Abstract

A model taking into consideration the refractive index inhomogeneity and surface roughness of a film was proposed for the simultaneous determination of the optical constants, thickness, and surface roughness of a single-layer thin film from spectrophotometric measurements. In the model, the rough surface was treated as an effective absorbing layer. The model was applied to determine simultaneously the parameters of single-layer MgF2 thin films deposited on fused silica substrates by the oblique-angle deposition technique. The film thicknesses and rms surface roughnesses extracted from spectrophotometric measurements with the proposed model were in good agreement with the values measured by a spectroscopic ellipsometer and an atomic force microscope, respectively.

© 2012 Optical Society of America

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References

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2008 (1)

2007 (2)

Y. J. Jen, C. Y. Peng, and H. H. Chang, Opt. Express 15, 4445 (2007).
[CrossRef]

J.-Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. F. Chen, S.-Y. Lin, W. Liu, and J. A. Smart, Nat. Photonics 1, 176 (2007).
[CrossRef]

2006 (1)

2003 (1)

2002 (1)

1995 (1)

1979 (1)

C. K. Carnigila, Opt. Eng. 18, 104 (1979).
[CrossRef]

Al-Kuhaili, M. F.

Benramdane, N.

Bovard, B. G.

Cardin, J. L.

Carnigila, C. K.

C. K. Carnigila, Opt. Eng. 18, 104 (1979).
[CrossRef]

Carniglia, C. K.

Chang, H. H.

Chen, M. F.

J.-Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. F. Chen, S.-Y. Lin, W. Liu, and J. A. Smart, Nat. Photonics 1, 176 (2007).
[CrossRef]

Chen, Q. H.

Chiao, S. C.

Chiker, F.

Duparré, A.

Durrani, S. M. A.

Jen, Y. J.

Jensen, D. G.

Kahadraoui, M.

Kasputis, T.

Kebbab, Z.

Khawaja, E. E.

Kim, J. K.

J.-Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. F. Chen, S.-Y. Lin, W. Liu, and J. A. Smart, Nat. Photonics 1, 176 (2007).
[CrossRef]

Leduc, D.

Lin, S.-Y.

J.-Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. F. Chen, S.-Y. Lin, W. Liu, and J. A. Smart, Nat. Photonics 1, 176 (2007).
[CrossRef]

Liu, W.

J.-Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. F. Chen, S.-Y. Lin, W. Liu, and J. A. Smart, Nat. Photonics 1, 176 (2007).
[CrossRef]

Luo, H. F.

Macleod, H. A.

Miloua, R.

Palik, E. D.

E. D. Palik, Handbook of Optical Constants of Solids II, (Academic, 1991).

Pannier, A. K.

Peng, C. Y.

Rodenhausen, K. B.

Sahraoui, K.

Schmidt, D.

Schubert, E. F.

K. B. Rodenhausen, D. Schmidt, T. Kasputis, A. K. Pannier, E. F. Schubert, and M. Schubert, Opt. Express 20, 5419 (2012).
[CrossRef]

J.-Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. F. Chen, S.-Y. Lin, W. Liu, and J. A. Smart, Nat. Photonics 1, 176 (2007).
[CrossRef]

Schubert, M.

Schubert, M. F.

J.-Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. F. Chen, S.-Y. Lin, W. Liu, and J. A. Smart, Nat. Photonics 1, 176 (2007).
[CrossRef]

Smart, J. A.

J.-Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. F. Chen, S.-Y. Lin, W. Liu, and J. A. Smart, Nat. Photonics 1, 176 (2007).
[CrossRef]

Tikhonravov, A. A.

Tikhonravov, A. V.

Trubetskov, M. K.

Wang, F.

Wang, S. M.

Xi, J.-Q.

J.-Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. F. Chen, S.-Y. Lin, W. Liu, and J. A. Smart, Nat. Photonics 1, 176 (2007).
[CrossRef]

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Figures (4)

Fig. 1.
Fig. 1.

Schematic diagrams of the three models used for single-layer thin film characterization.

Fig. 2.
Fig. 2.

Experimental transmittance/reflectance spectra of a single-layer MgF2 film prepared at deposition angle of 70° and corresponding best fits by (a) Model A, (b) Model B, and (c) Model C.

Fig. 3.
Fig. 3.

(a) Refractive index and (b) extinction coefficient of the single-layer MgF2 film prepared at deposition angle of 70°, determined by fitting the spectrophotometric measurements to Models A, B, and C.

Fig. 4.
Fig. 4.

(a) Cross-sectional SEM morphology and (b) XRD pattern of the MgF2 thin film formed on BK7 substrate under 70° deposition angle.

Tables (1)

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Table 1. Fitted Results for a Single-Layer MgF2 Film with Three Different Layer Models

Equations (1)

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M=[cosδ1jsinδ1/(n1jk1)j(n1ik1)sinδ1cosδ1][(ni/no)1/2cosδjsinδ/(nino)1/2j(nino)1/2sinδ(no/ni)1/2cosδ],

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