Abstract

We present the design, fabrication, and characterization of an ultracompact silicon-on-insulator-based echelle grating triplexer. It is based on the cross-order design, which utilizes different diffraction orders to cover a large spectral range from 1.3to1.5μm with three channels located at 1310, 1490, and 1550nm and with a footprint of 150μm×130μm.

© 2009 Optical Society of America

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  1. S. Park, C. Lee, K. Jeong, H. Park, J. Ahn, and K. Song, J. Lightwave Technol. 22, 2582 (2004).
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    [CrossRef]
  4. S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C. Kung, J. Fong, J. Yin, and M. Asghari, IEEE Photon. Technol. Lett. 18, 2392 (2006).
    [CrossRef]
  5. C. Xu, X. Hong, and W. Huang, Opt. Express 14, 4675 (2006).
    [CrossRef] [PubMed]
  6. Y. Shi, D. Dai, and S. He, IEEE Photon. Technol. Lett. 18, 2293 (2006).
    [CrossRef]
  7. M. Hutley, Diffraction Gratings (Academic, 1982).
  8. C. Cremer, G. Ebbinghaus, G. Heise, R. Muller, M. Schienle, and L. Stoll, Appl. Phys. Lett. 59, 627 (1991).
    [CrossRef]
  9. T. Lang, J. He, and S. He, IEEE Photon. Technol. Lett. 18, 232 (2006).
    [CrossRef]
  10. L. Wosinski, L. Liu, M. Dainese, and D. Dai, in Proceedings of the 13th European Conference on Integrated Optics, ECIO 2007 (2007).
  11. J. Brouckaert, W. Bogaerts, P. Dumon, D. Van Thourhout, and R. Baets, J. Lightwave Technol. 25, 1269 (2007).
    [CrossRef]
  12. S. Scheerlinck, J. Schrauwen, F. Laere, D. Taillaert, D. Thourhout, and R. Baets, Opt. Express 15, 9625 (2007).
    [CrossRef] [PubMed]
  13. V. Almeida, R. Panepucci, and M. Lipson, in Conference on Lasers and Electro-Optics, CLEO 2003 (Optical Society America, 2003), paper CWP1.
  14. N. Zhu, J. Song, L. Wosinski, and S. He, Proc. SPIE 7134, 71340V (2008).

2008 (1)

N. Zhu, J. Song, L. Wosinski, and S. He, Proc. SPIE 7134, 71340V (2008).

2007 (3)

2006 (5)

T. Lang, J. He, and S. He, IEEE Photon. Technol. Lett. 18, 232 (2006).
[CrossRef]

H. Imam, J. Rasmussen, and M. Pearson, Proc. SPIE 6124, 612412 (2006).
[CrossRef]

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C. Kung, J. Fong, J. Yin, and M. Asghari, IEEE Photon. Technol. Lett. 18, 2392 (2006).
[CrossRef]

Y. Shi, D. Dai, and S. He, IEEE Photon. Technol. Lett. 18, 2293 (2006).
[CrossRef]

C. Xu, X. Hong, and W. Huang, Opt. Express 14, 4675 (2006).
[CrossRef] [PubMed]

2005 (1)

X. Li, G. Zhou, N. Feng, and W. Huang, IEEE Photon. Technol. Lett. 17, 1214 (2005).
[CrossRef]

2004 (1)

2003 (1)

V. Almeida, R. Panepucci, and M. Lipson, in Conference on Lasers and Electro-Optics, CLEO 2003 (Optical Society America, 2003), paper CWP1.

1991 (1)

C. Cremer, G. Ebbinghaus, G. Heise, R. Muller, M. Schienle, and L. Stoll, Appl. Phys. Lett. 59, 627 (1991).
[CrossRef]

1982 (1)

M. Hutley, Diffraction Gratings (Academic, 1982).

Ahn, J.

Almeida, V.

V. Almeida, R. Panepucci, and M. Lipson, in Conference on Lasers and Electro-Optics, CLEO 2003 (Optical Society America, 2003), paper CWP1.

Asghari, M.

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C. Kung, J. Fong, J. Yin, and M. Asghari, IEEE Photon. Technol. Lett. 18, 2392 (2006).
[CrossRef]

Baets, R.

Balakrishnan, A.

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C. Kung, J. Fong, J. Yin, and M. Asghari, IEEE Photon. Technol. Lett. 18, 2392 (2006).
[CrossRef]

Bidnyk, S.

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C. Kung, J. Fong, J. Yin, and M. Asghari, IEEE Photon. Technol. Lett. 18, 2392 (2006).
[CrossRef]

Bogaerts, W.

Brouckaert, J.

Cremer, C.

C. Cremer, G. Ebbinghaus, G. Heise, R. Muller, M. Schienle, and L. Stoll, Appl. Phys. Lett. 59, 627 (1991).
[CrossRef]

Dai, D.

L. Wosinski, L. Liu, M. Dainese, and D. Dai, in Proceedings of the 13th European Conference on Integrated Optics, ECIO 2007 (2007).

Y. Shi, D. Dai, and S. He, IEEE Photon. Technol. Lett. 18, 2293 (2006).
[CrossRef]

Dainese, M.

L. Wosinski, L. Liu, M. Dainese, and D. Dai, in Proceedings of the 13th European Conference on Integrated Optics, ECIO 2007 (2007).

Dumon, P.

Ebbinghaus, G.

C. Cremer, G. Ebbinghaus, G. Heise, R. Muller, M. Schienle, and L. Stoll, Appl. Phys. Lett. 59, 627 (1991).
[CrossRef]

Feng, D.

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C. Kung, J. Fong, J. Yin, and M. Asghari, IEEE Photon. Technol. Lett. 18, 2392 (2006).
[CrossRef]

Feng, N.

X. Li, G. Zhou, N. Feng, and W. Huang, IEEE Photon. Technol. Lett. 17, 1214 (2005).
[CrossRef]

Fong, J.

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C. Kung, J. Fong, J. Yin, and M. Asghari, IEEE Photon. Technol. Lett. 18, 2392 (2006).
[CrossRef]

Gao, M.

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C. Kung, J. Fong, J. Yin, and M. Asghari, IEEE Photon. Technol. Lett. 18, 2392 (2006).
[CrossRef]

He, J.

T. Lang, J. He, and S. He, IEEE Photon. Technol. Lett. 18, 232 (2006).
[CrossRef]

He, S.

N. Zhu, J. Song, L. Wosinski, and S. He, Proc. SPIE 7134, 71340V (2008).

T. Lang, J. He, and S. He, IEEE Photon. Technol. Lett. 18, 232 (2006).
[CrossRef]

Y. Shi, D. Dai, and S. He, IEEE Photon. Technol. Lett. 18, 2293 (2006).
[CrossRef]

Heise, G.

C. Cremer, G. Ebbinghaus, G. Heise, R. Muller, M. Schienle, and L. Stoll, Appl. Phys. Lett. 59, 627 (1991).
[CrossRef]

Hong, X.

Huang, W.

C. Xu, X. Hong, and W. Huang, Opt. Express 14, 4675 (2006).
[CrossRef] [PubMed]

X. Li, G. Zhou, N. Feng, and W. Huang, IEEE Photon. Technol. Lett. 17, 1214 (2005).
[CrossRef]

Hutley, M.

M. Hutley, Diffraction Gratings (Academic, 1982).

Imam, H.

H. Imam, J. Rasmussen, and M. Pearson, Proc. SPIE 6124, 612412 (2006).
[CrossRef]

Jeong, K.

Kung, C.

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C. Kung, J. Fong, J. Yin, and M. Asghari, IEEE Photon. Technol. Lett. 18, 2392 (2006).
[CrossRef]

Laere, F.

Lang, T.

T. Lang, J. He, and S. He, IEEE Photon. Technol. Lett. 18, 232 (2006).
[CrossRef]

Lee, C.

Li, X.

X. Li, G. Zhou, N. Feng, and W. Huang, IEEE Photon. Technol. Lett. 17, 1214 (2005).
[CrossRef]

Liang, H.

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C. Kung, J. Fong, J. Yin, and M. Asghari, IEEE Photon. Technol. Lett. 18, 2392 (2006).
[CrossRef]

Lipson, M.

V. Almeida, R. Panepucci, and M. Lipson, in Conference on Lasers and Electro-Optics, CLEO 2003 (Optical Society America, 2003), paper CWP1.

Liu, L.

L. Wosinski, L. Liu, M. Dainese, and D. Dai, in Proceedings of the 13th European Conference on Integrated Optics, ECIO 2007 (2007).

Muller, R.

C. Cremer, G. Ebbinghaus, G. Heise, R. Muller, M. Schienle, and L. Stoll, Appl. Phys. Lett. 59, 627 (1991).
[CrossRef]

Panepucci, R.

V. Almeida, R. Panepucci, and M. Lipson, in Conference on Lasers and Electro-Optics, CLEO 2003 (Optical Society America, 2003), paper CWP1.

Park, H.

Park, S.

Pearson, M.

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C. Kung, J. Fong, J. Yin, and M. Asghari, IEEE Photon. Technol. Lett. 18, 2392 (2006).
[CrossRef]

H. Imam, J. Rasmussen, and M. Pearson, Proc. SPIE 6124, 612412 (2006).
[CrossRef]

Qian, W.

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C. Kung, J. Fong, J. Yin, and M. Asghari, IEEE Photon. Technol. Lett. 18, 2392 (2006).
[CrossRef]

Rasmussen, J.

H. Imam, J. Rasmussen, and M. Pearson, Proc. SPIE 6124, 612412 (2006).
[CrossRef]

Scheerlinck, S.

Schienle, M.

C. Cremer, G. Ebbinghaus, G. Heise, R. Muller, M. Schienle, and L. Stoll, Appl. Phys. Lett. 59, 627 (1991).
[CrossRef]

Schrauwen, J.

Shi, Y.

Y. Shi, D. Dai, and S. He, IEEE Photon. Technol. Lett. 18, 2293 (2006).
[CrossRef]

Song, J.

N. Zhu, J. Song, L. Wosinski, and S. He, Proc. SPIE 7134, 71340V (2008).

Song, K.

Stoll, L.

C. Cremer, G. Ebbinghaus, G. Heise, R. Muller, M. Schienle, and L. Stoll, Appl. Phys. Lett. 59, 627 (1991).
[CrossRef]

Taillaert, D.

Thourhout, D.

Van Thourhout, D.

Wosinski, L.

N. Zhu, J. Song, L. Wosinski, and S. He, Proc. SPIE 7134, 71340V (2008).

L. Wosinski, L. Liu, M. Dainese, and D. Dai, in Proceedings of the 13th European Conference on Integrated Optics, ECIO 2007 (2007).

Xu, C.

Yin, J.

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C. Kung, J. Fong, J. Yin, and M. Asghari, IEEE Photon. Technol. Lett. 18, 2392 (2006).
[CrossRef]

Zhou, G.

X. Li, G. Zhou, N. Feng, and W. Huang, IEEE Photon. Technol. Lett. 17, 1214 (2005).
[CrossRef]

Zhu, N.

N. Zhu, J. Song, L. Wosinski, and S. He, Proc. SPIE 7134, 71340V (2008).

Appl. Phys. Lett. (1)

C. Cremer, G. Ebbinghaus, G. Heise, R. Muller, M. Schienle, and L. Stoll, Appl. Phys. Lett. 59, 627 (1991).
[CrossRef]

IEEE Photon. Technol. Lett. (4)

T. Lang, J. He, and S. He, IEEE Photon. Technol. Lett. 18, 232 (2006).
[CrossRef]

Y. Shi, D. Dai, and S. He, IEEE Photon. Technol. Lett. 18, 2293 (2006).
[CrossRef]

X. Li, G. Zhou, N. Feng, and W. Huang, IEEE Photon. Technol. Lett. 17, 1214 (2005).
[CrossRef]

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C. Kung, J. Fong, J. Yin, and M. Asghari, IEEE Photon. Technol. Lett. 18, 2392 (2006).
[CrossRef]

J. Lightwave Technol. (2)

Opt. Express (2)

Proc. SPIE (2)

H. Imam, J. Rasmussen, and M. Pearson, Proc. SPIE 6124, 612412 (2006).
[CrossRef]

N. Zhu, J. Song, L. Wosinski, and S. He, Proc. SPIE 7134, 71340V (2008).

Other (3)

V. Almeida, R. Panepucci, and M. Lipson, in Conference on Lasers and Electro-Optics, CLEO 2003 (Optical Society America, 2003), paper CWP1.

M. Hutley, Diffraction Gratings (Academic, 1982).

L. Wosinski, L. Liu, M. Dainese, and D. Dai, in Proceedings of the 13th European Conference on Integrated Optics, ECIO 2007 (2007).

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Figures (4)

Fig. 1
Fig. 1

Schematic of an EDG triplexer.

Fig. 2
Fig. 2

Simulated spectral responses around (a) 1550 and (b) 1310 nm .

Fig. 3
Fig. 3

SEM pictures of the triplexer; (a) overview, (b) grating facets.

Fig. 4
Fig. 4

Measured spectral responses of (a) all three channels for order 5 and (b) channel 3 for order 6.

Equations (1)

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n eff Λ ( sin θ i + sin θ d ) = m λ ,

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