Abstract

An efficient coupler between a dielectric waveguide and a plasmonic metal–insulator–metal (MIM) waveguide is proposed, modeled, fabricated, and characterized. Based on the platform of a silicon slot waveguide, a quasi-MIM plasmonic junction is formed via e-beam lithography and lift-off process. Coupling efficiency between the silicon slot waveguide and plasmonic waveguide up to 43% is obtained after normalizing to reference waveguides at 1550nm. This coupling scheme can be potentially used for fast optical switching and small-footprint optical modulation.

© 2010 Optical Society of America

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