Abstract

An intracavity array of individually controlled microelectromechanical system scanning micromirrors was used to actively Q-switch a single side-pumped Nd:YAG gain medium. Two equal power independent laser outputs were simultaneously obtained by separate actuation of two adjacent micromirrors with a combined average output power of 125 mW. Pulse durations of 28 ns FWHM at 8.7 kHz repetition frequency and 34 ns FWHM at 7.9 kHz repetition frequency were observed for the two output beams with beam quality factors M2 of 1.2 and 1.1 and peak powers of 253 W and 232 W, respectively.

© 2012 Optical Society of America

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    [CrossRef]

2012

2011

W. Lubeigt, J. Gomes, G. Brown, A. Kelly, V. Savitski, D. Uttamchandani, and D. Burns, Opt. Express 19, 2456 (2011).
[CrossRef]

M. Fabert, V. Kermne, A. Desfarges-Berthelemot, P. Blondy, and A. Crunteanu, Opt. Lett. 36, 2191 (2011).
[CrossRef]

D. Liu, Y. Ning, Y. Zeng, L. Qin, Y. Liu, X. Zhang, L. Zhang, J. Zhang, C. Tong, and L. Wang, Appl. Phys. Express 4, 52104 (2011).
[CrossRef]

R. Bauer, G. Brown, and D. Uttamchandani, Micro Nano Lett. 6, 425 (2011).
[CrossRef]

2010

S. Schilt, K. Zogal, B. Kögel, P. Meissner, M. Maute, R. Protasio, and M.-C. Amann, Appl. Phys. B 100, 321 (2010).
[CrossRef]

J. Masson, R. St-Gelais, A. Poulin, and Y.-A. Peter, IEEE J. Quantum Electron. 46, 1313 (2010).
[CrossRef]

2008

D. Bouyge, A. Crunteanu, V. Couderc, D. Sabourdy, and P. Blondy, IEEE Photon. Technol. Lett. 20, 991 (2008).
[CrossRef]

M. Fabert, A. Desfarges-Berthelemot, V. Kermne, A. Crunteanu, D. Bouyge, and P. Blondy, Opt. Express 16, 22064 (2008).
[CrossRef]

2007

A. Inoue, T. Komikado, K. Kinoshita, J. Hayashi, and S. Umegaki, Jpn. J. Appl. Phys. 46, L1016–L1018 (2007).
[CrossRef]

2006

A. Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger, and A. Barthelemy, J. Opt. A 8, 347 (2006).
[CrossRef]

2004

V. Kaajakari, T. Mattila, A. Oja, and H. Seppa, J. Microelectromech. Syst. 13, 715 (2004).
[CrossRef]

X. M. Zhang, A. Q. Liu, D. Y. Tang, and C. Lu, Appl. Phys. Lett. 84, 329 (2004).
[CrossRef]

1999

J. J. Zayhowski, Opt. Mater. 11, 255 (1999).
[CrossRef]

Amann, M.-C.

S. Schilt, K. Zogal, B. Kögel, P. Meissner, M. Maute, R. Protasio, and M.-C. Amann, Appl. Phys. B 100, 321 (2010).
[CrossRef]

Barthelemy, A.

A. Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger, and A. Barthelemy, J. Opt. A 8, 347 (2006).
[CrossRef]

Bassri, F. El

Bauer, R.

R. Bauer, G. Brown, and D. Uttamchandani, Micro Nano Lett. 6, 425 (2011).
[CrossRef]

Blondy, P.

M. Fabert, V. Kermne, A. Desfarges-Berthelemot, P. Blondy, and A. Crunteanu, Opt. Lett. 36, 2191 (2011).
[CrossRef]

D. Bouyge, A. Crunteanu, V. Couderc, D. Sabourdy, and P. Blondy, IEEE Photon. Technol. Lett. 20, 991 (2008).
[CrossRef]

M. Fabert, A. Desfarges-Berthelemot, V. Kermne, A. Crunteanu, D. Bouyge, and P. Blondy, Opt. Express 16, 22064 (2008).
[CrossRef]

A. Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger, and A. Barthelemy, J. Opt. A 8, 347 (2006).
[CrossRef]

Bouyge, D.

M. Fabert, A. Desfarges-Berthelemot, V. Kermne, A. Crunteanu, D. Bouyge, and P. Blondy, Opt. Express 16, 22064 (2008).
[CrossRef]

D. Bouyge, A. Crunteanu, V. Couderc, D. Sabourdy, and P. Blondy, IEEE Photon. Technol. Lett. 20, 991 (2008).
[CrossRef]

A. Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger, and A. Barthelemy, J. Opt. A 8, 347 (2006).
[CrossRef]

Brown, G.

Burns, D.

Couderc, V.

V. Couderc, A. Crunteanu, M. Fabert, F. Doutre, F. El Bassri, D. Pagnoux, and A. Jalocha, Opt. Express 20, 5524 (2012).
[CrossRef]

D. Bouyge, A. Crunteanu, V. Couderc, D. Sabourdy, and P. Blondy, IEEE Photon. Technol. Lett. 20, 991 (2008).
[CrossRef]

A. Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger, and A. Barthelemy, J. Opt. A 8, 347 (2006).
[CrossRef]

Crunteanu, A.

Desfarges-Berthelemot, A.

Doutre, F.

Fabert, M.

Gomes, J.

Grossard, L.

A. Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger, and A. Barthelemy, J. Opt. A 8, 347 (2006).
[CrossRef]

Hayashi, J.

A. Inoue, T. Komikado, K. Kinoshita, J. Hayashi, and S. Umegaki, Jpn. J. Appl. Phys. 46, L1016–L1018 (2007).
[CrossRef]

Inoue, A.

A. Inoue, T. Komikado, K. Kinoshita, J. Hayashi, and S. Umegaki, Jpn. J. Appl. Phys. 46, L1016–L1018 (2007).
[CrossRef]

Jalocha, A.

Kaajakari, V.

V. Kaajakari, T. Mattila, A. Oja, and H. Seppa, J. Microelectromech. Syst. 13, 715 (2004).
[CrossRef]

Kelly, A.

Kermne, V.

Kinoshita, K.

A. Inoue, T. Komikado, K. Kinoshita, J. Hayashi, and S. Umegaki, Jpn. J. Appl. Phys. 46, L1016–L1018 (2007).
[CrossRef]

Kögel, B.

S. Schilt, K. Zogal, B. Kögel, P. Meissner, M. Maute, R. Protasio, and M.-C. Amann, Appl. Phys. B 100, 321 (2010).
[CrossRef]

Komikado, T.

A. Inoue, T. Komikado, K. Kinoshita, J. Hayashi, and S. Umegaki, Jpn. J. Appl. Phys. 46, L1016–L1018 (2007).
[CrossRef]

Liu, A. Q.

X. M. Zhang, A. Q. Liu, D. Y. Tang, and C. Lu, Appl. Phys. Lett. 84, 329 (2004).
[CrossRef]

Liu, D.

D. Liu, Y. Ning, Y. Zeng, L. Qin, Y. Liu, X. Zhang, L. Zhang, J. Zhang, C. Tong, and L. Wang, Appl. Phys. Express 4, 52104 (2011).
[CrossRef]

Liu, Y.

D. Liu, Y. Ning, Y. Zeng, L. Qin, Y. Liu, X. Zhang, L. Zhang, J. Zhang, C. Tong, and L. Wang, Appl. Phys. Express 4, 52104 (2011).
[CrossRef]

Lu, C.

X. M. Zhang, A. Q. Liu, D. Y. Tang, and C. Lu, Appl. Phys. Lett. 84, 329 (2004).
[CrossRef]

Lubeigt, W.

Masson, J.

J. Masson, R. St-Gelais, A. Poulin, and Y.-A. Peter, IEEE J. Quantum Electron. 46, 1313 (2010).
[CrossRef]

Mattila, T.

V. Kaajakari, T. Mattila, A. Oja, and H. Seppa, J. Microelectromech. Syst. 13, 715 (2004).
[CrossRef]

Maute, M.

S. Schilt, K. Zogal, B. Kögel, P. Meissner, M. Maute, R. Protasio, and M.-C. Amann, Appl. Phys. B 100, 321 (2010).
[CrossRef]

Meissner, P.

S. Schilt, K. Zogal, B. Kögel, P. Meissner, M. Maute, R. Protasio, and M.-C. Amann, Appl. Phys. B 100, 321 (2010).
[CrossRef]

Ning, Y.

D. Liu, Y. Ning, Y. Zeng, L. Qin, Y. Liu, X. Zhang, L. Zhang, J. Zhang, C. Tong, and L. Wang, Appl. Phys. Express 4, 52104 (2011).
[CrossRef]

Oja, A.

V. Kaajakari, T. Mattila, A. Oja, and H. Seppa, J. Microelectromech. Syst. 13, 715 (2004).
[CrossRef]

Pagnoux, D.

Peter, Y.-A.

J. Masson, R. St-Gelais, A. Poulin, and Y.-A. Peter, IEEE J. Quantum Electron. 46, 1313 (2010).
[CrossRef]

Pioger, P. H.

A. Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger, and A. Barthelemy, J. Opt. A 8, 347 (2006).
[CrossRef]

Poulin, A.

J. Masson, R. St-Gelais, A. Poulin, and Y.-A. Peter, IEEE J. Quantum Electron. 46, 1313 (2010).
[CrossRef]

Protasio, R.

S. Schilt, K. Zogal, B. Kögel, P. Meissner, M. Maute, R. Protasio, and M.-C. Amann, Appl. Phys. B 100, 321 (2010).
[CrossRef]

Qin, L.

D. Liu, Y. Ning, Y. Zeng, L. Qin, Y. Liu, X. Zhang, L. Zhang, J. Zhang, C. Tong, and L. Wang, Appl. Phys. Express 4, 52104 (2011).
[CrossRef]

Sabourdy, D.

D. Bouyge, A. Crunteanu, V. Couderc, D. Sabourdy, and P. Blondy, IEEE Photon. Technol. Lett. 20, 991 (2008).
[CrossRef]

A. Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger, and A. Barthelemy, J. Opt. A 8, 347 (2006).
[CrossRef]

Savitski, V.

Schilt, S.

S. Schilt, K. Zogal, B. Kögel, P. Meissner, M. Maute, R. Protasio, and M.-C. Amann, Appl. Phys. B 100, 321 (2010).
[CrossRef]

Seppa, H.

V. Kaajakari, T. Mattila, A. Oja, and H. Seppa, J. Microelectromech. Syst. 13, 715 (2004).
[CrossRef]

St-Gelais, R.

J. Masson, R. St-Gelais, A. Poulin, and Y.-A. Peter, IEEE J. Quantum Electron. 46, 1313 (2010).
[CrossRef]

Tang, D. Y.

X. M. Zhang, A. Q. Liu, D. Y. Tang, and C. Lu, Appl. Phys. Lett. 84, 329 (2004).
[CrossRef]

Tong, C.

D. Liu, Y. Ning, Y. Zeng, L. Qin, Y. Liu, X. Zhang, L. Zhang, J. Zhang, C. Tong, and L. Wang, Appl. Phys. Express 4, 52104 (2011).
[CrossRef]

Umegaki, S.

A. Inoue, T. Komikado, K. Kinoshita, J. Hayashi, and S. Umegaki, Jpn. J. Appl. Phys. 46, L1016–L1018 (2007).
[CrossRef]

Uttamchandani, D.

Wang, L.

D. Liu, Y. Ning, Y. Zeng, L. Qin, Y. Liu, X. Zhang, L. Zhang, J. Zhang, C. Tong, and L. Wang, Appl. Phys. Express 4, 52104 (2011).
[CrossRef]

Zayhowski, J. J.

J. J. Zayhowski, Opt. Mater. 11, 255 (1999).
[CrossRef]

Zeng, Y.

D. Liu, Y. Ning, Y. Zeng, L. Qin, Y. Liu, X. Zhang, L. Zhang, J. Zhang, C. Tong, and L. Wang, Appl. Phys. Express 4, 52104 (2011).
[CrossRef]

Zhang, J.

D. Liu, Y. Ning, Y. Zeng, L. Qin, Y. Liu, X. Zhang, L. Zhang, J. Zhang, C. Tong, and L. Wang, Appl. Phys. Express 4, 52104 (2011).
[CrossRef]

Zhang, L.

D. Liu, Y. Ning, Y. Zeng, L. Qin, Y. Liu, X. Zhang, L. Zhang, J. Zhang, C. Tong, and L. Wang, Appl. Phys. Express 4, 52104 (2011).
[CrossRef]

Zhang, X.

D. Liu, Y. Ning, Y. Zeng, L. Qin, Y. Liu, X. Zhang, L. Zhang, J. Zhang, C. Tong, and L. Wang, Appl. Phys. Express 4, 52104 (2011).
[CrossRef]

Zhang, X. M.

X. M. Zhang, A. Q. Liu, D. Y. Tang, and C. Lu, Appl. Phys. Lett. 84, 329 (2004).
[CrossRef]

Zogal, K.

S. Schilt, K. Zogal, B. Kögel, P. Meissner, M. Maute, R. Protasio, and M.-C. Amann, Appl. Phys. B 100, 321 (2010).
[CrossRef]

Appl. Phys. B

S. Schilt, K. Zogal, B. Kögel, P. Meissner, M. Maute, R. Protasio, and M.-C. Amann, Appl. Phys. B 100, 321 (2010).
[CrossRef]

Appl. Phys. Express

D. Liu, Y. Ning, Y. Zeng, L. Qin, Y. Liu, X. Zhang, L. Zhang, J. Zhang, C. Tong, and L. Wang, Appl. Phys. Express 4, 52104 (2011).
[CrossRef]

Appl. Phys. Lett.

X. M. Zhang, A. Q. Liu, D. Y. Tang, and C. Lu, Appl. Phys. Lett. 84, 329 (2004).
[CrossRef]

IEEE J. Quantum Electron.

J. Masson, R. St-Gelais, A. Poulin, and Y.-A. Peter, IEEE J. Quantum Electron. 46, 1313 (2010).
[CrossRef]

IEEE Photon. Technol. Lett.

D. Bouyge, A. Crunteanu, V. Couderc, D. Sabourdy, and P. Blondy, IEEE Photon. Technol. Lett. 20, 991 (2008).
[CrossRef]

J. Microelectromech. Syst.

V. Kaajakari, T. Mattila, A. Oja, and H. Seppa, J. Microelectromech. Syst. 13, 715 (2004).
[CrossRef]

J. Opt. A

A. Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger, and A. Barthelemy, J. Opt. A 8, 347 (2006).
[CrossRef]

Jpn. J. Appl. Phys.

A. Inoue, T. Komikado, K. Kinoshita, J. Hayashi, and S. Umegaki, Jpn. J. Appl. Phys. 46, L1016–L1018 (2007).
[CrossRef]

Micro Nano Lett.

R. Bauer, G. Brown, and D. Uttamchandani, Micro Nano Lett. 6, 425 (2011).
[CrossRef]

Opt. Express

Opt. Lett.

Opt. Mater.

J. J. Zayhowski, Opt. Mater. 11, 255 (1999).
[CrossRef]

Other

MEMSCAP Inc. 12 Alexander Drive, Building 100, Research Triangle Park, NC 27709, USA, www.memscap.com .

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Figures (4)

Fig. 1.
Fig. 1.

(a) Layout and (b) SEM image of fabricated array (N.B. the color difference of the micromirrors is due to charge build up during image acquisition) with (c) angular frequency response of M1 and M2.

Fig. 2.
Fig. 2.

Laser cavity setup for Q-switched dual mirror actuation of MEMS array.

Fig. 3.
Fig. 3.

Q-switch output with (a) spatial beam profile 50 mm after the OC and temporal pulse shapes for output of cavity using (b) M1 and (c) M2.

Fig. 4.
Fig. 4.

(a) Pulse train of both laser beams, laser output and driving waveform for (b) M2 and (c) M1.

Equations (1)

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τmin8.1·τrlnG.

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