Abstract

We measure polarization resolved reflections from ordered vertical silicon nanowire arrays of two different diameters and compare the results to rigorous coupled wave analysis simulations. Ellipsometric analysis based on anisotropic effective-medium approximation is used to fit the experimental data and estimate the diameter and length of the nanowires. In addition, depolarization of light is observed for wavelengths below 400 nm.

© 2012 Optical Society of America

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2012

M. Khorasaninejad, N. Abedzadeh, A. S. Jawanda, N. O, M. P. Anantram, and S. S. Saini, J. Appl. Phys. 111, 044328 (2012).
[CrossRef]

2011

K. Seo, M. Wober, P. Steinvurzal, E. Schonbrun, Y. Dan, T. Ellenbogen, and K. B. Crozier, Nano Lett. 11, 1851 (2011).
[CrossRef]

2010

E. Garnett and P. Yang, Nano Lett. 10, 1082 (2010).
[CrossRef]

2009

2008

S.-H. Hsu, E.-S. Liu, Y.-C. Chang, J. N. Hilfiker, Y. D. Kim, T. J. Kim, C.-J. Lin, and G.-R. Lin, Phys. Status Solidi A 205 (4), 876 (2008).
[CrossRef]

2007

L. Hu and G. Chen, Nano Lett. 7, 3249 (2007).
[CrossRef]

Abedzadeh, N.

M. Khorasaninejad, N. Abedzadeh, A. S. Jawanda, N. O, M. P. Anantram, and S. S. Saini, J. Appl. Phys. 111, 044328 (2012).
[CrossRef]

Anantram, M. P.

M. Khorasaninejad, N. Abedzadeh, A. S. Jawanda, N. O, M. P. Anantram, and S. S. Saini, J. Appl. Phys. 111, 044328 (2012).
[CrossRef]

Chang, Y.-C.

S.-H. Hsu, E.-S. Liu, Y.-C. Chang, J. N. Hilfiker, Y. D. Kim, T. J. Kim, C.-J. Lin, and G.-R. Lin, Phys. Status Solidi A 205 (4), 876 (2008).
[CrossRef]

Chen, G.

L. Hu and G. Chen, Nano Lett. 7, 3249 (2007).
[CrossRef]

Crozier, K. B.

K. Seo, M. Wober, P. Steinvurzal, E. Schonbrun, Y. Dan, T. Ellenbogen, and K. B. Crozier, Nano Lett. 11, 1851 (2011).
[CrossRef]

Dan, Y.

K. Seo, M. Wober, P. Steinvurzal, E. Schonbrun, Y. Dan, T. Ellenbogen, and K. B. Crozier, Nano Lett. 11, 1851 (2011).
[CrossRef]

Ellenbogen, T.

K. Seo, M. Wober, P. Steinvurzal, E. Schonbrun, Y. Dan, T. Ellenbogen, and K. B. Crozier, Nano Lett. 11, 1851 (2011).
[CrossRef]

Garnett, E.

E. Garnett and P. Yang, Nano Lett. 10, 1082 (2010).
[CrossRef]

Hilfiker, J. N.

S.-H. Hsu, E.-S. Liu, Y.-C. Chang, J. N. Hilfiker, Y. D. Kim, T. J. Kim, C.-J. Lin, and G.-R. Lin, Phys. Status Solidi A 205 (4), 876 (2008).
[CrossRef]

Hsu, S.-H.

S.-H. Hsu, E.-S. Liu, Y.-C. Chang, J. N. Hilfiker, Y. D. Kim, T. J. Kim, C.-J. Lin, and G.-R. Lin, Phys. Status Solidi A 205 (4), 876 (2008).
[CrossRef]

Hu, L.

L. Hu and G. Chen, Nano Lett. 7, 3249 (2007).
[CrossRef]

Jawanda, A. S.

M. Khorasaninejad, N. Abedzadeh, A. S. Jawanda, N. O, M. P. Anantram, and S. S. Saini, J. Appl. Phys. 111, 044328 (2012).
[CrossRef]

Khorasaninejad, M.

M. Khorasaninejad, N. Abedzadeh, A. S. Jawanda, N. O, M. P. Anantram, and S. S. Saini, J. Appl. Phys. 111, 044328 (2012).
[CrossRef]

Kim, T. J.

S.-H. Hsu, E.-S. Liu, Y.-C. Chang, J. N. Hilfiker, Y. D. Kim, T. J. Kim, C.-J. Lin, and G.-R. Lin, Phys. Status Solidi A 205 (4), 876 (2008).
[CrossRef]

Kim, Y. D.

S.-H. Hsu, E.-S. Liu, Y.-C. Chang, J. N. Hilfiker, Y. D. Kim, T. J. Kim, C.-J. Lin, and G.-R. Lin, Phys. Status Solidi A 205 (4), 876 (2008).
[CrossRef]

Lin, C.

Lin, C.-J.

S.-H. Hsu, E.-S. Liu, Y.-C. Chang, J. N. Hilfiker, Y. D. Kim, T. J. Kim, C.-J. Lin, and G.-R. Lin, Phys. Status Solidi A 205 (4), 876 (2008).
[CrossRef]

Lin, G.-R.

S.-H. Hsu, E.-S. Liu, Y.-C. Chang, J. N. Hilfiker, Y. D. Kim, T. J. Kim, C.-J. Lin, and G.-R. Lin, Phys. Status Solidi A 205 (4), 876 (2008).
[CrossRef]

Liu, E.-S.

S.-H. Hsu, E.-S. Liu, Y.-C. Chang, J. N. Hilfiker, Y. D. Kim, T. J. Kim, C.-J. Lin, and G.-R. Lin, Phys. Status Solidi A 205 (4), 876 (2008).
[CrossRef]

O, N.

M. Khorasaninejad, N. Abedzadeh, A. S. Jawanda, N. O, M. P. Anantram, and S. S. Saini, J. Appl. Phys. 111, 044328 (2012).
[CrossRef]

Povinelli, M. L.

Saini, S. S.

M. Khorasaninejad, N. Abedzadeh, A. S. Jawanda, N. O, M. P. Anantram, and S. S. Saini, J. Appl. Phys. 111, 044328 (2012).
[CrossRef]

Schonbrun, E.

K. Seo, M. Wober, P. Steinvurzal, E. Schonbrun, Y. Dan, T. Ellenbogen, and K. B. Crozier, Nano Lett. 11, 1851 (2011).
[CrossRef]

Seo, K.

K. Seo, M. Wober, P. Steinvurzal, E. Schonbrun, Y. Dan, T. Ellenbogen, and K. B. Crozier, Nano Lett. 11, 1851 (2011).
[CrossRef]

Steinvurzal, P.

K. Seo, M. Wober, P. Steinvurzal, E. Schonbrun, Y. Dan, T. Ellenbogen, and K. B. Crozier, Nano Lett. 11, 1851 (2011).
[CrossRef]

Wober, M.

K. Seo, M. Wober, P. Steinvurzal, E. Schonbrun, Y. Dan, T. Ellenbogen, and K. B. Crozier, Nano Lett. 11, 1851 (2011).
[CrossRef]

Yang, P.

E. Garnett and P. Yang, Nano Lett. 10, 1082 (2010).
[CrossRef]

J. Appl. Phys.

M. Khorasaninejad, N. Abedzadeh, A. S. Jawanda, N. O, M. P. Anantram, and S. S. Saini, J. Appl. Phys. 111, 044328 (2012).
[CrossRef]

Nano Lett.

L. Hu and G. Chen, Nano Lett. 7, 3249 (2007).
[CrossRef]

E. Garnett and P. Yang, Nano Lett. 10, 1082 (2010).
[CrossRef]

K. Seo, M. Wober, P. Steinvurzal, E. Schonbrun, Y. Dan, T. Ellenbogen, and K. B. Crozier, Nano Lett. 11, 1851 (2011).
[CrossRef]

Opt. Express

Phys. Status Solidi A

S.-H. Hsu, E.-S. Liu, Y.-C. Chang, J. N. Hilfiker, Y. D. Kim, T. J. Kim, C.-J. Lin, and G.-R. Lin, Phys. Status Solidi A 205 (4), 876 (2008).
[CrossRef]

Other

DiffractMod, Rsoft Inc., http://www.rsoftinc.com .

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Figures (6)

Fig. 1.
Fig. 1.

SEM image of SiNW arrays with a diameter of 38 nm and length of 375 nm. Scale bar is 200 nm.

Fig. 2.
Fig. 2.

Total reflection intensity from SiNW arrays with diameters of 38 nm and 45 nm for (a) s-polarized input and (b) p-polarized input. Bulk silicon is also shown.

Fig. 3.
Fig. 3.

Total reflection and reflection in the same polarization as the input for the diameter of 38 nm for p-polarized input and s-polarized input.

Fig. 4.
Fig. 4.

Experimental and modeled generated fits for ellipsometric parameters for the diameter of 38 nm.

Fig. 5.
Fig. 5.

Anisotropic refractive index and absorption coefficient for the nanowire arrays of diameter 38 nm.

Fig. 6.
Fig. 6.

Experimental and modeled total reflections for the array with SiNWs of 38 nm diameter for (a) p-polarized input and (b) s-polarized input.

Equations (1)

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tan(ψ)eiΔ=RppRss,

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