Abstract

The transmission phase grating on anodic alumina membrane (AAM) was fabricated by a lithography and chemical etching method to demonstrate the feasibility of fabricating diffractive optical elements on AAM matrix. The monochromatic light diffraction property of the sample grating was tested using lasers with wavelengths of 532 and 650 nm, respectively. The measured diffraction efficiencies of zeroth and first orders were in good agreement with the calculated results. This method may offer an approach to prepare surface pattern on alumina and could be used in fabricating diffractive optical components such as linear gratings.

© 2010 Optical Society of America

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References

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2008 (1)

2007 (1)

H. Gao, M. Ouyang, Y. Wang, Y. Shen, J. Zhou, and D. Liu, Optik (Stuttgart) 118, 452 (2007).
[CrossRef]

2004 (1)

2001 (2)

1999 (1)

1994 (1)

C. R. Martin, Science 266, 1961 (1994).
[CrossRef] [PubMed]

1988 (1)

1977 (1)

H. Dammann and E. Klotz, Opt. Acta 24, 505 (1977).
[CrossRef]

1953 (1)

F. Keller, M. S. Hunter, and D. L. Robinson, J. Electrochem. Soc. 100, 411 (1953).
[CrossRef]

Baggett, B.

Craighead, H. G.

Dammann, H.

H. Dammann and E. Klotz, Opt. Acta 24, 505 (1977).
[CrossRef]

Delaney, W. F.

Gao, H.

H. Gao, M. Ouyang, Y. Wang, Y. Shen, J. Zhou, and D. Liu, Optik (Stuttgart) 118, 452 (2007).
[CrossRef]

Hasegawa, K.

Hatano, T.

Hunter, M. S.

F. Keller, M. S. Hunter, and D. L. Robinson, J. Electrochem. Soc. 100, 411 (1953).
[CrossRef]

Johnson, E. G.

Kasa, H.

Keller, F.

F. Keller, M. S. Hunter, and D. L. Robinson, J. Electrochem. Soc. 100, 411 (1953).
[CrossRef]

Kintaka, K.

Klotz, E.

H. Dammann and E. Klotz, Opt. Acta 24, 505 (1977).
[CrossRef]

Koehler, C.

Liu, D.

H. Gao, M. Ouyang, Y. Wang, Y. Shen, J. Zhou, and D. Liu, Optik (Stuttgart) 118, 452 (2007).
[CrossRef]

Lohmann, A. W.

Lopez, A. G.

Martin, C. R.

C. R. Martin, Science 266, 1961 (1994).
[CrossRef] [PubMed]

Mori, T.

Nakazawa, T.

Nishii, J.

Omori, S.

S. Omori, Opt. Rev. 8, 254 (2001).
[CrossRef]

Ouyang, M.

H. Gao, M. Ouyang, Y. Wang, Y. Shen, J. Zhou, and D. Liu, Optik (Stuttgart) 118, 452 (2007).
[CrossRef]

Robinson, D. L.

F. Keller, M. S. Hunter, and D. L. Robinson, J. Electrochem. Soc. 100, 411 (1953).
[CrossRef]

Schwider, J.

Shen, Y.

H. Gao, M. Ouyang, Y. Wang, Y. Shen, J. Zhou, and D. Liu, Optik (Stuttgart) 118, 452 (2007).
[CrossRef]

Streibl, N.

Suleski, T. J.

Thomas, J. A.

Wang, Y.

H. Gao, M. Ouyang, Y. Wang, Y. Shen, J. Zhou, and D. Liu, Optik (Stuttgart) 118, 452 (2007).
[CrossRef]

Zhou, J.

H. Gao, M. Ouyang, Y. Wang, Y. Shen, J. Zhou, and D. Liu, Optik (Stuttgart) 118, 452 (2007).
[CrossRef]

Appl. Opt. (3)

J. Electrochem. Soc. (1)

F. Keller, M. S. Hunter, and D. L. Robinson, J. Electrochem. Soc. 100, 411 (1953).
[CrossRef]

Opt. Acta (1)

H. Dammann and E. Klotz, Opt. Acta 24, 505 (1977).
[CrossRef]

Opt. Lett. (2)

Opt. Rev. (1)

S. Omori, Opt. Rev. 8, 254 (2001).
[CrossRef]

Optik (Stuttgart) (1)

H. Gao, M. Ouyang, Y. Wang, Y. Shen, J. Zhou, and D. Liu, Optik (Stuttgart) 118, 452 (2007).
[CrossRef]

Science (1)

C. R. Martin, Science 266, 1961 (1994).
[CrossRef] [PubMed]

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Figures (4)

Fig. 1
Fig. 1

Schematic illustration of the fabrication process for the surface pattern on the AAM.

Fig. 2
Fig. 2

FE-SEM image of phase grating on the AAM: (a) low magnification and (b) high magnification image of patterned AAM surface, (c) cross section of the patterned AAM sample; the inset is the high magnification image of the boxed area.

Fig. 3
Fig. 3

Measured and calculated diffraction efficiency of zeroth and first orders for 10 μ m period phase grating on the AAM under normal incidence with laser wavelengths of (a) 532 nm and (b) 650 nm. The insets in (a) and (b) are the optical images of laser diffraction patterns generated by phase grating on the AAM.

Fig. 4
Fig. 4

FE-SEM image of checkerboard phase grating on the AAM: (a) low magnification and (b) high magnification image of checkerboard patterned AAM of boxed area, (c) optical image of laser diffraction pattern generated by checkerboard phase grating on the AAM; the wavelength of incident laser was 532 nm.

Equations (2)

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I 0   peak = L 2 cos 2 ( Δ φ / 2 ) ,     I 1   peak = L 2   sin   c 2 ( 1 / 2 ) sin 2 ( Δ φ / 2 ) ,
k π + π 4 < π w ( n 1 n 2 ) λ < k π + 3 π 4 .

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