Abstract

Optical fiber interferometry holds many advantages for the online measurement of high-precision surfaces. Here, a fiber interferometer with a wavelength-scanning probe is reported. Such an interferometer requires active stabilization against the effects of temperature drift and vibration. A method of multiplexing dual wavelengths into the same fiber, combined with rapid phase shifting and real-time phase calculation, is investigated. Experimental data show the successful stabilization of the interferometer regardless of environmental perturbation.

© 2010 Optical Society of America

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References

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  1. L. Singleton, R. Leach, A. Lewis, and Z. Cui, MEMSTAND Project IST-2001-37682 (2002).
  2. D. Jackson, R. Priest, A. Dandridge, and A. Tveten, Appl. Opt. 19, 2926 (1980).
    [CrossRef] [PubMed]
  3. I. Kaminow, IEEE J. Quantum Electron. 17, 15 (1981).
    [CrossRef]
  4. A. Kersey, M. Marrone, and A. Dandridge, J. Lightwave Technol. 8, 838 (1990).
    [CrossRef]
  5. K. Creath, in Progress in Optics XXVI, E.Wolf, ed. (Elsevier, 1998).
  6. J. Schwider, R. Burow, K. Elssner, J. Grzanna, R. Spolaczyk, and K. Merkel, Appl. Opt. 22, 3421 (1983).
    [CrossRef] [PubMed]

1990 (1)

A. Kersey, M. Marrone, and A. Dandridge, J. Lightwave Technol. 8, 838 (1990).
[CrossRef]

1983 (1)

1981 (1)

I. Kaminow, IEEE J. Quantum Electron. 17, 15 (1981).
[CrossRef]

1980 (1)

Burow, R.

Creath, K.

K. Creath, in Progress in Optics XXVI, E.Wolf, ed. (Elsevier, 1998).

Cui, Z.

L. Singleton, R. Leach, A. Lewis, and Z. Cui, MEMSTAND Project IST-2001-37682 (2002).

Dandridge, A.

A. Kersey, M. Marrone, and A. Dandridge, J. Lightwave Technol. 8, 838 (1990).
[CrossRef]

D. Jackson, R. Priest, A. Dandridge, and A. Tveten, Appl. Opt. 19, 2926 (1980).
[CrossRef] [PubMed]

Elssner, K.

Grzanna, J.

Jackson, D.

Kaminow, I.

I. Kaminow, IEEE J. Quantum Electron. 17, 15 (1981).
[CrossRef]

Kersey, A.

A. Kersey, M. Marrone, and A. Dandridge, J. Lightwave Technol. 8, 838 (1990).
[CrossRef]

Leach, R.

L. Singleton, R. Leach, A. Lewis, and Z. Cui, MEMSTAND Project IST-2001-37682 (2002).

Lewis, A.

L. Singleton, R. Leach, A. Lewis, and Z. Cui, MEMSTAND Project IST-2001-37682 (2002).

Marrone, M.

A. Kersey, M. Marrone, and A. Dandridge, J. Lightwave Technol. 8, 838 (1990).
[CrossRef]

Merkel, K.

Priest, R.

Schwider, J.

Singleton, L.

L. Singleton, R. Leach, A. Lewis, and Z. Cui, MEMSTAND Project IST-2001-37682 (2002).

Spolaczyk, R.

Tveten, A.

Appl. Opt. (2)

IEEE J. Quantum Electron. (1)

I. Kaminow, IEEE J. Quantum Electron. 17, 15 (1981).
[CrossRef]

J. Lightwave Technol. (1)

A. Kersey, M. Marrone, and A. Dandridge, J. Lightwave Technol. 8, 838 (1990).
[CrossRef]

Other (2)

K. Creath, in Progress in Optics XXVI, E.Wolf, ed. (Elsevier, 1998).

L. Singleton, R. Leach, A. Lewis, and Z. Cui, MEMSTAND Project IST-2001-37682 (2002).

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Figures (4)

Fig. 1
Fig. 1

Experimental apparatus.

Fig. 2
Fig. 2

Drift seen in the stabilized/free-running reference interferometer.

Fig. 3
Fig. 3

Histograms of stabilized-measurement interferometer values.

Fig. 4
Fig. 4

Profile measurement of a step height from a (a) Taylor Hobson CCI and (b) a multiplexed fiber interferometer.

Equations (2)

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I ( t ) = I ref ( t ) + I sen ( t ) + V ( t ) I ref ( t ) I sen ( t ) cos [ φ + ϵ ( t ) ] ,
φ = tan 1 2 ( I 2 I 4 ) I 1 2 I 3 + I 5 ,

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