We introduce the characteristics of the titanium dioxide inorganic film deposited by rf magnetron sputtering for liquid crystal display applications. The films demonstrated vertical alignment (VA) of the liquid crystals (LCs) obtained by using ion-beam (IB) bombardment. As observed by using x-ray photoelectron spectroscopy, the chemical structure of the was changed by IB bombardment, altering the Ti–O bonding of the Ti spectra to lower intensity levels. Breaking Ti–O bonding by IB bombardment created pretilt angles between the film and LC molecules. The better voltage-transmittance characteristics of the VA LCDs based on film were measured and compared with the same characteristics of polyimide film.
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