Abstract

We have demonstrated what we believe to be the first waveguide photonic crystal cavity operating in the mid-infrared. The devices were fabricated from ${\mathrm{Ge}}_{23}{\mathrm{Sb}}_7{\mathrm{S}}_{70}$ chalcogenide glass (ChG) on ${\mathrm{CaF}}_2$ substrates by combing photolithographic patterning and focused ion beam milling. The waveguide-coupled cavities were characterized using a fiber end fire coupling method at 5.2 μm wavelength, and a loaded quality factor of $\sim 2000$ was measured near the critical coupling regime.

© 2013 Optical Society of America

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