Abstract

Toward mid-infrared (mid-IR) silicon microphotonic circuits, we demonstrate broadband on-chip silicon structures, such as: (i) straight and bent waveguides and (ii) beam splitters, utilizing an air-clad pedestal configuration which eliminates the need for typical mid-IR-lossy oxide cladding. We illustrate a sophisticated fabrication process that can create high-quality pedestal structures in crystalline silicon, while preserving its mid-IR transparency. A fundamental waveguide mode is observed between λ=2.5μm and λ=3.7μm, and an optical loss of 2.7dB/cm is obtained at λ=3.7μm. Our pedestal silicon structures show 5050 mid-IR power splitting enabling the further development of mid-IR silicon microphotonics.

© 2013 Optical Society of America

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