Abstract

A simple approach to producing a 1×N beam splitter is demonstrated by fabricating a volumetric multiplex phase Fresnel zone plate in bulk transparent material. This comprised four layers of zone plates created in borosilicate glass by femtosecond laser direct-writing, each shifted laterally relative to the illumination axis, creating four separate beamlets. Since the power transmitted in each beamlet is proportional to the diffraction efficiency of the corresponding zone plate, the power ratios can be customized by adjusting the fabrication parameters of each layer. This approach demonstrates the potential of femtosecond laser direct-writing for the fabrication of complex optical elements in transparent media as components of integrated monolithic photonic devices.

© 2012 Optical Society of America

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2002 (1)

2001 (1)

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K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, Appl. Phys. Lett. 71, 3329 (1997).
[CrossRef]

Agarwal, A. M.

Ams, M.

Anderson, T.

Bengtsson, J.

K. Hedsten, J. Melin, J. Bengtsson, P. Modh, D. Karln, B. Lfving, R. Nilsson, H. Rdjegrd, K. Persson, and P. Enoksson, Sens. Actuators A 142, 336 (2008).
[CrossRef]

Borrelli, N. F.

Carlie, N.

Chan, J. W.

J. W. Chan, T. R. Huser, S. H. Risbud, J. S. Hayden, and D. M. Krol, Appl. Phys. Lett. 82, 2371 (2003).
[CrossRef]

Choi, J.

J. Choi, M. Ramme, T. Anderson, and M. Richardson, Proc. SPIE 7589, 7589-44 (2010).

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[CrossRef]

T. Anderson, L. Petit, N. Carlie, J. Choi, J. Hu, A. M. Agarwal, L. C. Kimerling, K. Richardson, and M. Richardson, Opt. Express 16, 20081 (2008).
[CrossRef]

Enoksson, P.

K. Hedsten, J. Melin, J. Bengtsson, P. Modh, D. Karln, B. Lfving, R. Nilsson, H. Rdjegrd, K. Persson, and P. Enoksson, Sens. Actuators A 142, 336 (2008).
[CrossRef]

Ersoy, O. K.

P. Srisungsitthisunti, O. K. Ersoy, and X. Xu, Appl. Phys. Lett. 90, 011104 (2007).
[CrossRef]

Fonollosa, J.

J. Fonollosa, R. Rubio, S. Hartwig, S. Marco, J. Santander, L. Fonseca, J. Wöllenstein, and M. Moreno, Sens. Actuators A 132, 498 (2008).

Fonseca, L.

J. Fonollosa, R. Rubio, S. Hartwig, S. Marco, J. Santander, L. Fonseca, J. Wöllenstein, and M. Moreno, Sens. Actuators A 132, 498 (2008).

Gattass, R. R.

R. R. Gattass and E. Mazur, Nature Photon 2, 219 (2008).
[CrossRef]

Hartwig, S.

J. Fonollosa, R. Rubio, S. Hartwig, S. Marco, J. Santander, L. Fonseca, J. Wöllenstein, and M. Moreno, Sens. Actuators A 132, 498 (2008).

Hayden, J. S.

J. W. Chan, T. R. Huser, S. H. Risbud, J. S. Hayden, and D. M. Krol, Appl. Phys. Lett. 82, 2371 (2003).
[CrossRef]

Hedsten, K.

K. Hedsten, J. Melin, J. Bengtsson, P. Modh, D. Karln, B. Lfving, R. Nilsson, H. Rdjegrd, K. Persson, and P. Enoksson, Sens. Actuators A 142, 336 (2008).
[CrossRef]

Hirao, K.

M. Shimizu, M. Sakakura, M. Ohnishi, Y. Shimotsuma, T. Nakaya, K. Miura, and K. Hirao, J. Appl. Phys. 108, 073533 (2010).
[CrossRef]

K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, Appl. Phys. Lett. 71, 3329 (1997).
[CrossRef]

Ho, N.

Hu, J.

Huser, T. R.

J. W. Chan, T. R. Huser, S. H. Risbud, J. S. Hayden, and D. M. Krol, Appl. Phys. Lett. 82, 2371 (2003).
[CrossRef]

Inouye, H.

K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, Appl. Phys. Lett. 71, 3329 (1997).
[CrossRef]

Itoh, K.

Jacobsen, C.

Y. Wang, W. Yun, and C. Jacobsen, Nature 424, 50 (2003).
[CrossRef]

Jahns, J.

Karln, D.

K. Hedsten, J. Melin, J. Bengtsson, P. Modh, D. Karln, B. Lfving, R. Nilsson, H. Rdjegrd, K. Persson, and P. Enoksson, Sens. Actuators A 142, 336 (2008).
[CrossRef]

Kimerling, L. C.

Krol, D. M.

J. W. Chan, T. R. Huser, S. H. Risbud, J. S. Hayden, and D. M. Krol, Appl. Phys. Lett. 82, 2371 (2003).
[CrossRef]

Kuroda, D.

Lfving, B.

K. Hedsten, J. Melin, J. Bengtsson, P. Modh, D. Karln, B. Lfving, R. Nilsson, H. Rdjegrd, K. Persson, and P. Enoksson, Sens. Actuators A 142, 336 (2008).
[CrossRef]

Li, Y.

Lopez, C.

Marco, S.

J. Fonollosa, R. Rubio, S. Hartwig, S. Marco, J. Santander, L. Fonseca, J. Wöllenstein, and M. Moreno, Sens. Actuators A 132, 498 (2008).

Marshall, G. D.

Mazur, E.

R. R. Gattass and E. Mazur, Nature Photon 2, 219 (2008).
[CrossRef]

Melin, J.

K. Hedsten, J. Melin, J. Bengtsson, P. Modh, D. Karln, B. Lfving, R. Nilsson, H. Rdjegrd, K. Persson, and P. Enoksson, Sens. Actuators A 142, 336 (2008).
[CrossRef]

Mitsuyu, T.

K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, Appl. Phys. Lett. 71, 3329 (1997).
[CrossRef]

Miura, K.

M. Shimizu, M. Sakakura, M. Ohnishi, Y. Shimotsuma, T. Nakaya, K. Miura, and K. Hirao, J. Appl. Phys. 108, 073533 (2010).
[CrossRef]

K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, Appl. Phys. Lett. 71, 3329 (1997).
[CrossRef]

Modh, P.

K. Hedsten, J. Melin, J. Bengtsson, P. Modh, D. Karln, B. Lfving, R. Nilsson, H. Rdjegrd, K. Persson, and P. Enoksson, Sens. Actuators A 142, 336 (2008).
[CrossRef]

Moreno, M.

J. Fonollosa, R. Rubio, S. Hartwig, S. Marco, J. Santander, L. Fonseca, J. Wöllenstein, and M. Moreno, Sens. Actuators A 132, 498 (2008).

Nakaya, T.

M. Shimizu, M. Sakakura, M. Ohnishi, Y. Shimotsuma, T. Nakaya, K. Miura, and K. Hirao, J. Appl. Phys. 108, 073533 (2010).
[CrossRef]

Nilsson, R.

K. Hedsten, J. Melin, J. Bengtsson, P. Modh, D. Karln, B. Lfving, R. Nilsson, H. Rdjegrd, K. Persson, and P. Enoksson, Sens. Actuators A 142, 336 (2008).
[CrossRef]

Nishii, J.

Ohnishi, M.

M. Shimizu, M. Sakakura, M. Ohnishi, Y. Shimotsuma, T. Nakaya, K. Miura, and K. Hirao, J. Appl. Phys. 108, 073533 (2010).
[CrossRef]

Persson, K.

K. Hedsten, J. Melin, J. Bengtsson, P. Modh, D. Karln, B. Lfving, R. Nilsson, H. Rdjegrd, K. Persson, and P. Enoksson, Sens. Actuators A 142, 336 (2008).
[CrossRef]

Petit, L.

Qiu, J.

K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, Appl. Phys. Lett. 71, 3329 (1997).
[CrossRef]

Ramme, M.

J. Choi, M. Ramme, T. Anderson, and M. Richardson, Proc. SPIE 7589, 7589-44 (2010).

Rdjegrd, H.

K. Hedsten, J. Melin, J. Bengtsson, P. Modh, D. Karln, B. Lfving, R. Nilsson, H. Rdjegrd, K. Persson, and P. Enoksson, Sens. Actuators A 142, 336 (2008).
[CrossRef]

Richardson, K.

Richardson, M.

Risbud, S. H.

J. W. Chan, T. R. Huser, S. H. Risbud, J. S. Hayden, and D. M. Krol, Appl. Phys. Lett. 82, 2371 (2003).
[CrossRef]

Rivero, C.

Rubio, R.

J. Fonollosa, R. Rubio, S. Hartwig, S. Marco, J. Santander, L. Fonseca, J. Wöllenstein, and M. Moreno, Sens. Actuators A 132, 498 (2008).

Sakakura, M.

M. Shimizu, M. Sakakura, M. Ohnishi, Y. Shimotsuma, T. Nakaya, K. Miura, and K. Hirao, J. Appl. Phys. 108, 073533 (2010).
[CrossRef]

Santander, J.

J. Fonollosa, R. Rubio, S. Hartwig, S. Marco, J. Santander, L. Fonseca, J. Wöllenstein, and M. Moreno, Sens. Actuators A 132, 498 (2008).

Schulte, A.

Shimizu, M.

M. Shimizu, M. Sakakura, M. Ohnishi, Y. Shimotsuma, T. Nakaya, K. Miura, and K. Hirao, J. Appl. Phys. 108, 073533 (2010).
[CrossRef]

Shimotsuma, Y.

M. Shimizu, M. Sakakura, M. Ohnishi, Y. Shimotsuma, T. Nakaya, K. Miura, and K. Hirao, J. Appl. Phys. 108, 073533 (2010).
[CrossRef]

Sinzinger, S.

Srisungsitthisunti, P.

P. Srisungsitthisunti, O. K. Ersoy, and X. Xu, Appl. Phys. Lett. 90, 011104 (2007).
[CrossRef]

Streltsov, A. M.

Vallée, R.

Wang, Y.

Y. Wang, W. Yun, and C. Jacobsen, Nature 424, 50 (2003).
[CrossRef]

Watababe, W.

Watanabe, W.

Withford, M. J.

Wöllenstein, J.

J. Fonollosa, R. Rubio, S. Hartwig, S. Marco, J. Santander, L. Fonseca, J. Wöllenstein, and M. Moreno, Sens. Actuators A 132, 498 (2008).

Xu, X.

P. Srisungsitthisunti, O. K. Ersoy, and X. Xu, Appl. Phys. Lett. 90, 011104 (2007).
[CrossRef]

Yamada, K.

Yun, W.

Y. Wang, W. Yun, and C. Jacobsen, Nature 424, 50 (2003).
[CrossRef]

Zoubir, A.

Appl. Opt. (1)

Appl. Phys. Lett. (3)

K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, Appl. Phys. Lett. 71, 3329 (1997).
[CrossRef]

J. W. Chan, T. R. Huser, S. H. Risbud, J. S. Hayden, and D. M. Krol, Appl. Phys. Lett. 82, 2371 (2003).
[CrossRef]

P. Srisungsitthisunti, O. K. Ersoy, and X. Xu, Appl. Phys. Lett. 90, 011104 (2007).
[CrossRef]

J. Appl. Phys. (1)

M. Shimizu, M. Sakakura, M. Ohnishi, Y. Shimotsuma, T. Nakaya, K. Miura, and K. Hirao, J. Appl. Phys. 108, 073533 (2010).
[CrossRef]

Nature (1)

Y. Wang, W. Yun, and C. Jacobsen, Nature 424, 50 (2003).
[CrossRef]

Nature Photon (1)

R. R. Gattass and E. Mazur, Nature Photon 2, 219 (2008).
[CrossRef]

Opt. Express (2)

Opt. Lett. (4)

Proc. SPIE (2)

J. Choi and M. Richardson, Proc. SPIE 7203, 72030G (2009).
[CrossRef]

J. Choi, M. Ramme, T. Anderson, and M. Richardson, Proc. SPIE 7589, 7589-44 (2010).

Sens. Actuators A (2)

K. Hedsten, J. Melin, J. Bengtsson, P. Modh, D. Karln, B. Lfving, R. Nilsson, H. Rdjegrd, K. Persson, and P. Enoksson, Sens. Actuators A 142, 336 (2008).
[CrossRef]

J. Fonollosa, R. Rubio, S. Hartwig, S. Marco, J. Santander, L. Fonseca, J. Wöllenstein, and M. Moreno, Sens. Actuators A 132, 498 (2008).

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Figures (3)

Fig. 1.
Fig. 1.

Beam separation by (a) fragmentation and (b) energy attenuation and corresponding microlens arrays representing similar function.

Fig. 2.
Fig. 2.

(a) Schematic diagram of a four-layer multiplex FZP, (b) an optical micrograph of a multiplex FZP, consisting of four FZP layers with the modification depth of 100μm, written in a piece of borosilicate glass.

Fig. 3.
Fig. 3.

Intensity profile of (a) incident beam, (b) foci from a 1×4 volumetric multiplex FZP.

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