Toward mid-infrared (mid-IR) silicon microphotonic circuits, we demonstrate broadband on-chip silicon structures, such as: (i) straight and bent waveguides and (ii) beam splitters, utilizing an air-clad pedestal configuration which eliminates the need for typical mid-IR-lossy oxide cladding. We illustrate a sophisticated fabrication process that can create high-quality pedestal structures in crystalline silicon, while preserving its mid-IR transparency. A fundamental waveguide mode is observed between and , and an optical loss of is obtained at . Our pedestal silicon structures show mid-IR power splitting enabling the further development of mid-IR silicon microphotonics.
© 2013 Optical Society of AmericaFull Article | PDF Article
Yongjin Wang, Xinli Cheng, Zhilang Lin, Fan Gao, and Feng Zhang
Opt. Express 12(21) 5154-5159 (2004)
Yongbin Lin, Jaime Cardenas, Seunghyun Kim, and Gregory P. Nordin
Opt. Express 14(26) 12803-12813 (2006)
Ee Jin Teo, Andrew A. Bettiol, Mark B. H. Breese, Pengyuan Yang, Goran Z. Mashanovich, William R. Headley, Graham T. Reed, and Daniel J. Blackwood
Opt. Express 16(2) 573-578 (2008)