Abstract

We present an experimental setup that combines optical coherence elastography depth sensing with atomic force microscope indentation. The instrument relies on a miniaturized cantilever probe that compresses a sample with a small footprint force and simultaneously collects an optical coherence tomography (OCT) depth profile underneath the indenting point. The deflection of the cantilever can be monitored via optical fiber interferometry with a resolution of 2 nm. The OCT readout then provides depth profiles of the subsurface layer deformation with 15 nm resolution and depth range of a few millimeters.

© 2013 Optical Society of America

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  2. H. J. Butt, B. Cappella, and M. Kappl, Surf. Sci. Rep. 59, 1 (2005).
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  5. G. Gruca, S. de Man, M. Slaman, J. H. Rector, and D. Iannuzzi, Proc. SPIE 7503, 750381 (2009).
    [CrossRef]
  6. D. Chavan, T. C. van de Watering, G. Gruca, J. H. Rector, K. Heeck, M. Slaman, and D. Iannuzzi, Rev. Sci. Instrum. 83, 115110 (2012).
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    [CrossRef]

2012 (3)

2011 (1)

2009 (1)

G. Gruca, S. de Man, M. Slaman, J. H. Rector, and D. Iannuzzi, Proc. SPIE 7503, 750381 (2009).
[CrossRef]

2006 (1)

It is worth recalling that the first paper that makes use of phase information for OCE is R. K. Wang, Z. Ma, and S. J. Kirkpatrick, Appl. Phys. Lett. 89, 144103 (2006).
[CrossRef]

2005 (2)

2003 (1)

1998 (1)

Adie, S. G.

Akkin, T.

Boppart, S. A.

Bouma, B. E.

Butt, H. J.

H. J. Butt, B. Cappella, and M. Kappl, Surf. Sci. Rep. 59, 1 (2005).
[CrossRef]

Cappella, B.

H. J. Butt, B. Cappella, and M. Kappl, Surf. Sci. Rep. 59, 1 (2005).
[CrossRef]

Cense, B.

Chavan, D.

D. Chavan, T. C. van de Watering, G. Gruca, J. H. Rector, K. Heeck, M. Slaman, and D. Iannuzzi, Rev. Sci. Instrum. 83, 115110 (2012).
[CrossRef]

Daniels, J. M. A.

de Boer, J. F.

de Groot, M.

de Man, S.

G. Gruca, S. de Man, M. Slaman, J. H. Rector, and D. Iannuzzi, Proc. SPIE 7503, 750381 (2009).
[CrossRef]

Gerstmann, D. K.

Gruca, G.

D. Chavan, T. C. van de Watering, G. Gruca, J. H. Rector, K. Heeck, M. Slaman, and D. Iannuzzi, Rev. Sci. Instrum. 83, 115110 (2012).
[CrossRef]

G. Gruca, S. de Man, M. Slaman, J. H. Rector, and D. Iannuzzi, Proc. SPIE 7503, 750381 (2009).
[CrossRef]

Grünberg, K.

Heeck, K.

D. Chavan, T. C. van de Watering, G. Gruca, J. H. Rector, K. Heeck, M. Slaman, and D. Iannuzzi, Rev. Sci. Instrum. 83, 115110 (2012).
[CrossRef]

Helderman, F.

Iannuzzi, D.

D. Chavan, T. C. van de Watering, G. Gruca, J. H. Rector, K. Heeck, M. Slaman, and D. Iannuzzi, Rev. Sci. Instrum. 83, 115110 (2012).
[CrossRef]

G. Gruca, S. de Man, M. Slaman, J. H. Rector, and D. Iannuzzi, Proc. SPIE 7503, 750381 (2009).
[CrossRef]

Iftimia, N.

Joo, C.

Kappl, M.

H. J. Butt, B. Cappella, and M. Kappl, Surf. Sci. Rep. 59, 1 (2005).
[CrossRef]

Kennedy, B. F.

Kennedy, K. M.

Kirkpatrick, S. J.

It is worth recalling that the first paper that makes use of phase information for OCE is R. K. Wang, Z. Ma, and S. J. Kirkpatrick, Appl. Phys. Lett. 89, 144103 (2006).
[CrossRef]

Li, J.

Liang, X.

Ma, Z.

It is worth recalling that the first paper that makes use of phase information for OCE is R. K. Wang, Z. Ma, and S. J. Kirkpatrick, Appl. Phys. Lett. 89, 144103 (2006).
[CrossRef]

McLaughlin, R. A.

Mo, J.

Park, B. H.

Quirk, B. C.

Rector, J. H.

D. Chavan, T. C. van de Watering, G. Gruca, J. H. Rector, K. Heeck, M. Slaman, and D. Iannuzzi, Rev. Sci. Instrum. 83, 115110 (2012).
[CrossRef]

G. Gruca, S. de Man, M. Slaman, J. H. Rector, and D. Iannuzzi, Proc. SPIE 7503, 750381 (2009).
[CrossRef]

Sampson, D. D.

Schmitt, J.

Slaman, M.

D. Chavan, T. C. van de Watering, G. Gruca, J. H. Rector, K. Heeck, M. Slaman, and D. Iannuzzi, Rev. Sci. Instrum. 83, 115110 (2012).
[CrossRef]

G. Gruca, S. de Man, M. Slaman, J. H. Rector, and D. Iannuzzi, Proc. SPIE 7503, 750381 (2009).
[CrossRef]

Sutedja, T. G.

Tearney, G. J.

van de Watering, T. C.

D. Chavan, T. C. van de Watering, G. Gruca, J. H. Rector, K. Heeck, M. Slaman, and D. Iannuzzi, Rev. Sci. Instrum. 83, 115110 (2012).
[CrossRef]

Wang, R. K.

It is worth recalling that the first paper that makes use of phase information for OCE is R. K. Wang, Z. Ma, and S. J. Kirkpatrick, Appl. Phys. Lett. 89, 144103 (2006).
[CrossRef]

Yun, S. H.

Appl. Phys. Lett. (1)

It is worth recalling that the first paper that makes use of phase information for OCE is R. K. Wang, Z. Ma, and S. J. Kirkpatrick, Appl. Phys. Lett. 89, 144103 (2006).
[CrossRef]

Opt. Express (4)

Opt. Lett. (2)

Proc. SPIE (1)

G. Gruca, S. de Man, M. Slaman, J. H. Rector, and D. Iannuzzi, Proc. SPIE 7503, 750381 (2009).
[CrossRef]

Rev. Sci. Instrum. (1)

D. Chavan, T. C. van de Watering, G. Gruca, J. H. Rector, K. Heeck, M. Slaman, and D. Iannuzzi, Rev. Sci. Instrum. 83, 115110 (2012).
[CrossRef]

Surf. Sci. Rep. (1)

H. J. Butt, B. Cappella, and M. Kappl, Surf. Sci. Rep. 59, 1 (2005).
[CrossRef]

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Figures (4)

Fig. 1.
Fig. 1.

(a) Overview of the fabrication process of the ferrule-top probe used in this study. (i) The building block is a single bore borosilicate ferrule. (ii) The block is carved in the form of a rectangular ridge with a wire cutter. (iii) A v-groove is then carved on the side of the ferrule with a wire cutter, which is also used to further machine a cantilever out of the ridge. (iv) A capillary tube is laid on the v-groove and glued. (v) The tube is cut to free the cantilever; two optical fibers are then inserted into the bore hole and into the capillary tube, respectively, and glued. Finally, the top surface of the device is coated with gold. (vi) Schematics of a probe. (b) Microscope image of the ferrule-top probe used in this study.

Fig. 2.
Fig. 2.

OCT A-Line scan showing reference peak and PDMS sample interfaces peak.

Fig. 3.
Fig. 3.

Upper graph (black line): deflection of the cantilever as a function of the elongation of the piezoelectric stage that moves a multilayered sample against the tip of the cantilever. Bottom graph (colored lines): vertical position of the different parts of the sample during the indentation stroke as obtained from the OCT depth profile data.

Fig. 4.
Fig. 4.

Deformation of a channel when filled with water or air.

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