Abstract

The real-time reflection coefficient (both of the reflection phase and the amplitude) at normal incidence of a single wavelength was acquired from the real-time spectrum of a broadband optical monitor. This is a powerful monitoring technique for multilayer interference coatings. The monitoring method shows high stability and good error compensation ability without deposition termination ambiguity. The experiments demonstrated that reflection coefficient monitoring has remarkable performance compared with other monitoring methods. Without changing the monitoring chip, the conventional broadband monitoring was improved 82% closer to the design by the proposed monitoring method.

© 2013 Optical Society of America

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References

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2012 (1)

2011 (1)

2007 (2)

2005 (1)

1986 (1)

1977 (1)

H. A. Macleod and E. Pelletier, Optica Acta 24, 907 (1977).
[CrossRef]

1972 (1)

H. A. Macleod, Optica Acta 19, 1 (1972).
[CrossRef]

Badoil, B.

Cai, Q. Y.

Cathelinaud, M.

Chen, L. Y.

Chen, S. H.

Kuo, C. C.

Lee, C. C.

Lemarchand, F.

Lequime, M.

Lin, W.

Lu, W. J.

Macleod, H. A.

H. A. Macleod and E. Pelletier, Optica Acta 24, 907 (1977).
[CrossRef]

H. A. Macleod, Optica Acta 19, 1 (1972).
[CrossRef]

H. A. Macleod, Thin Film Optical Filters, 3rd ed. (Institute of Physics, 2001), Chap. 2.

Ni, T. L.

Pelletier, E.

H. A. Macleod and E. Pelletier, Optica Acta 24, 907 (1977).
[CrossRef]

Van der Laan, C. J.

Wu, K.

Zhang, D. X.

Zhang, R. J.

Zhao, H. B.

Zheng, Y. X.

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Figures (3)

Fig. 1.
Fig. 1.

Reflection coefficient, transmittance, and optical admittance loci (from left to right).

Fig. 2.
Fig. 2.

Reflection coefficient loci of two-layer thin films.

Fig. 3.
Fig. 3.

Long-wave pass filters made by various monitoring methods.

Equations (3)

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r=ρeiφ=n0BCn0B+C,[BC]=j=1m[cosδjinjsinδjinjsinδjcosδj][1ns],
T=4n0ns(n0B+C)(n0B+C)*R=(n0BCn0B+C)(n0BCn0B+C)*.
MT=i[Tmeasured(λi)Tcal(nj(λi),dj,λi)]2orMR=i[Rmeasured(λi)Rcal(nj(λi),dj,λi)]2,

Metrics