Abstract

This work proposes an orthogonal polarization Mirau interferometry using a reflective-type waveplate to generate different polarization orientations for broadband white light interferometry. The reflective-type half-waveplate is employed as the reference arm of the Mirau interferometer to convert polarization and it generates a reference light with an orientation orthogonal to the object light. An advantage of the proposed interferometer is its ability to control the ratio of light intensity between the object and reference arms to maximize the interferometric fringe contrast. Better, more accurate calibration of standard step height has been achieved by the developed interferometer, which also can measure solder bumps that traditional Mirau interferometers usually cannot measure.

© 2013 Optical Society of America

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References

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  1. A. H. Mirau, “Interferometer,” U.S. patent2,612,074 (A) (September30, 1952).
  2. J. C. Stover, Optical Scattering: Measurement and Analysis, 2nd ed. (SPIE, 1995).
  3. G. Häusler and S. Ettl, in Optical Measurement of Surface Topography, R. Leach, ed. (Springer-Verlag, 2011).
  4. G. Häusler, P. Ettl, M. Schenk, G. Bohn, and I. Laszlo, in Proceedings of International Trends in Optics and Photonics ICO IV (1999).
  5. J. Schmit and P. Hariharan, Opt. Eng. 46, 077007 (2007).
    [CrossRef]
  6. O. V. Lyulko, G. Randers-Pehrson, and D. J. Brenner, Center for Radiological Research (Columbia University, 2009).
  7. O. V. Lyulko, G. Randers-Pehrson, and D. J. Brenner, Proc. SPIE 7568, 756825 (2010).
    [CrossRef]
  8. Y.-J. Jen, M.-J. Lin, S.-K. Yu, and C.-C. Chen, Opt. Lett. 37, 4296 (2012).
    [CrossRef]
  9. Y.-J. Jen, C.-Y. Peng, and H.-H. Chang, Opt. Express 15, 4445 (2007).
    [CrossRef]
  10. M.-C. Park and S.-W. Kim, Opt. Lett. 26, 420 (2001).
    [CrossRef]

2012 (1)

2010 (1)

O. V. Lyulko, G. Randers-Pehrson, and D. J. Brenner, Proc. SPIE 7568, 756825 (2010).
[CrossRef]

2007 (2)

2001 (1)

Bohn, G.

G. Häusler, P. Ettl, M. Schenk, G. Bohn, and I. Laszlo, in Proceedings of International Trends in Optics and Photonics ICO IV (1999).

Brenner, D. J.

O. V. Lyulko, G. Randers-Pehrson, and D. J. Brenner, Proc. SPIE 7568, 756825 (2010).
[CrossRef]

O. V. Lyulko, G. Randers-Pehrson, and D. J. Brenner, Center for Radiological Research (Columbia University, 2009).

Chang, H.-H.

Chen, C.-C.

Ettl, P.

G. Häusler, P. Ettl, M. Schenk, G. Bohn, and I. Laszlo, in Proceedings of International Trends in Optics and Photonics ICO IV (1999).

Ettl, S.

G. Häusler and S. Ettl, in Optical Measurement of Surface Topography, R. Leach, ed. (Springer-Verlag, 2011).

Hariharan, P.

J. Schmit and P. Hariharan, Opt. Eng. 46, 077007 (2007).
[CrossRef]

Häusler, G.

G. Häusler, P. Ettl, M. Schenk, G. Bohn, and I. Laszlo, in Proceedings of International Trends in Optics and Photonics ICO IV (1999).

G. Häusler and S. Ettl, in Optical Measurement of Surface Topography, R. Leach, ed. (Springer-Verlag, 2011).

Jen, Y.-J.

Kim, S.-W.

Laszlo, I.

G. Häusler, P. Ettl, M. Schenk, G. Bohn, and I. Laszlo, in Proceedings of International Trends in Optics and Photonics ICO IV (1999).

Lin, M.-J.

Lyulko, O. V.

O. V. Lyulko, G. Randers-Pehrson, and D. J. Brenner, Proc. SPIE 7568, 756825 (2010).
[CrossRef]

O. V. Lyulko, G. Randers-Pehrson, and D. J. Brenner, Center for Radiological Research (Columbia University, 2009).

Mirau, A. H.

A. H. Mirau, “Interferometer,” U.S. patent2,612,074 (A) (September30, 1952).

Park, M.-C.

Peng, C.-Y.

Randers-Pehrson, G.

O. V. Lyulko, G. Randers-Pehrson, and D. J. Brenner, Proc. SPIE 7568, 756825 (2010).
[CrossRef]

O. V. Lyulko, G. Randers-Pehrson, and D. J. Brenner, Center for Radiological Research (Columbia University, 2009).

Schenk, M.

G. Häusler, P. Ettl, M. Schenk, G. Bohn, and I. Laszlo, in Proceedings of International Trends in Optics and Photonics ICO IV (1999).

Schmit, J.

J. Schmit and P. Hariharan, Opt. Eng. 46, 077007 (2007).
[CrossRef]

Stover, J. C.

J. C. Stover, Optical Scattering: Measurement and Analysis, 2nd ed. (SPIE, 1995).

Yu, S.-K.

Opt. Eng. (1)

J. Schmit and P. Hariharan, Opt. Eng. 46, 077007 (2007).
[CrossRef]

Opt. Express (1)

Opt. Lett. (2)

Proc. SPIE (1)

O. V. Lyulko, G. Randers-Pehrson, and D. J. Brenner, Proc. SPIE 7568, 756825 (2010).
[CrossRef]

Other (5)

O. V. Lyulko, G. Randers-Pehrson, and D. J. Brenner, Center for Radiological Research (Columbia University, 2009).

A. H. Mirau, “Interferometer,” U.S. patent2,612,074 (A) (September30, 1952).

J. C. Stover, Optical Scattering: Measurement and Analysis, 2nd ed. (SPIE, 1995).

G. Häusler and S. Ettl, in Optical Measurement of Surface Topography, R. Leach, ed. (Springer-Verlag, 2011).

G. Häusler, P. Ettl, M. Schenk, G. Bohn, and I. Laszlo, in Proceedings of International Trends in Optics and Photonics ICO IV (1999).

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Figures (3)

Fig. 1.
Fig. 1.

Reflective-type waveplate serving as the reference arm of the developed orthogonal polarization Mirau interferometer.

Fig. 2.
Fig. 2.

(a) Solder bumps on the top of a PCB and (b) variations in light intensity and interferogram contrast for solder bumps on top and PCB bottom surface.

Fig. 3.
Fig. 3.

Measurement results of solder bumps on PCB: (a) by CMI and (b) by developed method.

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