Abstract

We demonstrate a sub-micron silica diaphragm-based fiber-tip Fabry–Perot interferometer for pressure sensing applications. The thinnest silica diaphragm, with a thickness of 320nm, has been achieved by use of an improved electrical arc discharge technique. Such a sub-micron silica diaphragm breaks the sensitivity limitation imposed by traditional all-silica Fabry–Perot interferometric pressure sensors and, as a result, a high pressure sensitivity of 1036pm/MPa at 1550 nm and a low temperature cross-sensitivity of 960Pa/°C are achieved when a silica diaphragm of 500nm in thickness is used. Moreover, the all-silica spherical structure enhanced the mechanical strength of the micro-cavity sensor, making it suitable for high sensitivity pressure sensing in harsh environments.

© 2014 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Fiber-tip gas pressure sensor based on dual capillaries

Ben Xu, Chao Wang, D. N. Wang, Yaming Liu, and Yi Li
Opt. Express 23(18) 23484-23492 (2015)

Compressible fiber optic micro-Fabry-Pérot cavity with ultra-high pressure sensitivity

Ying Wang, D. N. Wang, Chao Wang, and Tianyi Hu
Opt. Express 21(12) 14084-14089 (2013)

Silk fibroin diaphragm-based fiber-tip Fabry-Perot pressure sensor

Linghao Cheng, Cengzhong Wang, Yunyun Huang, Hao Liang, and Bai-Ou Guan
Opt. Express 24(17) 19600-19606 (2016)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (2)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription