Abstract

We demonstrate a sub-micron silica diaphragm-based fiber-tip Fabry–Perot interferometer for pressure sensing applications. The thinnest silica diaphragm, with a thickness of ∼320  nm, has been achieved by use of an improved electrical arc discharge technique. Such a sub-micron silica diaphragm breaks the sensitivity limitation imposed by traditional all-silica Fabry–Perot interferometric pressure sensors and, as a result, a high pressure sensitivity of ∼1036  pm/MPa at 1550 nm and a low temperature cross-sensitivity of ∼960  Pa/°C are achieved when a silica diaphragm of ∼500  nm in thickness is used. Moreover, the all-silica spherical structure enhanced the mechanical strength of the micro-cavity sensor, making it suitable for high sensitivity pressure sensing in harsh environments.

© 2014 Optical Society of America

PDF Article

References

  • View by:
  • |
  • |
  • |

  1. Y. J. Rao, Opt. Fiber Technol. 12, 227 (2006).
    [CrossRef]
  2. Y. Wang, D. N. Wang, W. Jin, and X. Fang, IEEE J. Quantum Electron. 42, 868 (2006).
    [CrossRef]
  3. D. Donlagic and E. Cibula, Opt. Lett. 30, 2071 (2005).
    [CrossRef]
  4. Y. Z. Zhu and A. B. Wang, IEEE Photon. Technol. Lett. 17, 447 (2005).
    [CrossRef]
  5. W. H. Wang, N. Wu, Y. Tian, C. Niezrecki, and X. W. Wang, Opt. Express 18, 9006 (2010).
    [CrossRef]
  6. H. Bae and M. Yu, Opt. Express 20, 14573 (2012).
    [CrossRef]
  7. G. Guo, T. Fink, M. Han, L. Koester, T. Turner, and J. Huang, Opt. Lett. 37, 1505 (2012).
    [CrossRef]
  8. J. Ma, W. Jin, H. L. Ho, and J. Y. Dai, Opt. Lett. 37, 2493 (2012).
    [CrossRef]
  9. Y. Wang, D. N. Wang, C. Wang, and T. Y. Hu, Opt. Express 21, 14084 (2013).
    [CrossRef]
  10. J. Ma, J. Ju, L. Jin, and W. Jin, IEEE Photon. Technol. Lett. 23, 1561 (2011).
    [CrossRef]
  11. C. Liao, T. Y. Hu, and D. N. Wang, Opt. Express 20, 22813 (2012).
    [CrossRef]
  12. C. Liao, L. Xu, C. Wang, D. N. Wang, Y. Wang, Q. Wang, K. Yang, Z. Li, X. Zhong, J. Zhou, and Y. Liu, Opt. Lett. 38, 4473 (2013).
    [CrossRef]
  13. Y. Rao, X. Zeng, Y. Zhu, Y. Wang, T. Zhu, Z. Ran, L. Zhang, and I. Bennion, Chin. Phys. Lett. 18, 643 (2001).
    [CrossRef]
  14. Y. Wang, L. Xiao, D. N. Wang, and W. Jin, Opt. Lett. 31, 3414 (2006).
    [CrossRef]
  15. C. Liao, D. N. Wang, Y. Li, T. Sun, and K. T. V. Grattan, Appl. Opt. 48, 3001 (2009).
    [CrossRef]

2013 (2)

2012 (4)

2011 (1)

J. Ma, J. Ju, L. Jin, and W. Jin, IEEE Photon. Technol. Lett. 23, 1561 (2011).
[CrossRef]

2010 (1)

2009 (1)

2006 (3)

Y. Wang, L. Xiao, D. N. Wang, and W. Jin, Opt. Lett. 31, 3414 (2006).
[CrossRef]

Y. J. Rao, Opt. Fiber Technol. 12, 227 (2006).
[CrossRef]

Y. Wang, D. N. Wang, W. Jin, and X. Fang, IEEE J. Quantum Electron. 42, 868 (2006).
[CrossRef]

2005 (2)

Y. Z. Zhu and A. B. Wang, IEEE Photon. Technol. Lett. 17, 447 (2005).
[CrossRef]

D. Donlagic and E. Cibula, Opt. Lett. 30, 2071 (2005).
[CrossRef]

2001 (1)

Y. Rao, X. Zeng, Y. Zhu, Y. Wang, T. Zhu, Z. Ran, L. Zhang, and I. Bennion, Chin. Phys. Lett. 18, 643 (2001).
[CrossRef]

Bae, H.

Bennion, I.

Y. Rao, X. Zeng, Y. Zhu, Y. Wang, T. Zhu, Z. Ran, L. Zhang, and I. Bennion, Chin. Phys. Lett. 18, 643 (2001).
[CrossRef]

Cibula, E.

Dai, J. Y.

Donlagic, D.

Fang, X.

Y. Wang, D. N. Wang, W. Jin, and X. Fang, IEEE J. Quantum Electron. 42, 868 (2006).
[CrossRef]

Fink, T.

Grattan, K. T. V.

Guo, G.

Han, M.

Ho, H. L.

Hu, T. Y.

Huang, J.

Jin, L.

J. Ma, J. Ju, L. Jin, and W. Jin, IEEE Photon. Technol. Lett. 23, 1561 (2011).
[CrossRef]

Jin, W.

J. Ma, W. Jin, H. L. Ho, and J. Y. Dai, Opt. Lett. 37, 2493 (2012).
[CrossRef]

J. Ma, J. Ju, L. Jin, and W. Jin, IEEE Photon. Technol. Lett. 23, 1561 (2011).
[CrossRef]

Y. Wang, D. N. Wang, W. Jin, and X. Fang, IEEE J. Quantum Electron. 42, 868 (2006).
[CrossRef]

Y. Wang, L. Xiao, D. N. Wang, and W. Jin, Opt. Lett. 31, 3414 (2006).
[CrossRef]

Ju, J.

J. Ma, J. Ju, L. Jin, and W. Jin, IEEE Photon. Technol. Lett. 23, 1561 (2011).
[CrossRef]

Koester, L.

Li, Y.

Li, Z.

Liao, C.

Liu, Y.

Ma, J.

J. Ma, W. Jin, H. L. Ho, and J. Y. Dai, Opt. Lett. 37, 2493 (2012).
[CrossRef]

J. Ma, J. Ju, L. Jin, and W. Jin, IEEE Photon. Technol. Lett. 23, 1561 (2011).
[CrossRef]

Niezrecki, C.

Ran, Z.

Y. Rao, X. Zeng, Y. Zhu, Y. Wang, T. Zhu, Z. Ran, L. Zhang, and I. Bennion, Chin. Phys. Lett. 18, 643 (2001).
[CrossRef]

Rao, Y.

Y. Rao, X. Zeng, Y. Zhu, Y. Wang, T. Zhu, Z. Ran, L. Zhang, and I. Bennion, Chin. Phys. Lett. 18, 643 (2001).
[CrossRef]

Rao, Y. J.

Y. J. Rao, Opt. Fiber Technol. 12, 227 (2006).
[CrossRef]

Sun, T.

Tian, Y.

Turner, T.

Wang, A. B.

Y. Z. Zhu and A. B. Wang, IEEE Photon. Technol. Lett. 17, 447 (2005).
[CrossRef]

Wang, C.

Wang, D. N.

Wang, Q.

Wang, W. H.

Wang, X. W.

Wang, Y.

Wu, N.

Xiao, L.

Xu, L.

Yang, K.

Yu, M.

Zeng, X.

Y. Rao, X. Zeng, Y. Zhu, Y. Wang, T. Zhu, Z. Ran, L. Zhang, and I. Bennion, Chin. Phys. Lett. 18, 643 (2001).
[CrossRef]

Zhang, L.

Y. Rao, X. Zeng, Y. Zhu, Y. Wang, T. Zhu, Z. Ran, L. Zhang, and I. Bennion, Chin. Phys. Lett. 18, 643 (2001).
[CrossRef]

Zhong, X.

Zhou, J.

Zhu, T.

Y. Rao, X. Zeng, Y. Zhu, Y. Wang, T. Zhu, Z. Ran, L. Zhang, and I. Bennion, Chin. Phys. Lett. 18, 643 (2001).
[CrossRef]

Zhu, Y.

Y. Rao, X. Zeng, Y. Zhu, Y. Wang, T. Zhu, Z. Ran, L. Zhang, and I. Bennion, Chin. Phys. Lett. 18, 643 (2001).
[CrossRef]

Zhu, Y. Z.

Y. Z. Zhu and A. B. Wang, IEEE Photon. Technol. Lett. 17, 447 (2005).
[CrossRef]

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Metrics