Improved performance of transparent-conducting AZO/Cu/AZO multilayer thin films by inserting a metal Ti layer for flexible electronics

Shihui Yu; Yifan Liu; Haoran Zheng; Lingxia Li; Yongtao Sun

doi:10.1364/OL.42.003020

Optics Letters
Vol. 42,
Issue 15,
pp. 3020-3023
(2017)
•https://doi.org/10.1364/OL.42.003020

Improved performance of transparent-conducting AZO/Cu/AZO multilayer thin films by inserting a metal Ti layer for flexible electronics

Shihui Yu, Yifan Liu, Haoran Zheng, Lingxia Li, and Yongtao Sun

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Shihui Yu, Yifan Liu, Haoran Zheng, Lingxia Li, and Yongtao Sun, "Improved performance of transparent-conducting AZO/Cu/AZO multilayer thin films by inserting a metal Ti layer for flexible electronics," Opt. Lett. 42, 3020-3023 (2017)

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Abstract

In order to improve the performance of transparent conductive Al-doped ZnO (AZO)/Cu/Al-doped ZnO multilayer thin films, multilayer thin films of titanium-embedded AZO/Cu/AZO structures have been designed and deposited onto flexible polycarbonate substrates to develop an indium-free transparent flexible electrode. The effect of Ti layer on the structural, optical, and electrical properties of multilayer thin films was investigated. The experiments reveal that the AZO/Ti/Cu/AZO fabricated in argon-oxygen mixtures has the best performance (commutation quality factor of 422.0): resistivity of $3.85 \times 10^{- 5} Ω \cdot cm$ , sheet resistance of $4.31 Ω / sq$ , carrier concentration of $1.65 \times 10^{22} {cm}^{- 3}$ , mobility of $9.87 {cm}^{2} / Vs$ , and acceptable luminous transmittance of above 82% in the visible range.

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	Resistivity ( $\times 10^{- 5} Ω \cdot cm$ )	Sheet Resistance (Ω/sq)	Carrier Concentration ( $\times 10^{22} {cm}^{- 3}$ )	Mobility ( ${cm}^{2} / Vs$ )
ACA	$4.91 \pm 0.05$	$5.62 \pm 0.03$	$1.56 \pm 0.03$	$8.17 \pm 0.04$
ACAO	$158 \pm 3$	$176.71 \pm 0.05$	$0.04 \pm 0.01$	$9.03 \pm 0.03$
ACAT	$3.85 \pm 0.03$	$4.31 \pm 0.05$	$1.65 \pm 0.02$	$9.87 \pm 0.05$
AZO	9806	11732	$6.61 \times 10^{- 4}$	$9.75 \pm 0.06$
AZO with $O_{2}$	12891	14027	$4.57 \times 10^{- 4}$	$10.52 \pm 0.04$

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