Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Optimizing the nanoscale quantitative optical imaging of subfield scattering targets

Not Accessible

Your library or personal account may give you access

Abstract

The full 3-D scattered field above finite sets of features has been shown to contain a continuum of spatial frequency information and, with novel optical microscopy techniques and electromagnetic modeling, deep-subwavelength geometrical parameters can be determined. Similarly, by using simulations, scattering geometries and experimental conditions can be established to tailor scattered fields that yield lower parametric uncertainties while decreasing the number of measurements and the area of such finite sets of features. Such optimized conditions are reported through quantitative optical imaging in 193 nm scatterfield microscopy using feature sets up to four times smaller in area than state-of-the-art critical dimension targets.

© 2016 Optical Society of America

Full Article  |  PDF Article
More Like This
Effect of partial coherence on dimensional measurement sensitivity for DUV scatterfield imaging microscopy

Yoon Sung Bae, Martin Y. Sohn, Dong-Ryoung Lee, and Sang-Soo Choi
Opt. Express 27(21) 29938-29948 (2019)

Quantitative fuel vapor/air mixing imaging in droplet/gas regions of an evaporating spray flow using filtered Rayleigh scattering

Patton M. Allison, Thomas A. McManus, and Jeffrey A. Sutton
Opt. Lett. 41(6) 1074-1077 (2016)

Temporal correlations imaging fixed targets through turbulence

Damián Gulich
Opt. Lett. 41(12) 2855-2858 (2016)

Supplementary Material (1)

NameDescription
Code 1       Library to enable the modeling of optical imaging of finite multi-Line arrays

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (1)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved