Abstract

The feasibility of all-telluride integrated optics devices based on waveguides presenting a single-mode behavior in the spectral range (1020μm) is demonstrated. These waveguides are constituted of a several micrometer thick Te82Ge18 film deposited onto a Te75Ge15Ga10 bulk glass substrate by thermal coevaporation and further etched by reactive ion etching under the CHF3/O2/Ar atmosphere. The obtained structures were proven to behave as channel waveguides with a good single-mode transmission over the whole spectral range. These results allowed validating our technological solution for the fabrication of integrated optics modal filters for spatial interferometry.

© 2011 Optical Society of America

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    [CrossRef]

2011 (2)

2010 (2)

E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, J. Non-Cryst. Solids 356, 2175 (2010).
[CrossRef]

S. Zhang, X. Zhang, M. Barillot, L. Calvez, C. Boussard, B. Bureau, J. Lucas, V. Kirschner, and G. Parent, Opt. Mater. 32, 1055 (2010).
[CrossRef]

2009 (3)

J. Frayret, E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, Optoelect. Adv. Mater: Rapid Comm. 3, 260(2009).

A. A. Piarristeguy, E. Barthélémy, M. Krbal, J. Frayret, C. Vigreux, and A. Pradel, J. Non-Cryst. Solids 355, 2088(2009).
[CrossRef]

Z. G. Lian, W. Pan, D. Furniss, T. M. Benson, A. B. Seddon, T. Kohoutek, J. Orava, and T. Wagner, Opt. Lett. 34, 1234 (2009).
[CrossRef] [PubMed]

2008 (1)

S. Albert, E. Barthélémy, C. Vigreux, A. Pradel, and M. Barillot, Proc. SPIE 7101, 71011N (2008).
[CrossRef]

2007 (2)

C. Vigreux-Bercovici, E. Bonhomme, A. Pradel, J.-E. Broquin, L. Labadie, and P. Kern, Appl. Phys. Lett. 90, 011110 (2007).
[CrossRef]

E. Barthélémy, C. Vigreux-Bercovici, P. Yot, and A. Pradel, Optoelect. Adv. Mater: Rapid Comm. 1, 487(2007).

2006 (4)

N. Hô, M. C. Phillips, H. Qiao, P. J. Allen, K. Krishaswami, B. J. Riley, T. L. Myers, and N. C. Anheier Jr., Opt. Lett. 31, 1860 (2006).
[CrossRef] [PubMed]

J. A. Frantz, L. B. Shaw, J. S. Sanghera, and I. D. Aggarwal, Opt. Express 14, 1797 (2006).
[CrossRef] [PubMed]

S. Danto, P. Houizot, C. Boussard-Pledel, X. Zhang, F. Smektala, and J. Lucas, Adv. Funct. Mater. 16, 1847(2006).
[CrossRef]

L. Labadie, P. Labeye, P. Kern, I. Schanen, B. Arezki, and J.-E. Broquin, Astron. Astrophys. 450, 1265 (2006).
[CrossRef]

2004 (3)

M. C. Fridlund, Proc. SPIE 5491, 227 (2004).
[CrossRef]

V. Weber, M. Barillot, P. Haguenauer, P. Kern, I. Schanen-Duport, P. Labeye, L. Pujol, and Z. Sodnik, Proc. SPIE 5491, 842 (2004).
[CrossRef]

Y. Ruan, W. Li, R. Jarvis, N. Madsen, A. Rode, and B. Luther-Davies, Opt. Express 12, 5140 (2004).
[CrossRef] [PubMed]

2003 (1)

P. Petkov, M. Wuttig, P. Ilchev, and T. Petkova, J. Optoelect. Adv. Mater. 5, 1101 (2003).

1999 (1)

1995 (1)

Y. Sripathi, L. K. Malhotra, and G. B. Reddy, Thin Solid Films 270, 60 (1995).
[CrossRef]

Aggarwal, I. D.

Albert, S.

E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, J. Non-Cryst. Solids 356, 2175 (2010).
[CrossRef]

J. Frayret, E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, Optoelect. Adv. Mater: Rapid Comm. 3, 260(2009).

S. Albert, E. Barthélémy, C. Vigreux, A. Pradel, and M. Barillot, Proc. SPIE 7101, 71011N (2008).
[CrossRef]

Allen, P. J.

Anheier, N. C.

Arezki, B.

L. Labadie, P. Labeye, P. Kern, I. Schanen, B. Arezki, and J.-E. Broquin, Astron. Astrophys. 450, 1265 (2006).
[CrossRef]

Barillot, M.

C. Vigreux, E. Barthélémy, L. Bastard, J.-E. Broquin, S. Ménard, M. Barillot, G. Parent, and A. Pradel, Opt. Mater. Express 1, 357 (2011).
[CrossRef]

S. Zhang, X. Zhang, M. Barillot, L. Calvez, C. Boussard, B. Bureau, J. Lucas, V. Kirschner, and G. Parent, Opt. Mater. 32, 1055 (2010).
[CrossRef]

S. Albert, E. Barthélémy, C. Vigreux, A. Pradel, and M. Barillot, Proc. SPIE 7101, 71011N (2008).
[CrossRef]

V. Weber, M. Barillot, P. Haguenauer, P. Kern, I. Schanen-Duport, P. Labeye, L. Pujol, and Z. Sodnik, Proc. SPIE 5491, 842 (2004).
[CrossRef]

Barthélémy, E.

C. Vigreux, S. De Sousa, V. Foucan, E. Barthélémy, and A. Pradel, Microelectron. Eng. 88, 222 (2011).
[CrossRef]

C. Vigreux, E. Barthélémy, L. Bastard, J.-E. Broquin, S. Ménard, M. Barillot, G. Parent, and A. Pradel, Opt. Mater. Express 1, 357 (2011).
[CrossRef]

E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, J. Non-Cryst. Solids 356, 2175 (2010).
[CrossRef]

A. A. Piarristeguy, E. Barthélémy, M. Krbal, J. Frayret, C. Vigreux, and A. Pradel, J. Non-Cryst. Solids 355, 2088(2009).
[CrossRef]

J. Frayret, E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, Optoelect. Adv. Mater: Rapid Comm. 3, 260(2009).

S. Albert, E. Barthélémy, C. Vigreux, A. Pradel, and M. Barillot, Proc. SPIE 7101, 71011N (2008).
[CrossRef]

E. Barthélémy, C. Vigreux-Bercovici, P. Yot, and A. Pradel, Optoelect. Adv. Mater: Rapid Comm. 1, 487(2007).

Bastard, L.

Benson, T. M.

Bonhomme, E.

C. Vigreux-Bercovici, E. Bonhomme, A. Pradel, J.-E. Broquin, L. Labadie, and P. Kern, Appl. Phys. Lett. 90, 011110 (2007).
[CrossRef]

Boussard, C.

S. Zhang, X. Zhang, M. Barillot, L. Calvez, C. Boussard, B. Bureau, J. Lucas, V. Kirschner, and G. Parent, Opt. Mater. 32, 1055 (2010).
[CrossRef]

Boussard-Pledel, C.

S. Danto, P. Houizot, C. Boussard-Pledel, X. Zhang, F. Smektala, and J. Lucas, Adv. Funct. Mater. 16, 1847(2006).
[CrossRef]

Broquin, J.-E.

C. Vigreux, E. Barthélémy, L. Bastard, J.-E. Broquin, S. Ménard, M. Barillot, G. Parent, and A. Pradel, Opt. Mater. Express 1, 357 (2011).
[CrossRef]

C. Vigreux-Bercovici, E. Bonhomme, A. Pradel, J.-E. Broquin, L. Labadie, and P. Kern, Appl. Phys. Lett. 90, 011110 (2007).
[CrossRef]

L. Labadie, P. Labeye, P. Kern, I. Schanen, B. Arezki, and J.-E. Broquin, Astron. Astrophys. 450, 1265 (2006).
[CrossRef]

Bureau, B.

S. Zhang, X. Zhang, M. Barillot, L. Calvez, C. Boussard, B. Bureau, J. Lucas, V. Kirschner, and G. Parent, Opt. Mater. 32, 1055 (2010).
[CrossRef]

Calvez, L.

S. Zhang, X. Zhang, M. Barillot, L. Calvez, C. Boussard, B. Bureau, J. Lucas, V. Kirschner, and G. Parent, Opt. Mater. 32, 1055 (2010).
[CrossRef]

Cardinal, T.

Danto, S.

S. Danto, P. Houizot, C. Boussard-Pledel, X. Zhang, F. Smektala, and J. Lucas, Adv. Funct. Mater. 16, 1847(2006).
[CrossRef]

De Sousa, S.

C. Vigreux, S. De Sousa, V. Foucan, E. Barthélémy, and A. Pradel, Microelectron. Eng. 88, 222 (2011).
[CrossRef]

Duguay, M. A.

Foucan, V.

C. Vigreux, S. De Sousa, V. Foucan, E. Barthélémy, and A. Pradel, Microelectron. Eng. 88, 222 (2011).
[CrossRef]

Frantz, J. A.

Frayret, J.

J. Frayret, E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, Optoelect. Adv. Mater: Rapid Comm. 3, 260(2009).

A. A. Piarristeguy, E. Barthélémy, M. Krbal, J. Frayret, C. Vigreux, and A. Pradel, J. Non-Cryst. Solids 355, 2088(2009).
[CrossRef]

Fridlund, M. C.

M. C. Fridlund, Proc. SPIE 5491, 227 (2004).
[CrossRef]

Furniss, D.

Galstian, T. V.

Haguenauer, P.

V. Weber, M. Barillot, P. Haguenauer, P. Kern, I. Schanen-Duport, P. Labeye, L. Pujol, and Z. Sodnik, Proc. SPIE 5491, 842 (2004).
[CrossRef]

Hô, N.

Houizot, P.

S. Danto, P. Houizot, C. Boussard-Pledel, X. Zhang, F. Smektala, and J. Lucas, Adv. Funct. Mater. 16, 1847(2006).
[CrossRef]

Ilchev, P.

P. Petkov, M. Wuttig, P. Ilchev, and T. Petkova, J. Optoelect. Adv. Mater. 5, 1101 (2003).

Jarvis, R.

Kern, P.

C. Vigreux-Bercovici, E. Bonhomme, A. Pradel, J.-E. Broquin, L. Labadie, and P. Kern, Appl. Phys. Lett. 90, 011110 (2007).
[CrossRef]

L. Labadie, P. Labeye, P. Kern, I. Schanen, B. Arezki, and J.-E. Broquin, Astron. Astrophys. 450, 1265 (2006).
[CrossRef]

V. Weber, M. Barillot, P. Haguenauer, P. Kern, I. Schanen-Duport, P. Labeye, L. Pujol, and Z. Sodnik, Proc. SPIE 5491, 842 (2004).
[CrossRef]

Kirschner, V.

S. Zhang, X. Zhang, M. Barillot, L. Calvez, C. Boussard, B. Bureau, J. Lucas, V. Kirschner, and G. Parent, Opt. Mater. 32, 1055 (2010).
[CrossRef]

Knystautas, E. J.

Kohoutek, T.

Krbal, M.

A. A. Piarristeguy, E. Barthélémy, M. Krbal, J. Frayret, C. Vigreux, and A. Pradel, J. Non-Cryst. Solids 355, 2088(2009).
[CrossRef]

Krishaswami, K.

Labadie, L.

C. Vigreux-Bercovici, E. Bonhomme, A. Pradel, J.-E. Broquin, L. Labadie, and P. Kern, Appl. Phys. Lett. 90, 011110 (2007).
[CrossRef]

L. Labadie, P. Labeye, P. Kern, I. Schanen, B. Arezki, and J.-E. Broquin, Astron. Astrophys. 450, 1265 (2006).
[CrossRef]

Labeye, P.

L. Labadie, P. Labeye, P. Kern, I. Schanen, B. Arezki, and J.-E. Broquin, Astron. Astrophys. 450, 1265 (2006).
[CrossRef]

V. Weber, M. Barillot, P. Haguenauer, P. Kern, I. Schanen-Duport, P. Labeye, L. Pujol, and Z. Sodnik, Proc. SPIE 5491, 842 (2004).
[CrossRef]

Li, W.

Lian, Z. G.

Lucas, J.

S. Zhang, X. Zhang, M. Barillot, L. Calvez, C. Boussard, B. Bureau, J. Lucas, V. Kirschner, and G. Parent, Opt. Mater. 32, 1055 (2010).
[CrossRef]

S. Danto, P. Houizot, C. Boussard-Pledel, X. Zhang, F. Smektala, and J. Lucas, Adv. Funct. Mater. 16, 1847(2006).
[CrossRef]

Luther-Davies, B.

Madsen, N.

Malhotra, L. K.

Y. Sripathi, L. K. Malhotra, and G. B. Reddy, Thin Solid Films 270, 60 (1995).
[CrossRef]

Ménard, S.

Meneghini, C.

Myers, T. L.

Orava, J.

Pan, W.

Parent, G.

C. Vigreux, E. Barthélémy, L. Bastard, J.-E. Broquin, S. Ménard, M. Barillot, G. Parent, and A. Pradel, Opt. Mater. Express 1, 357 (2011).
[CrossRef]

S. Zhang, X. Zhang, M. Barillot, L. Calvez, C. Boussard, B. Bureau, J. Lucas, V. Kirschner, and G. Parent, Opt. Mater. 32, 1055 (2010).
[CrossRef]

Petkov, P.

P. Petkov, M. Wuttig, P. Ilchev, and T. Petkova, J. Optoelect. Adv. Mater. 5, 1101 (2003).

Petkova, T.

P. Petkov, M. Wuttig, P. Ilchev, and T. Petkova, J. Optoelect. Adv. Mater. 5, 1101 (2003).

Phillips, M. C.

Piarristeguy, A. A.

A. A. Piarristeguy, E. Barthélémy, M. Krbal, J. Frayret, C. Vigreux, and A. Pradel, J. Non-Cryst. Solids 355, 2088(2009).
[CrossRef]

Pradel, A.

C. Vigreux, S. De Sousa, V. Foucan, E. Barthélémy, and A. Pradel, Microelectron. Eng. 88, 222 (2011).
[CrossRef]

C. Vigreux, E. Barthélémy, L. Bastard, J.-E. Broquin, S. Ménard, M. Barillot, G. Parent, and A. Pradel, Opt. Mater. Express 1, 357 (2011).
[CrossRef]

E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, J. Non-Cryst. Solids 356, 2175 (2010).
[CrossRef]

A. A. Piarristeguy, E. Barthélémy, M. Krbal, J. Frayret, C. Vigreux, and A. Pradel, J. Non-Cryst. Solids 355, 2088(2009).
[CrossRef]

J. Frayret, E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, Optoelect. Adv. Mater: Rapid Comm. 3, 260(2009).

S. Albert, E. Barthélémy, C. Vigreux, A. Pradel, and M. Barillot, Proc. SPIE 7101, 71011N (2008).
[CrossRef]

E. Barthélémy, C. Vigreux-Bercovici, P. Yot, and A. Pradel, Optoelect. Adv. Mater: Rapid Comm. 1, 487(2007).

C. Vigreux-Bercovici, E. Bonhomme, A. Pradel, J.-E. Broquin, L. Labadie, and P. Kern, Appl. Phys. Lett. 90, 011110 (2007).
[CrossRef]

Pujol, L.

V. Weber, M. Barillot, P. Haguenauer, P. Kern, I. Schanen-Duport, P. Labeye, L. Pujol, and Z. Sodnik, Proc. SPIE 5491, 842 (2004).
[CrossRef]

Qiao, H.

Reddy, G. B.

Y. Sripathi, L. K. Malhotra, and G. B. Reddy, Thin Solid Films 270, 60 (1995).
[CrossRef]

Richardson, K. A.

Riley, B. J.

Rode, A.

Ruan, Y.

Sanghera, J. S.

Schanen, I.

L. Labadie, P. Labeye, P. Kern, I. Schanen, B. Arezki, and J.-E. Broquin, Astron. Astrophys. 450, 1265 (2006).
[CrossRef]

Schanen-Duport, I.

V. Weber, M. Barillot, P. Haguenauer, P. Kern, I. Schanen-Duport, P. Labeye, L. Pujol, and Z. Sodnik, Proc. SPIE 5491, 842 (2004).
[CrossRef]

Seddon, A. B.

Shaw, L. B.

Smektala, F.

S. Danto, P. Houizot, C. Boussard-Pledel, X. Zhang, F. Smektala, and J. Lucas, Adv. Funct. Mater. 16, 1847(2006).
[CrossRef]

Sodnik, Z.

V. Weber, M. Barillot, P. Haguenauer, P. Kern, I. Schanen-Duport, P. Labeye, L. Pujol, and Z. Sodnik, Proc. SPIE 5491, 842 (2004).
[CrossRef]

Sripathi, Y.

Y. Sripathi, L. K. Malhotra, and G. B. Reddy, Thin Solid Films 270, 60 (1995).
[CrossRef]

Viens, J.-F.

Vigreux, C.

C. Vigreux, S. De Sousa, V. Foucan, E. Barthélémy, and A. Pradel, Microelectron. Eng. 88, 222 (2011).
[CrossRef]

C. Vigreux, E. Barthélémy, L. Bastard, J.-E. Broquin, S. Ménard, M. Barillot, G. Parent, and A. Pradel, Opt. Mater. Express 1, 357 (2011).
[CrossRef]

E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, J. Non-Cryst. Solids 356, 2175 (2010).
[CrossRef]

A. A. Piarristeguy, E. Barthélémy, M. Krbal, J. Frayret, C. Vigreux, and A. Pradel, J. Non-Cryst. Solids 355, 2088(2009).
[CrossRef]

J. Frayret, E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, Optoelect. Adv. Mater: Rapid Comm. 3, 260(2009).

S. Albert, E. Barthélémy, C. Vigreux, A. Pradel, and M. Barillot, Proc. SPIE 7101, 71011N (2008).
[CrossRef]

Vigreux-Bercovici, C.

E. Barthélémy, C. Vigreux-Bercovici, P. Yot, and A. Pradel, Optoelect. Adv. Mater: Rapid Comm. 1, 487(2007).

C. Vigreux-Bercovici, E. Bonhomme, A. Pradel, J.-E. Broquin, L. Labadie, and P. Kern, Appl. Phys. Lett. 90, 011110 (2007).
[CrossRef]

Villeneuve, A.

Wagner, T.

Weber, V.

V. Weber, M. Barillot, P. Haguenauer, P. Kern, I. Schanen-Duport, P. Labeye, L. Pujol, and Z. Sodnik, Proc. SPIE 5491, 842 (2004).
[CrossRef]

Wuttig, M.

P. Petkov, M. Wuttig, P. Ilchev, and T. Petkova, J. Optoelect. Adv. Mater. 5, 1101 (2003).

Yot, P.

E. Barthélémy, C. Vigreux-Bercovici, P. Yot, and A. Pradel, Optoelect. Adv. Mater: Rapid Comm. 1, 487(2007).

Zhang, S.

S. Zhang, X. Zhang, M. Barillot, L. Calvez, C. Boussard, B. Bureau, J. Lucas, V. Kirschner, and G. Parent, Opt. Mater. 32, 1055 (2010).
[CrossRef]

Zhang, X.

S. Zhang, X. Zhang, M. Barillot, L. Calvez, C. Boussard, B. Bureau, J. Lucas, V. Kirschner, and G. Parent, Opt. Mater. 32, 1055 (2010).
[CrossRef]

S. Danto, P. Houizot, C. Boussard-Pledel, X. Zhang, F. Smektala, and J. Lucas, Adv. Funct. Mater. 16, 1847(2006).
[CrossRef]

Adv. Funct. Mater. (1)

S. Danto, P. Houizot, C. Boussard-Pledel, X. Zhang, F. Smektala, and J. Lucas, Adv. Funct. Mater. 16, 1847(2006).
[CrossRef]

Appl. Phys. Lett. (1)

C. Vigreux-Bercovici, E. Bonhomme, A. Pradel, J.-E. Broquin, L. Labadie, and P. Kern, Appl. Phys. Lett. 90, 011110 (2007).
[CrossRef]

Astron. Astrophys. (1)

L. Labadie, P. Labeye, P. Kern, I. Schanen, B. Arezki, and J.-E. Broquin, Astron. Astrophys. 450, 1265 (2006).
[CrossRef]

J. Lightwave Technol. (1)

J. Non-Cryst. Solids (2)

A. A. Piarristeguy, E. Barthélémy, M. Krbal, J. Frayret, C. Vigreux, and A. Pradel, J. Non-Cryst. Solids 355, 2088(2009).
[CrossRef]

E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, J. Non-Cryst. Solids 356, 2175 (2010).
[CrossRef]

J. Optoelect. Adv. Mater. (1)

P. Petkov, M. Wuttig, P. Ilchev, and T. Petkova, J. Optoelect. Adv. Mater. 5, 1101 (2003).

Microelectron. Eng. (1)

C. Vigreux, S. De Sousa, V. Foucan, E. Barthélémy, and A. Pradel, Microelectron. Eng. 88, 222 (2011).
[CrossRef]

Opt. Express (2)

Opt. Lett. (2)

Opt. Mater. (1)

S. Zhang, X. Zhang, M. Barillot, L. Calvez, C. Boussard, B. Bureau, J. Lucas, V. Kirschner, and G. Parent, Opt. Mater. 32, 1055 (2010).
[CrossRef]

Opt. Mater. Express (1)

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Figures (3)

Fig. 1
Fig. 1

(a) Design of a rib waveguide single mode between λ = 10 μm and λ = 20 μm . (b) and (c) Calculated amplitude of the guided mode at λ = 10 μm and λ = 20 μm , respectively.

Fig. 2
Fig. 2

SEM picture of the realized rib waveguide.

Fig. 3
Fig. 3

Observation at the exit of a rib waveguide with an IR camera (a) without illumination (integrated time: IT = 2000 μs ) and (b) when light was injected into a rib waveguide ( IT = 1000 μs ). (c) Transmission spectra of the same component.

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