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Reflective silicon binary diffraction grating for visible wavelengths

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Abstract

We introduce a device based on subwavelength resonant grating technology. Using a single lithography step we built a reflective binary grating that mimics the functionality of a blazed diffraction grating in a flat geometry. We have also demonstrated that efficient subwavelength resonant devices for visible wavelengths can be built using silicon.

© 2011 Optical Society of America

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