qu, C.

Rockstuhl, C.

D. Opalevs, M. Scholz, J. Stuhler, C. Gilfert, L. J. Liu, X. Y. Wang, A. Vetter, R. Kirner, T. Scharf, W. Noell, C. Rockstuhl, R. K. Li, C. Chen, R. Voelkel, and P. Leisching, Proc. SPIE 10511, 105112C (2018).
[Crossref]

Rotermnd, F.

K. Miyata, F. Rotermnd, and V. Petrov, IEEE Photon. Technol. Lett. 21, 1417 (2009).
[Crossref]

Roy, V.

L. Desbiens, M. Drolet, V. Roy, M. M. Sisto, and Y. Taillon, Proc. SPIE 7914, 791420 (2011).
[Crossref]

V. Roy, C. Paré, H. Zheng, P. Laperle, L. Desbiens, and Y. Taillon, Conference on Lasers and Electro-Optics Europe—European Quantum Electronics Conference, OSA Technical Digest (Optical Society of America, 2013), paper Cj_11_4.

Sakuma, J.

Sasa, T.

Sasaura, M.

Scharf, T.

D. Opalevs, M. Scholz, J. Stuhler, C. Gilfert, L. J. Liu, X. Y. Wang, A. Vetter, R. Kirner, T. Scharf, W. Noell, C. Rockstuhl, R. K. Li, C. Chen, R. Voelkel, and P. Leisching, Proc. SPIE 10511, 105112C (2018).
[Crossref]

Scholz, M.

D. Opalevs, M. Scholz, J. Stuhler, C. Gilfert, L. J. Liu, X. Y. Wang, A. Vetter, R. Kirner, T. Scharf, W. Noell, C. Rockstuhl, R. K. Li, C. Chen, R. Voelkel, and P. Leisching, Proc. SPIE 10511, 105112C (2018).
[Crossref]

M. Scholz, D. Opalevs, P. Leisching, W. Kaenders, G. Wang, X. Wang, R. Li, and C. Chen, App. Phys. Lett. 103, 051114 (2013).
[Crossref]

Sekita, H.

J. Sakuma, Y. Asakawa, T. Sumiyoshi, and H. Sekita, IEEE J. Sel. Top. Quantum Electron. 10, 1244 (2004).
[Crossref]

Shinozaki, T.

S. Imai, K. Matsuki, N. Kikuiri, K. Takayama, O. Iwase, Y. Urata, T. Shinozaki, Y. Wada, and S. Wada, Proc. SPIE 7580, 75800H (2010).
[Crossref]

Y. Urata, T. Shinozaki, Y. Wada, Y. Kaneda, S. Wada, and S. Imai, Appl. Opt. 48, 1668 (2009).
[Crossref]

Sisto, M. M.

L. Desbiens, M. Drolet, V. Roy, M. M. Sisto, and Y. Taillon, Proc. SPIE 7914, 791420 (2011).
[Crossref]

Smith, A. V.

D. A. V. Kliner, F. Di Teodoro, J. P. Koplow, S. W. Moore, and A. V. Smith, Opt. Commun. 210, 393 (2002).
[Crossref]

Smucz, J. S.

K. F. Wall, J. S. Smucz, B. Pati, Y. Isyanova, P. F. Moulton, and J. G. Manni, IEEE J. Quantum Electron. 39, 1160 (2003).
[Crossref]

Stokowski, S.

S. Stokowski and M. Vaez-Iravani, AIP Conf. Proc. 449, 405 (1998).
[Crossref]

Stuhler, J.

D. Opalevs, M. Scholz, J. Stuhler, C. Gilfert, L. J. Liu, X. Y. Wang, A. Vetter, R. Kirner, T. Scharf, W. Noell, C. Rockstuhl, R. K. Li, C. Chen, R. Voelkel, and P. Leisching, Proc. SPIE 10511, 105112C (2018).
[Crossref]

Sumiyoshi, T.

J. Sakuma, Y. Asakawa, T. Sumiyoshi, and H. Sekita, IEEE J. Sel. Top. Quantum Electron. 10, 1244 (2004).
[Crossref]

Tago, T.

Taillon, Y.

L. Desbiens, M. Drolet, V. Roy, M. M. Sisto, and Y. Taillon, Proc. SPIE 7914, 791420 (2011).
[Crossref]

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V. Roy, C. Paré, H. Zheng, P. Laperle, L. Desbiens, and Y. Taillon, Conference on Lasers and Electro-Optics Europe—European Quantum Electronics Conference, OSA Technical Digest (Optical Society of America, 2013), paper Cj_11_4.

Takayama, K.

S. Imai, K. Matsuki, N. Kikuiri, K. Takayama, O. Iwase, Y. Urata, T. Shinozaki, Y. Wada, and S. Wada, Proc. SPIE 7580, 75800H (2010).
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H. Kawai, A. Tokuhisa, M. Doi, S. Miwa, H. Matsuura, H. Kitano, and S. Owa, Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference, OSA Technical Digest (Optical Society of America, 2003), paper CTuT4.

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K. Kato, S. G. Grechin, and N. Umemura, Laser Phys. 28, 095403 (2018).
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K. Kato, N. Umemura, and T. Mikami, Proc. SPIE 7582, 78821L (2010).

Urata, Y.

S. Imai, K. Matsuki, N. Kikuiri, K. Takayama, O. Iwase, Y. Urata, T. Shinozaki, Y. Wada, and S. Wada, Proc. SPIE 7580, 75800H (2010).
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Y. Urata, T. Shinozaki, Y. Wada, Y. Kaneda, S. Wada, and S. Imai, Appl. Opt. 48, 1668 (2009).
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A. J. Merriam, J. J. Jacob, D. Van Den Broeke, S. Hsu, J. F. Chen, and B. Kasprowicz, Proc. SPIE 5567, 894 (2004).
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Vetter, A.

D. Opalevs, M. Scholz, J. Stuhler, C. Gilfert, L. J. Liu, X. Y. Wang, A. Vetter, R. Kirner, T. Scharf, W. Noell, C. Rockstuhl, R. K. Li, C. Chen, R. Voelkel, and P. Leisching, Proc. SPIE 10511, 105112C (2018).
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Voelkel, R.

D. Opalevs, M. Scholz, J. Stuhler, C. Gilfert, L. J. Liu, X. Y. Wang, A. Vetter, R. Kirner, T. Scharf, W. Noell, C. Rockstuhl, R. K. Li, C. Chen, R. Voelkel, and P. Leisching, Proc. SPIE 10511, 105112C (2018).
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Wada, S.

S. Imai, K. Matsuki, N. Kikuiri, K. Takayama, O. Iwase, Y. Urata, T. Shinozaki, Y. Wada, and S. Wada, Proc. SPIE 7580, 75800H (2010).
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Y. Urata, T. Shinozaki, Y. Wada, Y. Kaneda, S. Wada, and S. Imai, Appl. Opt. 48, 1668 (2009).
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S. Imai, K. Matsuki, N. Kikuiri, K. Takayama, O. Iwase, Y. Urata, T. Shinozaki, Y. Wada, and S. Wada, Proc. SPIE 7580, 75800H (2010).
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B. Köhler, T. Andres, A. Nebel, and R. Wallenstein, Conference on Lasers and Electro-Optics, OSA Technical Digest (Optical Society of America, 2000), paper CTuA8.

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M. Scholz, D. Opalevs, P. Leisching, W. Kaenders, G. Wang, X. Wang, R. Li, and C. Chen, App. Phys. Lett. 103, 051114 (2013).
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D. Opalevs, M. Scholz, J. Stuhler, C. Gilfert, L. J. Liu, X. Y. Wang, A. Vetter, R. Kirner, T. Scharf, W. Noell, C. Rockstuhl, R. K. Li, C. Chen, R. Voelkel, and P. Leisching, Proc. SPIE 10511, 105112C (2018).
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Watanabe, S.

Xuan, H.

Zhao, Z.

Zheng, H.

P. Laperle, L. Desbiens, H. Zheng, M. Drolet, A. Proulx, and Y. Taillon, Proc. SPIE 7580, 75801Y (2010).
[Crossref]

V. Roy, C. Paré, H. Zheng, P. Laperle, L. Desbiens, and Y. Taillon, Conference on Lasers and Electro-Optics Europe—European Quantum Electronics Conference, OSA Technical Digest (Optical Society of America, 2013), paper Cj_11_4.

AIP Conf. Proc. (1)

S. Stokowski and M. Vaez-Iravani, AIP Conf. Proc. 449, 405 (1998).
[Crossref]

App. Phys. Lett. (1)

M. Scholz, D. Opalevs, P. Leisching, W. Kaenders, G. Wang, X. Wang, R. Li, and C. Chen, App. Phys. Lett. 103, 051114 (2013).
[Crossref]

Appl. Opt. (1)

IEEE J. Quantum Electron. (2)

K. F. Wall, J. S. Smucz, B. Pati, Y. Isyanova, P. F. Moulton, and J. G. Manni, IEEE J. Quantum Electron. 39, 1160 (2003).
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IEEE Photon. Technol. Lett. (1)

K. Miyata, F. Rotermnd, and V. Petrov, IEEE Photon. Technol. Lett. 21, 1417 (2009).
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Laser Phys. (1)

K. Kato, S. G. Grechin, and N. Umemura, Laser Phys. 28, 095403 (2018).
[Crossref]

Opt. Commun. (1)

D. A. V. Kliner, F. Di Teodoro, J. P. Koplow, S. W. Moore, and A. V. Smith, Opt. Commun. 210, 393 (2002).
[Crossref]

Opt. Express (4)

Opt. Lett. (2)

Proc. SPIE (6)

S. Imai, K. Matsuki, N. Kikuiri, K. Takayama, O. Iwase, Y. Urata, T. Shinozaki, Y. Wada, and S. Wada, Proc. SPIE 7580, 75800H (2010).
[Crossref]

D. Opalevs, M. Scholz, J. Stuhler, C. Gilfert, L. J. Liu, X. Y. Wang, A. Vetter, R. Kirner, T. Scharf, W. Noell, C. Rockstuhl, R. K. Li, C. Chen, R. Voelkel, and P. Leisching, Proc. SPIE 10511, 105112C (2018).
[Crossref]

L. Desbiens, M. Drolet, V. Roy, M. M. Sisto, and Y. Taillon, Proc. SPIE 7914, 791420 (2011).
[Crossref]

A. J. Merriam, J. J. Jacob, D. Van Den Broeke, S. Hsu, J. F. Chen, and B. Kasprowicz, Proc. SPIE 5567, 894 (2004).
[Crossref]

P. Laperle, L. Desbiens, H. Zheng, M. Drolet, A. Proulx, and Y. Taillon, Proc. SPIE 7580, 75801Y (2010).
[Crossref]

K. Kato, N. Umemura, and T. Mikami, Proc. SPIE 7582, 78821L (2010).

Other (3)

H. Kawai, A. Tokuhisa, M. Doi, S. Miwa, H. Matsuura, H. Kitano, and S. Owa, Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference, OSA Technical Digest (Optical Society of America, 2003), paper CTuT4.

V. Roy, C. Paré, H. Zheng, P. Laperle, L. Desbiens, and Y. Taillon, Conference on Lasers and Electro-Optics Europe—European Quantum Electronics Conference, OSA Technical Digest (Optical Society of America, 2013), paper Cj_11_4.

B. Köhler, T. Andres, A. Nebel, and R. Wallenstein, Conference on Lasers and Electro-Optics, OSA Technical Digest (Optical Society of America, 2000), paper CTuA8.

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Figures (3)

Fig. 1.
Fig. 1. (a) Concept of DUV laser platform and long-term power trace with (b) fixed, (c) intermittent, and (d) continuous crystal position and temperature setting.
Fig. 2.
Fig. 2. (a) Average power, (b) beam quality, (c) beam profile, and (d) spectrum of 213-nm output.
Fig. 3.
Fig. 3. Long-term 213-nm power stability. The output power P is recorded every one min along with BBO and ambient temperatures T . Power fluctuation δ P , is calculated by P / P a v 1 where P a v is the six-min moving mean.

Tables (1)

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Table 1. Phase-Matching Properties of Nonlinear Optical Crystals for Cascade 5HG ( 2 ω + 3 ω 5 ω )

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