Abstract

Optical coating degradation under laser irradiation can take several forms. Perhaps the most common that is not due to particulates is thermal breakdown, caused by heating of the coating to a catastrophic failure induced by local melting, delamination, evaporation, or some other change. We demonstrate that micromachined dielectric membranes show strong differences in their hydroxyl signatures as measured by Fourier-transform IR spectroscopy. The changes correspond to regions of high fluence (3200Jcm2) from a Nd:YAG laser. It is found that the absorption peaks associated with OH decrease after laser treatment, indicating a reduction in the number of film hydroxyl groups.

© 2009 Optical Society of America

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[CrossRef]

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H. Endoh, K. Miyamoto, Y. Hiwatashi, and T. Hoshimiya, Jpn. J. Appl. Phys. Part 1 41, 3361 (2002).
[CrossRef]

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C. M. Parler, J. A. Ritter, and M. D. Amiridis, J. Non-Cryst. Solids 279, 119 (2001).
[CrossRef]

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D. Rats, J. von Stebut, and F. Augereau, Thin Solid Films 355-356, 347 (1999).
[CrossRef]

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1997

1995

1994

1985

Amiridis, M. D.

C. M. Parler, J. A. Ritter, and M. D. Amiridis, J. Non-Cryst. Solids 279, 119 (2001).
[CrossRef]

Augereau, F.

D. Rats, J. von Stebut, and F. Augereau, Thin Solid Films 355-356, 347 (1999).
[CrossRef]

Bashkansky, M.

Bercegol, H.

Bertussi, B.

Bouchut, P.

Commandre, M.

Duncan, M.

Duncan, M. D.

During, A.

Endoh, H.

H. Endoh, K. Miyamoto, Y. Hiwatashi, and T. Hoshimiya, Jpn. J. Appl. Phys. Part 1 41, 3361 (2002).
[CrossRef]

Fossati, C.

Hiwatashi, Y.

H. Endoh, K. Miyamoto, Y. Hiwatashi, and T. Hoshimiya, Jpn. J. Appl. Phys. Part 1 41, 3361 (2002).
[CrossRef]

Hoshimiya, T.

H. Endoh, K. Miyamoto, Y. Hiwatashi, and T. Hoshimiya, Jpn. J. Appl. Phys. Part 1 41, 3361 (2002).
[CrossRef]

Jabr, S. N.

Jung, D.

J. O. Kwon, S. I. Seok, and D. Jung, J. Non-Cryst. Solids 352, 2841 (2006).
[CrossRef]

Jungling, K. C.

Kahn, M.

Kozlowski, M.

Kranenberg, C. F.

Kwon, J. O.

J. O. Kwon, S. I. Seok, and D. Jung, J. Non-Cryst. Solids 352, 2841 (2006).
[CrossRef]

Lewis, D.

Miyamoto, K.

H. Endoh, K. Miyamoto, Y. Hiwatashi, and T. Hoshimiya, Jpn. J. Appl. Phys. Part 1 41, 3361 (2002).
[CrossRef]

Natoli, J.-Y.

Parler, C. M.

C. M. Parler, J. A. Ritter, and M. D. Amiridis, J. Non-Cryst. Solids 279, 119 (2001).
[CrossRef]

Rats, D.

D. Rats, J. von Stebut, and F. Augereau, Thin Solid Films 355-356, 347 (1999).
[CrossRef]

Reintjes, J.

Ristau, D.

Ritter, J. A.

C. M. Parler, J. A. Ritter, and M. D. Amiridis, J. Non-Cryst. Solids 279, 119 (2001).
[CrossRef]

Rullier, J.-L.

Seok, S. I.

J. O. Kwon, S. I. Seok, and D. Jung, J. Non-Cryst. Solids 352, 2841 (2006).
[CrossRef]

Sheehan, L.

von Stebut, J.

D. Rats, J. von Stebut, and F. Augereau, Thin Solid Films 355-356, 347 (1999).
[CrossRef]

Welsch, E.

Wu, Z.

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Figures (3)

Fig. 1
Fig. 1

Experimental setup for laser damage test.

Fig. 2
Fig. 2

Optical microscope images of laser-damaged membranes of (a) Al 2 O 3 and (b) Y 2 O 3 .

Fig. 3
Fig. 3

FTIR spectra of (a) Al 2 O 3 and (b) Y 2 O 3 membranes, comparing damaged regions with undamaged, as indicated in Fig. 2.

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