Abstract

We demonstrate the application of nondiffracting Bessel beams for reproducible nanometric-scale feature patterning in glass. A femtosecond pulse zero-order Bessel beam with a central spot radius of 360 nm was used to write 500 nm radius nanocraters over a longitudinal positioning range exceeding 20μm, with a variation in radius of less than 10%. The use of Bessel beams significantly reduces constraints on critical sample positioning in the nanoscale writing regime, enabling the use of femtosecond pulses for fast inscription of nanometer-scale features over large sample areas.

© 2009 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhofer, G. Mourou, and A. J. Hunt, Appl. Phys. B 77, 25 (2003).
    [CrossRef]
  2. R. R. Gattass and E. Mazur, Nat. Photonics 2, 219 (2008).
    [CrossRef]
  3. C. Reinhardt, R. Kiyan, S. Passinger, A. L. Stepanov, A. Ostendorf, and B. N. Chichkov, Appl. Phys. A 89, 321 (2007).
    [CrossRef]
  4. G. Della Valle, R. Osellame, and P. Laporta, J. Opt. A 11, 013001 (2009).
    [CrossRef]
  5. D. J. Hwang, C. P. Grigoropoulos, and T. Y. Choi, J. Appl. Phys. 99, 083101 (2006).
    [CrossRef]
  6. E. Vanagas, I. Kudryashov, D. Tuzhilin, S. Juodkazis, S. Matsuo, and H. Misawa, Appl. Phys. Lett. 82, 2901 (2003).
    [CrossRef]
  7. E. McLeod and C. Arnold, Opt. Express 17, 3640 (2009).
    [CrossRef] [PubMed]
  8. V. Zambon, N. McCarthy, and M. Piché, Proc. SPIE 7099, 70992J (2008).
    [CrossRef]
  9. D. McGloin and K. Dholakia, Contemp. Phys. 46, 15 (2005).
    [CrossRef]
  10. A. Marcinkevičius, S. Juodkazis, S. Matsuo, V. Mizeikis, and H. Misawa, Jpn. J. Appl. Phys. Part 2 40, L1197 (2001).
    [CrossRef]
  11. J. Durnin, J. Miceli, and J. H. Eberly, Phys. Rev. Lett. 58, 1499 (1987).
    [CrossRef] [PubMed]
  12. V. Jarutis, R. Paskauskas, and A. Stabinis, Opt. Commun. 184, 105 (2000).
    [CrossRef]
  13. J. Amako, D. Sawaki, and E. Fujii, J. Opt. Soc. Am. B 20, 2562 (2003).
    [CrossRef]
  14. J. Koch, F. Korte, C. Fallnich, A. Ostendorf, and B. N. Chichkov, Opt. Eng. 44, 051103 (2005).
    [CrossRef]
  15. Y. V. White, X. Li, Z. Sikorski, L. M. Davis, and W. Hofmeister, Opt. Express 16, 14411 (2008).
    [CrossRef] [PubMed]
  16. S. I. Kudryashov, G. Mourou, A. Joglekar, J. F. Herbstman, and A. J. Hunt, Appl. Phys. Lett. 91, 141111 (2007).
    [CrossRef]
  17. R. Grunwald, M. Bock, V. Kebbel, S. Huferath, U. Neumann, G. Steinmeyer, G. Stibenz, J.-L. Néron, and M. Piché, Opt. Express 16, 1077 (2008).
    [CrossRef] [PubMed]

2009 (2)

G. Della Valle, R. Osellame, and P. Laporta, J. Opt. A 11, 013001 (2009).
[CrossRef]

E. McLeod and C. Arnold, Opt. Express 17, 3640 (2009).
[CrossRef] [PubMed]

2008 (4)

2007 (2)

C. Reinhardt, R. Kiyan, S. Passinger, A. L. Stepanov, A. Ostendorf, and B. N. Chichkov, Appl. Phys. A 89, 321 (2007).
[CrossRef]

S. I. Kudryashov, G. Mourou, A. Joglekar, J. F. Herbstman, and A. J. Hunt, Appl. Phys. Lett. 91, 141111 (2007).
[CrossRef]

2006 (1)

D. J. Hwang, C. P. Grigoropoulos, and T. Y. Choi, J. Appl. Phys. 99, 083101 (2006).
[CrossRef]

2005 (2)

D. McGloin and K. Dholakia, Contemp. Phys. 46, 15 (2005).
[CrossRef]

J. Koch, F. Korte, C. Fallnich, A. Ostendorf, and B. N. Chichkov, Opt. Eng. 44, 051103 (2005).
[CrossRef]

2003 (3)

J. Amako, D. Sawaki, and E. Fujii, J. Opt. Soc. Am. B 20, 2562 (2003).
[CrossRef]

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhofer, G. Mourou, and A. J. Hunt, Appl. Phys. B 77, 25 (2003).
[CrossRef]

E. Vanagas, I. Kudryashov, D. Tuzhilin, S. Juodkazis, S. Matsuo, and H. Misawa, Appl. Phys. Lett. 82, 2901 (2003).
[CrossRef]

2001 (1)

A. Marcinkevičius, S. Juodkazis, S. Matsuo, V. Mizeikis, and H. Misawa, Jpn. J. Appl. Phys. Part 2 40, L1197 (2001).
[CrossRef]

2000 (1)

V. Jarutis, R. Paskauskas, and A. Stabinis, Opt. Commun. 184, 105 (2000).
[CrossRef]

1987 (1)

J. Durnin, J. Miceli, and J. H. Eberly, Phys. Rev. Lett. 58, 1499 (1987).
[CrossRef] [PubMed]

Amako, J.

Arnold, C.

Bock, M.

Chichkov, B. N.

C. Reinhardt, R. Kiyan, S. Passinger, A. L. Stepanov, A. Ostendorf, and B. N. Chichkov, Appl. Phys. A 89, 321 (2007).
[CrossRef]

J. Koch, F. Korte, C. Fallnich, A. Ostendorf, and B. N. Chichkov, Opt. Eng. 44, 051103 (2005).
[CrossRef]

Choi, T. Y.

D. J. Hwang, C. P. Grigoropoulos, and T. Y. Choi, J. Appl. Phys. 99, 083101 (2006).
[CrossRef]

Davis, L. M.

Della Valle, G.

G. Della Valle, R. Osellame, and P. Laporta, J. Opt. A 11, 013001 (2009).
[CrossRef]

Dholakia, K.

D. McGloin and K. Dholakia, Contemp. Phys. 46, 15 (2005).
[CrossRef]

Durnin, J.

J. Durnin, J. Miceli, and J. H. Eberly, Phys. Rev. Lett. 58, 1499 (1987).
[CrossRef] [PubMed]

Eberly, J. H.

J. Durnin, J. Miceli, and J. H. Eberly, Phys. Rev. Lett. 58, 1499 (1987).
[CrossRef] [PubMed]

Fallnich, C.

J. Koch, F. Korte, C. Fallnich, A. Ostendorf, and B. N. Chichkov, Opt. Eng. 44, 051103 (2005).
[CrossRef]

Fujii, E.

Gattass, R. R.

R. R. Gattass and E. Mazur, Nat. Photonics 2, 219 (2008).
[CrossRef]

Grigoropoulos, C. P.

D. J. Hwang, C. P. Grigoropoulos, and T. Y. Choi, J. Appl. Phys. 99, 083101 (2006).
[CrossRef]

Grunwald, R.

Herbstman, J. F.

S. I. Kudryashov, G. Mourou, A. Joglekar, J. F. Herbstman, and A. J. Hunt, Appl. Phys. Lett. 91, 141111 (2007).
[CrossRef]

Hofmeister, W.

Huferath, S.

Hunt, A. J.

S. I. Kudryashov, G. Mourou, A. Joglekar, J. F. Herbstman, and A. J. Hunt, Appl. Phys. Lett. 91, 141111 (2007).
[CrossRef]

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhofer, G. Mourou, and A. J. Hunt, Appl. Phys. B 77, 25 (2003).
[CrossRef]

Hwang, D. J.

D. J. Hwang, C. P. Grigoropoulos, and T. Y. Choi, J. Appl. Phys. 99, 083101 (2006).
[CrossRef]

Jarutis, V.

V. Jarutis, R. Paskauskas, and A. Stabinis, Opt. Commun. 184, 105 (2000).
[CrossRef]

Joglekar, A.

S. I. Kudryashov, G. Mourou, A. Joglekar, J. F. Herbstman, and A. J. Hunt, Appl. Phys. Lett. 91, 141111 (2007).
[CrossRef]

Joglekar, A. P.

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhofer, G. Mourou, and A. J. Hunt, Appl. Phys. B 77, 25 (2003).
[CrossRef]

Juodkazis, S.

E. Vanagas, I. Kudryashov, D. Tuzhilin, S. Juodkazis, S. Matsuo, and H. Misawa, Appl. Phys. Lett. 82, 2901 (2003).
[CrossRef]

A. Marcinkevičius, S. Juodkazis, S. Matsuo, V. Mizeikis, and H. Misawa, Jpn. J. Appl. Phys. Part 2 40, L1197 (2001).
[CrossRef]

Kebbel, V.

Kiyan, R.

C. Reinhardt, R. Kiyan, S. Passinger, A. L. Stepanov, A. Ostendorf, and B. N. Chichkov, Appl. Phys. A 89, 321 (2007).
[CrossRef]

Koch, J.

J. Koch, F. Korte, C. Fallnich, A. Ostendorf, and B. N. Chichkov, Opt. Eng. 44, 051103 (2005).
[CrossRef]

Korte, F.

J. Koch, F. Korte, C. Fallnich, A. Ostendorf, and B. N. Chichkov, Opt. Eng. 44, 051103 (2005).
[CrossRef]

Kudryashov, I.

E. Vanagas, I. Kudryashov, D. Tuzhilin, S. Juodkazis, S. Matsuo, and H. Misawa, Appl. Phys. Lett. 82, 2901 (2003).
[CrossRef]

Kudryashov, S. I.

S. I. Kudryashov, G. Mourou, A. Joglekar, J. F. Herbstman, and A. J. Hunt, Appl. Phys. Lett. 91, 141111 (2007).
[CrossRef]

Laporta, P.

G. Della Valle, R. Osellame, and P. Laporta, J. Opt. A 11, 013001 (2009).
[CrossRef]

Li, X.

Liu, H.

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhofer, G. Mourou, and A. J. Hunt, Appl. Phys. B 77, 25 (2003).
[CrossRef]

Marcinkevicius, A.

A. Marcinkevičius, S. Juodkazis, S. Matsuo, V. Mizeikis, and H. Misawa, Jpn. J. Appl. Phys. Part 2 40, L1197 (2001).
[CrossRef]

Matsuo, S.

E. Vanagas, I. Kudryashov, D. Tuzhilin, S. Juodkazis, S. Matsuo, and H. Misawa, Appl. Phys. Lett. 82, 2901 (2003).
[CrossRef]

A. Marcinkevičius, S. Juodkazis, S. Matsuo, V. Mizeikis, and H. Misawa, Jpn. J. Appl. Phys. Part 2 40, L1197 (2001).
[CrossRef]

Mazur, E.

R. R. Gattass and E. Mazur, Nat. Photonics 2, 219 (2008).
[CrossRef]

McCarthy, N.

V. Zambon, N. McCarthy, and M. Piché, Proc. SPIE 7099, 70992J (2008).
[CrossRef]

McGloin, D.

D. McGloin and K. Dholakia, Contemp. Phys. 46, 15 (2005).
[CrossRef]

McLeod, E.

Meyhofer, E.

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhofer, G. Mourou, and A. J. Hunt, Appl. Phys. B 77, 25 (2003).
[CrossRef]

Miceli, J.

J. Durnin, J. Miceli, and J. H. Eberly, Phys. Rev. Lett. 58, 1499 (1987).
[CrossRef] [PubMed]

Misawa, H.

E. Vanagas, I. Kudryashov, D. Tuzhilin, S. Juodkazis, S. Matsuo, and H. Misawa, Appl. Phys. Lett. 82, 2901 (2003).
[CrossRef]

A. Marcinkevičius, S. Juodkazis, S. Matsuo, V. Mizeikis, and H. Misawa, Jpn. J. Appl. Phys. Part 2 40, L1197 (2001).
[CrossRef]

Mizeikis, V.

A. Marcinkevičius, S. Juodkazis, S. Matsuo, V. Mizeikis, and H. Misawa, Jpn. J. Appl. Phys. Part 2 40, L1197 (2001).
[CrossRef]

Mourou, G.

S. I. Kudryashov, G. Mourou, A. Joglekar, J. F. Herbstman, and A. J. Hunt, Appl. Phys. Lett. 91, 141111 (2007).
[CrossRef]

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhofer, G. Mourou, and A. J. Hunt, Appl. Phys. B 77, 25 (2003).
[CrossRef]

Néron, J. -L.

Neumann, U.

Osellame, R.

G. Della Valle, R. Osellame, and P. Laporta, J. Opt. A 11, 013001 (2009).
[CrossRef]

Ostendorf, A.

C. Reinhardt, R. Kiyan, S. Passinger, A. L. Stepanov, A. Ostendorf, and B. N. Chichkov, Appl. Phys. A 89, 321 (2007).
[CrossRef]

J. Koch, F. Korte, C. Fallnich, A. Ostendorf, and B. N. Chichkov, Opt. Eng. 44, 051103 (2005).
[CrossRef]

Paskauskas, R.

V. Jarutis, R. Paskauskas, and A. Stabinis, Opt. Commun. 184, 105 (2000).
[CrossRef]

Passinger, S.

C. Reinhardt, R. Kiyan, S. Passinger, A. L. Stepanov, A. Ostendorf, and B. N. Chichkov, Appl. Phys. A 89, 321 (2007).
[CrossRef]

Piché, M.

Reinhardt, C.

C. Reinhardt, R. Kiyan, S. Passinger, A. L. Stepanov, A. Ostendorf, and B. N. Chichkov, Appl. Phys. A 89, 321 (2007).
[CrossRef]

Sawaki, D.

Sikorski, Z.

Spooner, G. J.

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhofer, G. Mourou, and A. J. Hunt, Appl. Phys. B 77, 25 (2003).
[CrossRef]

Stabinis, A.

V. Jarutis, R. Paskauskas, and A. Stabinis, Opt. Commun. 184, 105 (2000).
[CrossRef]

Steinmeyer, G.

Stepanov, A. L.

C. Reinhardt, R. Kiyan, S. Passinger, A. L. Stepanov, A. Ostendorf, and B. N. Chichkov, Appl. Phys. A 89, 321 (2007).
[CrossRef]

Stibenz, G.

Tuzhilin, D.

E. Vanagas, I. Kudryashov, D. Tuzhilin, S. Juodkazis, S. Matsuo, and H. Misawa, Appl. Phys. Lett. 82, 2901 (2003).
[CrossRef]

Vanagas, E.

E. Vanagas, I. Kudryashov, D. Tuzhilin, S. Juodkazis, S. Matsuo, and H. Misawa, Appl. Phys. Lett. 82, 2901 (2003).
[CrossRef]

White, Y. V.

Zambon, V.

V. Zambon, N. McCarthy, and M. Piché, Proc. SPIE 7099, 70992J (2008).
[CrossRef]

Appl. Phys. A (1)

C. Reinhardt, R. Kiyan, S. Passinger, A. L. Stepanov, A. Ostendorf, and B. N. Chichkov, Appl. Phys. A 89, 321 (2007).
[CrossRef]

Appl. Phys. B (1)

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhofer, G. Mourou, and A. J. Hunt, Appl. Phys. B 77, 25 (2003).
[CrossRef]

Appl. Phys. Lett. (2)

E. Vanagas, I. Kudryashov, D. Tuzhilin, S. Juodkazis, S. Matsuo, and H. Misawa, Appl. Phys. Lett. 82, 2901 (2003).
[CrossRef]

S. I. Kudryashov, G. Mourou, A. Joglekar, J. F. Herbstman, and A. J. Hunt, Appl. Phys. Lett. 91, 141111 (2007).
[CrossRef]

Contemp. Phys. (1)

D. McGloin and K. Dholakia, Contemp. Phys. 46, 15 (2005).
[CrossRef]

J. Appl. Phys. (1)

D. J. Hwang, C. P. Grigoropoulos, and T. Y. Choi, J. Appl. Phys. 99, 083101 (2006).
[CrossRef]

J. Opt. A (1)

G. Della Valle, R. Osellame, and P. Laporta, J. Opt. A 11, 013001 (2009).
[CrossRef]

J. Opt. Soc. Am. B (1)

Jpn. J. Appl. Phys. Part 2 (1)

A. Marcinkevičius, S. Juodkazis, S. Matsuo, V. Mizeikis, and H. Misawa, Jpn. J. Appl. Phys. Part 2 40, L1197 (2001).
[CrossRef]

Nat. Photonics (1)

R. R. Gattass and E. Mazur, Nat. Photonics 2, 219 (2008).
[CrossRef]

Opt. Commun. (1)

V. Jarutis, R. Paskauskas, and A. Stabinis, Opt. Commun. 184, 105 (2000).
[CrossRef]

Opt. Eng. (1)

J. Koch, F. Korte, C. Fallnich, A. Ostendorf, and B. N. Chichkov, Opt. Eng. 44, 051103 (2005).
[CrossRef]

Opt. Express (3)

Phys. Rev. Lett. (1)

J. Durnin, J. Miceli, and J. H. Eberly, Phys. Rev. Lett. 58, 1499 (1987).
[CrossRef] [PubMed]

Proc. SPIE (1)

V. Zambon, N. McCarthy, and M. Piché, Proc. SPIE 7099, 70992J (2008).
[CrossRef]

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (3)

Fig. 1
Fig. 1

Comparison of the on-axis intensity evolution along the propagation direction for Gaussian (dashed–dotted curve) and Bessel [solid curve, from Eq. (2)] beams with an identical spot radius of 360 nm. The experimental values are shown as open circles. Inset, image of the experimental beam. The central spot radius is 360 nm at half-maximum.

Fig. 2
Fig. 2

Experimental setup: SLM, spatial light modulator; S, optical shutter; MO, microscope objective; L, lens.

Fig. 3
Fig. 3

Dependence of the mean crater radius drilled by single shot femtosecond laser pulses on a distance along the propagation direction of the Bessel beam. Insets correspond to SEM images at data points A and B. The morphology of craters over the position range of 10 30 μ m is near identical to image B.

Equations (2)

Equations on this page are rendered with MathJax. Learn more.

E ( ρ , z ) = e j β z J 0 ( k t ρ ) ,
I ( z ) = 2 π I 0 z γ 2   exp ( 2 γ 2 z 2 / w 0 2 )     for   z > 0.

Metrics