Abstract

We demonstrate multichannel optical bandpass filters utilizing alternating dielectric multilayers stacked on a patterned substrate. A microstructured Si/SiO2 multilayer was formed by rf biased magnetron sputtering process on a fused silica substrate with surface gratings. The bandwidths of each filter channel were measured to be 50175nm in the near infrared region. Control of center wavelength and bandwidth by the grating pitch was verified.

© 2013 Optical Society of America

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