Abstract

In this Letter, a near-field optical excitation of gap modes in a metal particle-surface system for patterning periodic nanostructure is proposed and numerically demonstrated using the finite-difference time-domain method. It is observed that high-density sub-30nm periodic structures were achievable by employing an aluminium nanosphere-silver surface system. A 2D resist profile cross section using the modified cellular automata model, which was obtained through this proposed configuration, is also presented.

© 2009 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Plasmonic interference nanolithography with a double-layer planar silver lens structure

Beibei Zeng, Xufeng Yang, Changtao Wang, and Xiangang Luo
Opt. Express 17(19) 16783-16791 (2009)

Large-area surface-plasmon polariton interference lithography

Xiaowei Guo, Jinglei Du, Yongkang Guo, and Jun Yao
Opt. Lett. 31(17) 2613-2615 (2006)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription