Abstract

We present a concept for chromatic confocal distance sensing that employs two levels of spectral multiplexing for the parallelized evaluation of multiple lateral measurement points; at the first level, the chromatic confocal principle is used to encode distance information within the spectral distribution of the sensor signal. For lateral multiplexing, the total spectral bandwidth of the sensor is split into bands. Each band is assigned to a different lateral measurement point by a segmented diffractive element. Based on this concept, we experimentally demonstrate a chromatic confocal three-point sensor that is suitable for harsh production environments, since it works with a single-point spectrometer and does not require scanning functionality. The experimental system has a working distance of more than 50 mm, a measurement range of 9 mm, and an axial resolution of 50 μm.

© 2013 Optical Society of America

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    [CrossRef]
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  11. M. Taphanel and J. Beyerer, IEEE International Instrumentation and Measurement Technology Conference Proceedings (IEEE, 2012), p. 1072.
  12. M. Hillenbrand, A. Grewe, M. Bichra, R. Kleindienst, L. Lorenz, R. Kirner, R. Weiß, and S. Sinzinger, Proc. SPIE 8788, 87880V (2013).
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    [CrossRef]

2013 (1)

M. Hillenbrand, A. Grewe, M. Bichra, R. Kleindienst, L. Lorenz, R. Kirner, R. Weiß, and S. Sinzinger, Proc. SPIE 8788, 87880V (2013).
[CrossRef]

2012 (1)

M. Hillenbrand, B. Mitschunas, C. Wenzel, A. Grewe, X. Ma, P. Feßer, M. Bichra, and S. Sinzinger, Adv. Opt. Tech. 1, 187 (2012).
[CrossRef]

2006 (2)

D. Yelin, I. Rizvi, W. M. White, J. T. Motz, T. Hasan, B. E. Bouma, and G. J. Tearney, Nature 443, 765 (2006).
[CrossRef]

E. Shafir and G. Berkovic, Appl. Opt. 45, 7772 (2006).
[CrossRef]

2004 (1)

J. Garzon Reyes, J. Meneses, G. Tribillon, T. Gharbi, and A. Plata, J. Opt. A 6, 544 (2004).
[CrossRef]

1998 (1)

1991 (2)

S. Kimura and T. Wilson, Appl. Opt. 30, 2143 (1991).
[CrossRef]

M. Gu and C. J. R. Sheppard, J. Mod. Opt. 38, 1621 (1991).
[CrossRef]

1988 (1)

M. C. Hutley and R. F. Stevens, J. Phys. E 21, 1037 (1988).
[CrossRef]

1984 (2)

M. C. Hutley, Proc. SPIE 0514, 111 (1984).
[CrossRef]

G. Molesini, G. Pedrini, P. Poggi, and F. Quercioli, Opt. Commun. 49, 229 (1984).
[CrossRef]

Berkovic, G.

Beyerer, J.

M. Taphanel and J. Beyerer, IEEE International Instrumentation and Measurement Technology Conference Proceedings (IEEE, 2012), p. 1072.

Bichra, M.

M. Hillenbrand, A. Grewe, M. Bichra, R. Kleindienst, L. Lorenz, R. Kirner, R. Weiß, and S. Sinzinger, Proc. SPIE 8788, 87880V (2013).
[CrossRef]

M. Hillenbrand, B. Mitschunas, C. Wenzel, A. Grewe, X. Ma, P. Feßer, M. Bichra, and S. Sinzinger, Adv. Opt. Tech. 1, 187 (2012).
[CrossRef]

Bouma, B. E.

D. Yelin, I. Rizvi, W. M. White, J. T. Motz, T. Hasan, B. E. Bouma, and G. J. Tearney, Nature 443, 765 (2006).
[CrossRef]

Fainman, Y.

Feßer, P.

M. Hillenbrand, B. Mitschunas, C. Wenzel, A. Grewe, X. Ma, P. Feßer, M. Bichra, and S. Sinzinger, Adv. Opt. Tech. 1, 187 (2012).
[CrossRef]

Garzon Reyes, J.

J. Garzon Reyes, J. Meneses, G. Tribillon, T. Gharbi, and A. Plata, J. Opt. A 6, 544 (2004).
[CrossRef]

Gharbi, T.

J. Garzon Reyes, J. Meneses, G. Tribillon, T. Gharbi, and A. Plata, J. Opt. A 6, 544 (2004).
[CrossRef]

Grewe, A.

M. Hillenbrand, A. Grewe, M. Bichra, R. Kleindienst, L. Lorenz, R. Kirner, R. Weiß, and S. Sinzinger, Proc. SPIE 8788, 87880V (2013).
[CrossRef]

M. Hillenbrand, B. Mitschunas, C. Wenzel, A. Grewe, X. Ma, P. Feßer, M. Bichra, and S. Sinzinger, Adv. Opt. Tech. 1, 187 (2012).
[CrossRef]

Gu, M.

M. Gu and C. J. R. Sheppard, J. Mod. Opt. 38, 1621 (1991).
[CrossRef]

Hasan, T.

D. Yelin, I. Rizvi, W. M. White, J. T. Motz, T. Hasan, B. E. Bouma, and G. J. Tearney, Nature 443, 765 (2006).
[CrossRef]

Hillenbrand, M.

M. Hillenbrand, A. Grewe, M. Bichra, R. Kleindienst, L. Lorenz, R. Kirner, R. Weiß, and S. Sinzinger, Proc. SPIE 8788, 87880V (2013).
[CrossRef]

M. Hillenbrand, B. Mitschunas, C. Wenzel, A. Grewe, X. Ma, P. Feßer, M. Bichra, and S. Sinzinger, Adv. Opt. Tech. 1, 187 (2012).
[CrossRef]

Hutley, M. C.

M. C. Hutley and R. F. Stevens, J. Phys. E 21, 1037 (1988).
[CrossRef]

M. C. Hutley, Proc. SPIE 0514, 111 (1984).
[CrossRef]

Kimura, S.

Kirner, R.

M. Hillenbrand, A. Grewe, M. Bichra, R. Kleindienst, L. Lorenz, R. Kirner, R. Weiß, and S. Sinzinger, Proc. SPIE 8788, 87880V (2013).
[CrossRef]

Kleindienst, R.

M. Hillenbrand, A. Grewe, M. Bichra, R. Kleindienst, L. Lorenz, R. Kirner, R. Weiß, and S. Sinzinger, Proc. SPIE 8788, 87880V (2013).
[CrossRef]

Lin, P. C.

Lorenz, L.

M. Hillenbrand, A. Grewe, M. Bichra, R. Kleindienst, L. Lorenz, R. Kirner, R. Weiß, and S. Sinzinger, Proc. SPIE 8788, 87880V (2013).
[CrossRef]

Ma, X.

M. Hillenbrand, B. Mitschunas, C. Wenzel, A. Grewe, X. Ma, P. Feßer, M. Bichra, and S. Sinzinger, Adv. Opt. Tech. 1, 187 (2012).
[CrossRef]

Meneses, J.

J. Garzon Reyes, J. Meneses, G. Tribillon, T. Gharbi, and A. Plata, J. Opt. A 6, 544 (2004).
[CrossRef]

Mitschunas, B.

M. Hillenbrand, B. Mitschunas, C. Wenzel, A. Grewe, X. Ma, P. Feßer, M. Bichra, and S. Sinzinger, Adv. Opt. Tech. 1, 187 (2012).
[CrossRef]

Molesini, G.

G. Molesini, G. Pedrini, P. Poggi, and F. Quercioli, Opt. Commun. 49, 229 (1984).
[CrossRef]

Motz, J. T.

D. Yelin, I. Rizvi, W. M. White, J. T. Motz, T. Hasan, B. E. Bouma, and G. J. Tearney, Nature 443, 765 (2006).
[CrossRef]

Pedrini, G.

G. Molesini, G. Pedrini, P. Poggi, and F. Quercioli, Opt. Commun. 49, 229 (1984).
[CrossRef]

Plata, A.

J. Garzon Reyes, J. Meneses, G. Tribillon, T. Gharbi, and A. Plata, J. Opt. A 6, 544 (2004).
[CrossRef]

Poggi, P.

G. Molesini, G. Pedrini, P. Poggi, and F. Quercioli, Opt. Commun. 49, 229 (1984).
[CrossRef]

Quercioli, F.

G. Molesini, G. Pedrini, P. Poggi, and F. Quercioli, Opt. Commun. 49, 229 (1984).
[CrossRef]

Rizvi, I.

D. Yelin, I. Rizvi, W. M. White, J. T. Motz, T. Hasan, B. E. Bouma, and G. J. Tearney, Nature 443, 765 (2006).
[CrossRef]

Ruprecht, A. K.

A. K. Ruprecht, Konfokale Sensorik zur Hochgeschwindigkeits-Topografiemessung technischer Objekte, Dissertation (Universität Stuttgart, 2008).

Shafir, E.

Sheppard, C. J. R.

M. Gu and C. J. R. Sheppard, J. Mod. Opt. 38, 1621 (1991).
[CrossRef]

Sinzinger, S.

M. Hillenbrand, A. Grewe, M. Bichra, R. Kleindienst, L. Lorenz, R. Kirner, R. Weiß, and S. Sinzinger, Proc. SPIE 8788, 87880V (2013).
[CrossRef]

M. Hillenbrand, B. Mitschunas, C. Wenzel, A. Grewe, X. Ma, P. Feßer, M. Bichra, and S. Sinzinger, Adv. Opt. Tech. 1, 187 (2012).
[CrossRef]

Stevens, R. F.

M. C. Hutley and R. F. Stevens, J. Phys. E 21, 1037 (1988).
[CrossRef]

Sun, P.-C.

Taphanel, M.

M. Taphanel and J. Beyerer, IEEE International Instrumentation and Measurement Technology Conference Proceedings (IEEE, 2012), p. 1072.

Tearney, G. J.

D. Yelin, I. Rizvi, W. M. White, J. T. Motz, T. Hasan, B. E. Bouma, and G. J. Tearney, Nature 443, 765 (2006).
[CrossRef]

Tribillon, G.

J. Garzon Reyes, J. Meneses, G. Tribillon, T. Gharbi, and A. Plata, J. Opt. A 6, 544 (2004).
[CrossRef]

Weiß, R.

M. Hillenbrand, A. Grewe, M. Bichra, R. Kleindienst, L. Lorenz, R. Kirner, R. Weiß, and S. Sinzinger, Proc. SPIE 8788, 87880V (2013).
[CrossRef]

Wenzel, C.

M. Hillenbrand, B. Mitschunas, C. Wenzel, A. Grewe, X. Ma, P. Feßer, M. Bichra, and S. Sinzinger, Adv. Opt. Tech. 1, 187 (2012).
[CrossRef]

White, W. M.

D. Yelin, I. Rizvi, W. M. White, J. T. Motz, T. Hasan, B. E. Bouma, and G. J. Tearney, Nature 443, 765 (2006).
[CrossRef]

Wilson, T.

Yelin, D.

D. Yelin, I. Rizvi, W. M. White, J. T. Motz, T. Hasan, B. E. Bouma, and G. J. Tearney, Nature 443, 765 (2006).
[CrossRef]

Zhu, L.

Adv. Opt. Tech. (1)

M. Hillenbrand, B. Mitschunas, C. Wenzel, A. Grewe, X. Ma, P. Feßer, M. Bichra, and S. Sinzinger, Adv. Opt. Tech. 1, 187 (2012).
[CrossRef]

Appl. Opt. (3)

J. Mod. Opt. (1)

M. Gu and C. J. R. Sheppard, J. Mod. Opt. 38, 1621 (1991).
[CrossRef]

J. Opt. A (1)

J. Garzon Reyes, J. Meneses, G. Tribillon, T. Gharbi, and A. Plata, J. Opt. A 6, 544 (2004).
[CrossRef]

J. Phys. E (1)

M. C. Hutley and R. F. Stevens, J. Phys. E 21, 1037 (1988).
[CrossRef]

Nature (1)

D. Yelin, I. Rizvi, W. M. White, J. T. Motz, T. Hasan, B. E. Bouma, and G. J. Tearney, Nature 443, 765 (2006).
[CrossRef]

Opt. Commun. (1)

G. Molesini, G. Pedrini, P. Poggi, and F. Quercioli, Opt. Commun. 49, 229 (1984).
[CrossRef]

Proc. SPIE (2)

M. C. Hutley, Proc. SPIE 0514, 111 (1984).
[CrossRef]

M. Hillenbrand, A. Grewe, M. Bichra, R. Kleindienst, L. Lorenz, R. Kirner, R. Weiß, and S. Sinzinger, Proc. SPIE 8788, 87880V (2013).
[CrossRef]

Other (2)

A. K. Ruprecht, Konfokale Sensorik zur Hochgeschwindigkeits-Topografiemessung technischer Objekte, Dissertation (Universität Stuttgart, 2008).

M. Taphanel and J. Beyerer, IEEE International Instrumentation and Measurement Technology Conference Proceedings (IEEE, 2012), p. 1072.

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Figures (5)

Fig. 1.
Fig. 1.

Schematic of a chromatic confocal single-point sensor.

Fig. 2.
Fig. 2.

Schematic of the chromatic confocal three-point sensor.

Fig. 3.
Fig. 3.

Layout of the segmented diffractive element. Shaded areas do not contribute to the double pass signal.

Fig. 4.
Fig. 4.

Measured spectral response of the chromatic confocal three-point sensor for a mirror positioned at the center of the measurement range.

Fig. 5.
Fig. 5.

Experimental results for the depth-to-wavelength coding characteristics of the three-point sensor.

Tables (1)

Tables Icon

Table 1. Parameters of the Sensor System and the DOE

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