Abstract

Efficient microwelding of glass substrates by irradiation by a double-pulse train of ultrafast laser pulses is demonstrated. Temporal beam shaping techniques such as double-pulse irradiation enabled increased flexibility for high-quality, high-efficiency material processing. The bonding strength of two photostructurable glass substrates welded by double-pulse irradiation was evaluated to be 22.9MPa, which is approximately 22% greater than that of a sample prepared by conventional irradiation by a single-pulse train.

© 2011 Optical Society of America

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    [CrossRef]
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2010 (3)

K. Sugioka, Y. Hanada, K. Midorikawa, Laser Photon. Rev. 4, 386 (2010).
[CrossRef]

M. Shimizu, M. Sakakura, M. Ohnishi, Y. Shimotsuma, T. Nakaya, K. Miura, K. Hirao, J. Appl. Phys. 108, 073533 (2010).
[CrossRef]

S. Guizard, N. Fedorov, A. Mouskeftaras, S. Klimentov, AIP Conf.Proc. 1278, 336 (2010).
[CrossRef]

2009 (1)

M. Wollenhaupt, L. Englert, A. Horn, T. Baumert, J. Laser Micro/Nanoeng. 4, 144 (2009).
[CrossRef]

2008 (2)

2007 (2)

2006 (2)

T. Tamaki, W. Watanabe, K. Ito, Opt. Express 14, 10460 (2006).
[CrossRef] [PubMed]

V. V. Temnov, K. Sokolowski-Tinten, P. Zhou, A. El-Khamhawy, D. von der Linde, Phys. Rev. Lett. 97, 237403 (2006).
[CrossRef]

2005 (3)

T. Tamaki, W. Watanabe, J. Nishii, K. Itoh, Jpn. J. Appl. Phys. 44, L687 (2005).
[CrossRef]

K. Sugioka, Y. Cheng, K. Midorikawa, Appl. Phys. A 81, 1 (2005).
[CrossRef]

S. M. Eaton, H. Zhang, P. R. Herman, F. Yoshino, L. Shah, J. Bovatsek, A. Y. Arai, Opt. Express 13, 4708 (2005).
[CrossRef] [PubMed]

2004 (1)

S. S. Mao, F. Quere, S. Guizard, X. Mao, R. E. Russo, G. Petite, P. Martin, Appl. Phys. A 79, 1695 (2004).
[CrossRef]

2002 (1)

R. Stoian, M. Boyle, A. Thoss, A. Rosenfeld, G. Korn, I. V. Hertel, E. E. B. Campbell, Appl. Phys. Lett. 80, 353 (2002).
[CrossRef]

2001 (1)

F. Quéré, S. Guizard, Ph. Martin, Europhys. Lett. 56, 138 (2001).
[CrossRef]

1996 (1)

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, M. D. Perry, Phys. Rev. B 53, 1749 (1996).
[CrossRef]

Arai, A. Y.

Baumert, T.

Bovatsek, J.

Boyle, M.

R. Stoian, M. Boyle, A. Thoss, A. Rosenfeld, G. Korn, I. V. Hertel, E. E. B. Campbell, Appl. Phys. Lett. 80, 353 (2002).
[CrossRef]

Campbell, E. E. B.

R. Stoian, M. Boyle, A. Thoss, A. Rosenfeld, G. Korn, I. V. Hertel, E. E. B. Campbell, Appl. Phys. Lett. 80, 353 (2002).
[CrossRef]

Chen, W. J.

Cheng, Y.

K. Sugioka, Y. Cheng, K. Midorikawa, Appl. Phys. A 81, 1 (2005).
[CrossRef]

Eaton, S. M.

El-Khamhawy, A.

V. V. Temnov, K. Sokolowski-Tinten, P. Zhou, A. El-Khamhawy, D. von der Linde, Phys. Rev. Lett. 97, 237403 (2006).
[CrossRef]

Englert, L.

Fedorov, N.

S. Guizard, N. Fedorov, A. Mouskeftaras, S. Klimentov, AIP Conf.Proc. 1278, 336 (2010).
[CrossRef]

Feit, M. D.

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, M. D. Perry, Phys. Rev. B 53, 1749 (1996).
[CrossRef]

Gottmann, J.

I. Miyamoto, A. Horn, J. Gottmann, J. Laser Micro/ Nanoeng. 2, 7 (2007).
[CrossRef]

Guizard, S.

S. Guizard, N. Fedorov, A. Mouskeftaras, S. Klimentov, AIP Conf.Proc. 1278, 336 (2010).
[CrossRef]

S. S. Mao, F. Quere, S. Guizard, X. Mao, R. E. Russo, G. Petite, P. Martin, Appl. Phys. A 79, 1695 (2004).
[CrossRef]

F. Quéré, S. Guizard, Ph. Martin, Europhys. Lett. 56, 138 (2001).
[CrossRef]

Haag, L.

Hanada, Y.

K. Sugioka, Y. Hanada, K. Midorikawa, Laser Photon. Rev. 4, 386 (2010).
[CrossRef]

Hansen, W. W.

A. Huang, S. W. Jansen, W. W. Hansen, L. F. Steffeney, H. Helvajian, in Small Satellites: Past, Present, and Future, H. Helvajian and S. W. Jansen, eds. (The Aerospace Press, 2008), pp. 559–593.

Helvajian, H.

A. Huang, S. W. Jansen, W. W. Hansen, L. F. Steffeney, H. Helvajian, in Small Satellites: Past, Present, and Future, H. Helvajian and S. W. Jansen, eds. (The Aerospace Press, 2008), pp. 559–593.

Herman, P. R.

Herman, S.

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, M. D. Perry, Phys. Rev. B 53, 1749 (1996).
[CrossRef]

Hertel, I. V.

R. Stoian, M. Boyle, A. Thoss, A. Rosenfeld, G. Korn, I. V. Hertel, E. E. B. Campbell, Appl. Phys. Lett. 80, 353 (2002).
[CrossRef]

Hirao, K.

M. Shimizu, M. Sakakura, M. Ohnishi, Y. Shimotsuma, T. Nakaya, K. Miura, K. Hirao, J. Appl. Phys. 108, 073533 (2010).
[CrossRef]

Ho, S.

Horn, A.

M. Wollenhaupt, L. Englert, A. Horn, T. Baumert, J. Laser Micro/Nanoeng. 4, 144 (2009).
[CrossRef]

A. Horn, I. Mingareev, A. Werth, J. Laser Micro/ Nanoeng. 3, 114 (2008).
[CrossRef]

I. Miyamoto, A. Horn, J. Gottmann, J. Laser Micro/ Nanoeng. 2, 7 (2007).
[CrossRef]

Huang, A.

A. Huang, S. W. Jansen, W. W. Hansen, L. F. Steffeney, H. Helvajian, in Small Satellites: Past, Present, and Future, H. Helvajian and S. W. Jansen, eds. (The Aerospace Press, 2008), pp. 559–593.

Ito, K.

Itoh, K.

T. Tamaki, W. Watanabe, J. Nishii, K. Itoh, Jpn. J. Appl. Phys. 44, L687 (2005).
[CrossRef]

Jansen, S. W.

A. Huang, S. W. Jansen, W. W. Hansen, L. F. Steffeney, H. Helvajian, in Small Satellites: Past, Present, and Future, H. Helvajian and S. W. Jansen, eds. (The Aerospace Press, 2008), pp. 559–593.

Klimentov, S.

S. Guizard, N. Fedorov, A. Mouskeftaras, S. Klimentov, AIP Conf.Proc. 1278, 336 (2010).
[CrossRef]

Korn, G.

R. Stoian, M. Boyle, A. Thoss, A. Rosenfeld, G. Korn, I. V. Hertel, E. E. B. Campbell, Appl. Phys. Lett. 80, 353 (2002).
[CrossRef]

Li, J.

Mao, S. S.

S. S. Mao, F. Quere, S. Guizard, X. Mao, R. E. Russo, G. Petite, P. Martin, Appl. Phys. A 79, 1695 (2004).
[CrossRef]

Mao, X.

S. S. Mao, F. Quere, S. Guizard, X. Mao, R. E. Russo, G. Petite, P. Martin, Appl. Phys. A 79, 1695 (2004).
[CrossRef]

Martin, P.

S. S. Mao, F. Quere, S. Guizard, X. Mao, R. E. Russo, G. Petite, P. Martin, Appl. Phys. A 79, 1695 (2004).
[CrossRef]

Martin, Ph.

F. Quéré, S. Guizard, Ph. Martin, Europhys. Lett. 56, 138 (2001).
[CrossRef]

Midorikawa, K.

K. Sugioka, Y. Hanada, K. Midorikawa, Laser Photon. Rev. 4, 386 (2010).
[CrossRef]

K. Sugioka, Y. Cheng, K. Midorikawa, Appl. Phys. A 81, 1 (2005).
[CrossRef]

Mingareev, I.

A. Horn, I. Mingareev, A. Werth, J. Laser Micro/ Nanoeng. 3, 114 (2008).
[CrossRef]

Miura, K.

M. Shimizu, M. Sakakura, M. Ohnishi, Y. Shimotsuma, T. Nakaya, K. Miura, K. Hirao, J. Appl. Phys. 108, 073533 (2010).
[CrossRef]

Miyamoto, I.

I. Miyamoto, A. Horn, J. Gottmann, J. Laser Micro/ Nanoeng. 2, 7 (2007).
[CrossRef]

Mouskeftaras, A.

S. Guizard, N. Fedorov, A. Mouskeftaras, S. Klimentov, AIP Conf.Proc. 1278, 336 (2010).
[CrossRef]

Nakaya, T.

M. Shimizu, M. Sakakura, M. Ohnishi, Y. Shimotsuma, T. Nakaya, K. Miura, K. Hirao, J. Appl. Phys. 108, 073533 (2010).
[CrossRef]

Ng, M. L.

Nishii, J.

T. Tamaki, W. Watanabe, J. Nishii, K. Itoh, Jpn. J. Appl. Phys. 44, L687 (2005).
[CrossRef]

Ohnishi, M.

M. Shimizu, M. Sakakura, M. Ohnishi, Y. Shimotsuma, T. Nakaya, K. Miura, K. Hirao, J. Appl. Phys. 108, 073533 (2010).
[CrossRef]

Perry, M. D.

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, M. D. Perry, Phys. Rev. B 53, 1749 (1996).
[CrossRef]

Petite, G.

S. S. Mao, F. Quere, S. Guizard, X. Mao, R. E. Russo, G. Petite, P. Martin, Appl. Phys. A 79, 1695 (2004).
[CrossRef]

Quere, F.

S. S. Mao, F. Quere, S. Guizard, X. Mao, R. E. Russo, G. Petite, P. Martin, Appl. Phys. A 79, 1695 (2004).
[CrossRef]

Quéré, F.

F. Quéré, S. Guizard, Ph. Martin, Europhys. Lett. 56, 138 (2001).
[CrossRef]

Rethfeld, B.

Rosenfeld, A.

R. Stoian, M. Boyle, A. Thoss, A. Rosenfeld, G. Korn, I. V. Hertel, E. E. B. Campbell, Appl. Phys. Lett. 80, 353 (2002).
[CrossRef]

Rubenchik, A. M.

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, M. D. Perry, Phys. Rev. B 53, 1749 (1996).
[CrossRef]

Russo, R. E.

S. S. Mao, F. Quere, S. Guizard, X. Mao, R. E. Russo, G. Petite, P. Martin, Appl. Phys. A 79, 1695 (2004).
[CrossRef]

Sakakura, M.

M. Shimizu, M. Sakakura, M. Ohnishi, Y. Shimotsuma, T. Nakaya, K. Miura, K. Hirao, J. Appl. Phys. 108, 073533 (2010).
[CrossRef]

Sarpe-Tudoran, C.

Shah, L.

Shimizu, M.

M. Shimizu, M. Sakakura, M. Ohnishi, Y. Shimotsuma, T. Nakaya, K. Miura, K. Hirao, J. Appl. Phys. 108, 073533 (2010).
[CrossRef]

Shimotsuma, Y.

M. Shimizu, M. Sakakura, M. Ohnishi, Y. Shimotsuma, T. Nakaya, K. Miura, K. Hirao, J. Appl. Phys. 108, 073533 (2010).
[CrossRef]

Shore, B. W.

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, M. D. Perry, Phys. Rev. B 53, 1749 (1996).
[CrossRef]

Sokolowski-Tinten, K.

V. V. Temnov, K. Sokolowski-Tinten, P. Zhou, A. El-Khamhawy, D. von der Linde, Phys. Rev. Lett. 97, 237403 (2006).
[CrossRef]

Steffeney, L. F.

A. Huang, S. W. Jansen, W. W. Hansen, L. F. Steffeney, H. Helvajian, in Small Satellites: Past, Present, and Future, H. Helvajian and S. W. Jansen, eds. (The Aerospace Press, 2008), pp. 559–593.

Stoian, R.

R. Stoian, M. Boyle, A. Thoss, A. Rosenfeld, G. Korn, I. V. Hertel, E. E. B. Campbell, Appl. Phys. Lett. 80, 353 (2002).
[CrossRef]

Stuart, B. C.

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, M. D. Perry, Phys. Rev. B 53, 1749 (1996).
[CrossRef]

Sugioka, K.

K. Sugioka, Y. Hanada, K. Midorikawa, Laser Photon. Rev. 4, 386 (2010).
[CrossRef]

K. Sugioka, Y. Cheng, K. Midorikawa, Appl. Phys. A 81, 1 (2005).
[CrossRef]

Tamaki, T.

T. Tamaki, W. Watanabe, K. Ito, Opt. Express 14, 10460 (2006).
[CrossRef] [PubMed]

T. Tamaki, W. Watanabe, J. Nishii, K. Itoh, Jpn. J. Appl. Phys. 44, L687 (2005).
[CrossRef]

Temnov, V. V.

V. V. Temnov, K. Sokolowski-Tinten, P. Zhou, A. El-Khamhawy, D. von der Linde, Phys. Rev. Lett. 97, 237403 (2006).
[CrossRef]

Thoss, A.

R. Stoian, M. Boyle, A. Thoss, A. Rosenfeld, G. Korn, I. V. Hertel, E. E. B. Campbell, Appl. Phys. Lett. 80, 353 (2002).
[CrossRef]

von der Linde, D.

V. V. Temnov, K. Sokolowski-Tinten, P. Zhou, A. El-Khamhawy, D. von der Linde, Phys. Rev. Lett. 97, 237403 (2006).
[CrossRef]

Watanabe, W.

T. Tamaki, W. Watanabe, K. Ito, Opt. Express 14, 10460 (2006).
[CrossRef] [PubMed]

T. Tamaki, W. Watanabe, J. Nishii, K. Itoh, Jpn. J. Appl. Phys. 44, L687 (2005).
[CrossRef]

Werth, A.

A. Horn, I. Mingareev, A. Werth, J. Laser Micro/ Nanoeng. 3, 114 (2008).
[CrossRef]

Wollenhaupt, M.

Yoshino, F.

Zhang, H.

Zhou, P.

V. V. Temnov, K. Sokolowski-Tinten, P. Zhou, A. El-Khamhawy, D. von der Linde, Phys. Rev. Lett. 97, 237403 (2006).
[CrossRef]

AIP Conf.Proc. (1)

S. Guizard, N. Fedorov, A. Mouskeftaras, S. Klimentov, AIP Conf.Proc. 1278, 336 (2010).
[CrossRef]

Appl. Phys. A (2)

K. Sugioka, Y. Cheng, K. Midorikawa, Appl. Phys. A 81, 1 (2005).
[CrossRef]

S. S. Mao, F. Quere, S. Guizard, X. Mao, R. E. Russo, G. Petite, P. Martin, Appl. Phys. A 79, 1695 (2004).
[CrossRef]

Appl. Phys. Lett. (1)

R. Stoian, M. Boyle, A. Thoss, A. Rosenfeld, G. Korn, I. V. Hertel, E. E. B. Campbell, Appl. Phys. Lett. 80, 353 (2002).
[CrossRef]

Europhys. Lett. (1)

F. Quéré, S. Guizard, Ph. Martin, Europhys. Lett. 56, 138 (2001).
[CrossRef]

J. Laser Micro/Nanoeng. (1)

M. Wollenhaupt, L. Englert, A. Horn, T. Baumert, J. Laser Micro/Nanoeng. 4, 144 (2009).
[CrossRef]

J. Appl. Phys. (1)

M. Shimizu, M. Sakakura, M. Ohnishi, Y. Shimotsuma, T. Nakaya, K. Miura, K. Hirao, J. Appl. Phys. 108, 073533 (2010).
[CrossRef]

J. Laser Micro/ Nanoeng. (2)

I. Miyamoto, A. Horn, J. Gottmann, J. Laser Micro/ Nanoeng. 2, 7 (2007).
[CrossRef]

A. Horn, I. Mingareev, A. Werth, J. Laser Micro/ Nanoeng. 3, 114 (2008).
[CrossRef]

Jpn. J. Appl. Phys. (1)

T. Tamaki, W. Watanabe, J. Nishii, K. Itoh, Jpn. J. Appl. Phys. 44, L687 (2005).
[CrossRef]

Laser Photon. Rev. (1)

K. Sugioka, Y. Hanada, K. Midorikawa, Laser Photon. Rev. 4, 386 (2010).
[CrossRef]

Opt. Express (4)

Phys. Rev. B (1)

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, M. D. Perry, Phys. Rev. B 53, 1749 (1996).
[CrossRef]

Phys. Rev. Lett. (1)

V. V. Temnov, K. Sokolowski-Tinten, P. Zhou, A. El-Khamhawy, D. von der Linde, Phys. Rev. Lett. 97, 237403 (2006).
[CrossRef]

Other (1)

A. Huang, S. W. Jansen, W. W. Hansen, L. F. Steffeney, H. Helvajian, in Small Satellites: Past, Present, and Future, H. Helvajian and S. W. Jansen, eds. (The Aerospace Press, 2008), pp. 559–593.

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Figures (4)

Fig. 1
Fig. 1

Proposed mechanism of free electron generation by double-pulse irradiation of ultrafast laser beams.

Fig. 2
Fig. 2

Schematic illustration of the experimental setup used for microwelding photostructurable glass substrates by irradiation of double-pulse train.

Fig. 3
Fig. 3

Optical microscope images of laser-exposed regions. The laser beams with double-pulse train (first pulse: p-polarization, second pulse: s-polarization) were focused at the same spot for 0.1 s at three different delay times of 1, 5 and 10 ps (a)–(c). For comparison, the sample prepared by single-pulse train of p-polarized beam was also shown (d).

Fig. 4
Fig. 4

Dependence of bonding strength on the delay time (a delay time of 0 ps corresponds to the sample prepared using a single-pulse train).

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