Abstract

A terahertz (THz) wire-grid polarizer is fabricated by imprinting porous Si followed by oblique evaporation of Ag. We demonstrate that it works in a wide frequency region covering from 5 to 18 THz with the extinction ratio of 10 dB. The frequency region is much wider than that of THz wire-grid polarizers fabricated by conventional imprint lithography using organic materials. The result suggests that imprinting of porous Si is a promising fabrication technique to realize low-cost wire-grid polarizers working in the THz region.

© 2013 Optical Society of America

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2011

2010

S. C. Saha, Y. Ma, J. P. Grant, A. Khalid, and D. R. S. Cumming, Opt. Express 18, 12168 (2010).
[CrossRef]

I. Yamada, K. Fukumi, J. Nishii, and M. Saito, Opt. Lett. 35, 3111 (2010).
[CrossRef]

S. Z. A. Lo and T. M. Murphy, Appl. Phys. Lett. 96, 201104 (2010).
[CrossRef]

J. D. Ryckman, M. Liscidini, J. E. Sipe, and S. M. Weiss, Nano Lett. 11, 1857 (2010).
[CrossRef]

2009

2008

2007

E. D. Walsby, Opt. Lett. 32, 1141 (2007).
[CrossRef]

M. Khardani, M. Bouaïcha, and B. Bessaïs, Phys. Stat. Sol. 4, 1986 (2007).
[CrossRef]

2006

2005

1997

W. Theiss, Sur. Sci. Rep. 29, 91 (1997).
[CrossRef]

A. G. Cullis, L. T. Canham, and P. D. J. Calcott, J. Appl. Phys. 82, 909 (1997).
[CrossRef]

1993

Y. Kanemitsu, H. Uto, and Y. Masumoto, Phys. Rev. B 48, 2827 (1993).
[CrossRef]

1991

A. G. Cullis and L. T. Canham, Nature 353, 335 (1991).
[CrossRef]

1985

C. Pickering, M. I. J. Beale, D. J. Robbins, P. J. Pearson, and R. Greef, Thin Solid Films 125, 157 (1985).
[CrossRef]

1979

C. L. Mok, W. G. Chambers, T. J. Parker, and A. E. Costley, Infrared Phys. 19, 437 (1979).
[CrossRef]

1978

P. Yeh, Opt. Commun. 26, 289 (1978).
[CrossRef]

1976

Akioka, S.

Beale, M. I. J.

C. Pickering, M. I. J. Beale, D. J. Robbins, P. J. Pearson, and R. Greef, Thin Solid Films 125, 157 (1985).
[CrossRef]

Bessaïs, B.

M. Khardani, M. Bouaïcha, and B. Bessaïs, Phys. Stat. Sol. 4, 1986 (2007).
[CrossRef]

Bouaïcha, M.

M. Khardani, M. Bouaïcha, and B. Bessaïs, Phys. Stat. Sol. 4, 1986 (2007).
[CrossRef]

Calcott, P. D. J.

A. G. Cullis, L. T. Canham, and P. D. J. Calcott, J. Appl. Phys. 82, 909 (1997).
[CrossRef]

Canham, L. T.

A. G. Cullis, L. T. Canham, and P. D. J. Calcott, J. Appl. Phys. 82, 909 (1997).
[CrossRef]

A. G. Cullis and L. T. Canham, Nature 353, 335 (1991).
[CrossRef]

Chambers, W. G.

C. L. Mok, W. G. Chambers, T. J. Parker, and A. E. Costley, Infrared Phys. 19, 437 (1979).
[CrossRef]

Costley, A. E.

C. L. Mok, W. G. Chambers, T. J. Parker, and A. E. Costley, Infrared Phys. 19, 437 (1979).
[CrossRef]

Coutaz, J.-L.

Cullis, A. G.

A. G. Cullis, L. T. Canham, and P. D. J. Calcott, J. Appl. Phys. 82, 909 (1997).
[CrossRef]

A. G. Cullis and L. T. Canham, Nature 353, 335 (1991).
[CrossRef]

Cumming, D. R. S.

Fukumi, K.

Gallot, G.

Garet, F.

Grant, J. P.

Greef, R.

C. Pickering, M. I. J. Beale, D. J. Robbins, P. J. Pearson, and R. Greef, Thin Solid Films 125, 157 (1985).
[CrossRef]

Hangyo, M.

Hérault, E.

Icenogle, H. W.

Ichii, A.

Kanemitsu, Y.

Y. Kanemitsu, H. Uto, and Y. Masumoto, Phys. Rev. B 48, 2827 (1993).
[CrossRef]

Khalid, A.

Khardani, M.

M. Khardani, M. Bouaïcha, and B. Bessaïs, Phys. Stat. Sol. 4, 1986 (2007).
[CrossRef]

Kim, D.

Kintaka, K.

Kliger, D. S.

D. S. Kliger, J. W. Lewis, and G. E. Randall, Polarized Light Optics and Spectroscopy (Academic, 1990).

Lewis, J. W.

D. S. Kliger, J. W. Lewis, and G. E. Randall, Polarized Light Optics and Spectroscopy (Academic, 1990).

Liscidini, M.

J. D. Ryckman, M. Liscidini, J. E. Sipe, and S. M. Weiss, Nano Lett. 11, 1857 (2010).
[CrossRef]

Lo, S. Z. A.

S. Z. A. Lo and T. M. Murphy, Appl. Phys. Lett. 96, 201104 (2010).
[CrossRef]

S. Z. A. Lo and T. E. Murphy, Opt. Lett. 34, 2921 (2009).
[CrossRef]

Ma, Y.

Makowski, M.

Masson, J.-B.

Masumoto, Y.

Y. Kanemitsu, H. Uto, and Y. Masumoto, Phys. Rev. B 48, 2827 (1993).
[CrossRef]

Mok, C. L.

C. L. Mok, W. G. Chambers, T. J. Parker, and A. E. Costley, Infrared Phys. 19, 437 (1979).
[CrossRef]

Morimoto, I.

Murphy, T. E.

Murphy, T. M.

S. Z. A. Lo and T. M. Murphy, Appl. Phys. Lett. 96, 201104 (2010).
[CrossRef]

Nishi, J.

Nishii, J.

Parker, T. J.

C. L. Mok, W. G. Chambers, T. J. Parker, and A. E. Costley, Infrared Phys. 19, 437 (1979).
[CrossRef]

Pearson, P. J.

C. Pickering, M. I. J. Beale, D. J. Robbins, P. J. Pearson, and R. Greef, Thin Solid Films 125, 157 (1985).
[CrossRef]

Pickering, C.

C. Pickering, M. I. J. Beale, D. J. Robbins, P. J. Pearson, and R. Greef, Thin Solid Films 125, 157 (1985).
[CrossRef]

Planken, P. C. M.

Platt, B. C.

Randall, G. E.

D. S. Kliger, J. W. Lewis, and G. E. Randall, Polarized Light Optics and Spectroscopy (Academic, 1990).

Robbins, D. J.

C. Pickering, M. I. J. Beale, D. J. Robbins, P. J. Pearson, and R. Greef, Thin Solid Films 125, 157 (1985).
[CrossRef]

Ryckman, J. D.

J. D. Ryckman, M. Liscidini, J. E. Sipe, and S. M. Weiss, Nano Lett. 11, 1857 (2010).
[CrossRef]

Saha, S. C.

Saito, M.

Siemion, A.

Sipe, J. E.

J. D. Ryckman, M. Liscidini, J. E. Sipe, and S. M. Weiss, Nano Lett. 11, 1857 (2010).
[CrossRef]

Suszek, J.

Sypek, M.

Takano, K.

Theiss, W.

W. Theiss, Sur. Sci. Rep. 29, 91 (1997).
[CrossRef]

Uto, H.

Y. Kanemitsu, H. Uto, and Y. Masumoto, Phys. Rev. B 48, 2827 (1993).
[CrossRef]

van der Marel, W. A. M.

van der Valk, N. C. J.

Walsby, E. D.

Watanabe, W.

Weiss, S. M.

J. D. Ryckman, M. Liscidini, J. E. Sipe, and S. M. Weiss, Nano Lett. 11, 1857 (2010).
[CrossRef]

Wolfe, W. L.

Yamada, I.

Yamagishi, Y.

Yeh, P.

P. Yeh, Opt. Commun. 26, 289 (1978).
[CrossRef]

Yokoyama, H.

Appl. Opt.

Appl. Phys. Lett.

S. Z. A. Lo and T. M. Murphy, Appl. Phys. Lett. 96, 201104 (2010).
[CrossRef]

Infrared Phys.

C. L. Mok, W. G. Chambers, T. J. Parker, and A. E. Costley, Infrared Phys. 19, 437 (1979).
[CrossRef]

J. Appl. Phys.

A. G. Cullis, L. T. Canham, and P. D. J. Calcott, J. Appl. Phys. 82, 909 (1997).
[CrossRef]

Nano Lett.

J. D. Ryckman, M. Liscidini, J. E. Sipe, and S. M. Weiss, Nano Lett. 11, 1857 (2010).
[CrossRef]

Nature

A. G. Cullis and L. T. Canham, Nature 353, 335 (1991).
[CrossRef]

Opt. Commun.

P. Yeh, Opt. Commun. 26, 289 (1978).
[CrossRef]

Opt. Express

Opt. Lett.

Phys. Rev. B

Y. Kanemitsu, H. Uto, and Y. Masumoto, Phys. Rev. B 48, 2827 (1993).
[CrossRef]

Phys. Stat. Sol.

M. Khardani, M. Bouaïcha, and B. Bessaïs, Phys. Stat. Sol. 4, 1986 (2007).
[CrossRef]

Sur. Sci. Rep.

W. Theiss, Sur. Sci. Rep. 29, 91 (1997).
[CrossRef]

Thin Solid Films

C. Pickering, M. I. J. Beale, D. J. Robbins, P. J. Pearson, and R. Greef, Thin Solid Films 125, 157 (1985).
[CrossRef]

Other

D. S. Kliger, J. W. Lewis, and G. E. Randall, Polarized Light Optics and Spectroscopy (Academic, 1990).

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Figures (7)

Fig. 1.
Fig. 1.

Schematic of fabrication processes of a WGP.

Fig. 2.
Fig. 2.

(a) TEM image of a porous Si layer. (b) Reflectance spectrum of a porous Si layer on a Si substrate. Thickness of the porous Si layer is about 40 μm.

Fig. 3.
Fig. 3.

(a) Plan-view FESEM images of the imprinted porous Si. (b) Enlarged view.

Fig. 4.
Fig. 4.

(a) Plan-view and (b) cross-sectional FESEM images of the imprinted porous Si after the oblique evaporation of Ag.

Fig. 5.
Fig. 5.

Transmittance spectra of the Si substrate, the porous Si/Si, and the Ag WG/porous Si/Si, for unpolarized light.

Fig. 6.
Fig. 6.

(a) Transmittance spectra of the stack of the two WGPs as a function of the mutual angle between the two polarizing axes. The spectra are normalized with respect to that of a single polarizer for unpolarized light. (b) Extinction ratio of the WGP estimated from the transmittance spectra.

Fig. 7.
Fig. 7.

(a) Calculation model for the WGP fabricated in this work. (b) Transmittance of the stack of the two WGPs at 10 THz as a function of the mutual angle between the two polarizing axes. The solid line and the open square are calculated and experimental results, respectively.

Equations (1)

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2neffd=1/(1/λn1/λn+1),

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