Abstract

We demonstrate a sub-micron silica diaphragm-based fiber-tip Fabry–Perot interferometer for pressure sensing applications. The thinnest silica diaphragm, with a thickness of 320nm, has been achieved by use of an improved electrical arc discharge technique. Such a sub-micron silica diaphragm breaks the sensitivity limitation imposed by traditional all-silica Fabry–Perot interferometric pressure sensors and, as a result, a high pressure sensitivity of 1036pm/MPa at 1550 nm and a low temperature cross-sensitivity of 960Pa/°C are achieved when a silica diaphragm of 500nm in thickness is used. Moreover, the all-silica spherical structure enhanced the mechanical strength of the micro-cavity sensor, making it suitable for high sensitivity pressure sensing in harsh environments.

© 2014 Optical Society of America

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