Abstract

Using a $\mathrm{K}{\mathrm{Be}}_2\mathrm{B}{\mathrm{O}}_3{\mathrm{F}}_2$ prism-coupled device, we have realized the high-average-power output in the wide range from $170\text{to}232.5\mathrm{nm}$ by second-harmonic generation of a frequency-doubled Ti:sapphire laser. The output power in the UV from $175\text{to}232.5\mathrm{nm}$ exceeds $2\mathrm{mW}$, the highest power being $119.8\mathrm{mW}$ at $202.5\mathrm{nm}$. Moreover, tunable output powers above $100\mathrm{mW}$ have also been obtained for deep-UV light from $193.5\text{to}200\mathrm{nm}$.

© 2009 Optical Society of America

High-average-power light source below 200 nm from a KBe₂BO₃F₂ prism-coupled device

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