Abstract

We make use of the color sensitivity of the naked human eye to solve the inverse grating problem. We conduct color-matching experiments between simulated colors and the color of the zero diffraction order, and show that human color vision may reveal structure dimensions at an accuracy in the order of ten nanometers, which is comparable to the precision of destructive methods such as scanning electron microscopy. Our results suggest that for a wide range of structures, the color observation may help to get quick, but still accurate, results, without any sophisticated instrumentation.

© 2014 Optical Society of America

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