Abstract

A supercontinuum light source was incorporated into a custom-built scanning white-light interferometer. This light source based on a Nd:YAG pumped microstructured optical fiber exhibits 1.21±0.10μm temporal coherence length. The device operation was validated by characterizing the step height on a microelectromechanical system component. The measured step height—7.027±0.020μm—agreed with results obtained by employing traditional light sources: a halogen lamp and a white light-emitting diode. The new light source features high output intensity of 2035mW, which is beneficial when measuring low-reflectivity samples. As the supercontinuum light source may be modulated at frequencies exceeding 10MHz, it holds potential for stroboscopic dynamic measurements.

© 2009 Optical Society of America

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P. de Groot and L. Deck, J. Mod. Opt. 42, 389 (1995).
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P. de Groot and L. Deck, J. Mod. Opt. 42, 389 (1995).
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J. M. Dudley, G. Genty, and S. Coen, Rev. Mod. Phys. 78, 1135 (2006).
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K. Hanhijärvi, J. Aaltonen, I. Kassamakov, K. Grigoras, L. Sainiemi, S. Franssila, and E. Hæggström, Proc. SPIE 7003, 70031S (2008).
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[CrossRef]

I. V. Kassamakov, H. Seppänen, M. Oinonen, E. Hæggström, M. Österberg, J. Aaltonen, H. Saarikko, and Z. Radivojevic, Microelectron. Eng. 84, 114 (2007).
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[CrossRef]

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I. V. Kassamakov, H. Seppänen, M. Oinonen, E. Hæggström, M. Österberg, J. Aaltonen, H. Saarikko, and Z. Radivojevic, Microelectron. Eng. 84, 114 (2007).
[CrossRef]

Sainiemi, L.

K. Hanhijärvi, J. Aaltonen, I. Kassamakov, K. Grigoras, L. Sainiemi, S. Franssila, and E. Hæggström, Proc. SPIE 7003, 70031S (2008).
[CrossRef]

Sandoz, P.

P. Sandoz, R. Devillers, and A. Plata, J. Mod. Opt. 44, 519 (1997).
[CrossRef]

Scudieri, F.

Seppänen, H.

I. V. Kassamakov, H. Seppänen, M. Oinonen, E. Hæggström, M. Österberg, J. Aaltonen, H. Saarikko, and Z. Radivojevic, Microelectron. Eng. 84, 114 (2007).
[CrossRef]

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Stentz, A. J.

Trebino, R.

Upatnieks, J.

Veillas, C.

Venzke, H.

Verriet, I.

Wang, Y.

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Windeler, R. S.

Wise, F. W.

You, J.

J. You and S. W. Kim, CIRP Ann. 57, 505 (2008).
[CrossRef]

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R. Hard, R. Zeh, and R. D. Allen, J. Cell. Sci. 23, 335 (1977).
[PubMed]

Appl. Opt. (6)

Appl. Phys. B (1)

M. Lehtonen, G. Genty, and H. Ludvigsen, Appl. Phys. B 81, 231 (2005).
[CrossRef]

ARLO (1)

L. A. J. Davis, D. R. Billson, D. A. Hutchins, and R. A. Noble, ARLO 6, 75 (2005).
[CrossRef]

CIRP Ann. (1)

J. You and S. W. Kim, CIRP Ann. 57, 505 (2008).
[CrossRef]

J. Cell. Sci. (1)

R. Hard, R. Zeh, and R. D. Allen, J. Cell. Sci. 23, 335 (1977).
[PubMed]

J. Mod. Opt. (2)

P. Sandoz, R. Devillers, and A. Plata, J. Mod. Opt. 44, 519 (1997).
[CrossRef]

P. de Groot and L. Deck, J. Mod. Opt. 42, 389 (1995).
[CrossRef]

J. Opt. Soc. Am. (1)

J. Opt. Soc. Am. A (1)

Microelectron. Eng. (1)

I. V. Kassamakov, H. Seppänen, M. Oinonen, E. Hæggström, M. Österberg, J. Aaltonen, H. Saarikko, and Z. Radivojevic, Microelectron. Eng. 84, 114 (2007).
[CrossRef]

Opt. Commun. (1)

S. Jorez, A. Cornet, and J. P. Raskin, Opt. Commun. 263, 6 (2006).
[CrossRef]

Opt. Express (3)

Opt. Lett. (2)

Proc. SPIE (1)

K. Hanhijärvi, J. Aaltonen, I. Kassamakov, K. Grigoras, L. Sainiemi, S. Franssila, and E. Hæggström, Proc. SPIE 7003, 70031S (2008).
[CrossRef]

Rev. Mod. Phys. (1)

J. M. Dudley, G. Genty, and S. Coen, Rev. Mod. Phys. 78, 1135 (2006).
[CrossRef]

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Figures (3)

Fig. 1
Fig. 1

Schematic setup of the supercontinuum interferometer. Abbreviations: aspheric collimating and focusing lenses (L1, L2), Nd:YAG crystal and absorber (Q), output coupler (L3), aspheric lens (L4), microstructured optical fiber (MOF), focusing lens (L5), beam splitter (BS), piezoelectric translation unit (PZT). The coating of the Nd:YAG at the input side reflects 1064 nm and transmits 808 nm in order to close the cavity. Inset, interferogram and intensities used in Eq. (2).

Fig. 2
Fig. 2

Comparison of light source spectra. Gaussian fit to the effective spectrum is shown. Notice the peak of the camera sensitivity at shorter wavelengths.

Fig. 3
Fig. 3

3D profile of the MEMS sample obtained with SC illumination and an interferogram of a single pixel used for surface-height calculation.

Tables (1)

Tables Icon

Table 1 Step Height Measurements Using Three Different Light Sources

Equations (2)

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l c = 2 ln 2 π ( λ 0 2 Δ λ ) ,
M 2 ( I 2 I 4 ) 2 ( I 1 I 3 ) ( I 3 I 5 ) ,

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