Abstract

Unless the fabrication error control is well treated, it easily causes overetched fabrication errors, which causes the resonant peak value deviation during the fabrication process of guided-mode resonant filters (GMRFs). Hence, the fabrication error control becomes a key point for improving the performance of GMRF. We find that, within the range of the groove depth from 93to105nm, the relationship between the overetched error and the resonant peak value deviation is nearly linear, which means that we can compensate the reflectance response deviation and reduce the resonant peak value deviation by the method of covering the layer film on the GMRF. Simulation results show that the deviation is compensated perfectly by this way.

© 2008 Optical Society of America

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  1. B. Lin, P. Li, and B. T. Cuningham, Sens. Actuators B 114, 559 (2006).
    [CrossRef]
  2. M. L. Wu, C. L. Hsu, H. C. Lan, H. I. Huang, Y. C. Liu, Z. R. Tu, C. C. Lee, J. S. Lin, C. C. Su, and J. Y. Chang, Opt. Lett. 32, 1614 (2007).
    [CrossRef] [PubMed]
  3. Y. Ding and R. Magnusson, Opt. Express 12, 5661 (2004).
    [CrossRef] [PubMed]
  4. J. Y. Ma, S. J. Liu, D. W. Zhang, J. K. Yao, C. Xu, J. D. Shao, Y. X. Jin, and Z. X. Fan, J. Opt. A 10, 025302 (2008).
    [CrossRef]
  5. R. Magnusson and S. S. Wang, Appl. Phys. Lett. 61, 1022 (1992).
    [CrossRef]
  6. S. S. Wang and R. Magnusson, Opt. Lett. 19, 919 (1994).
    [CrossRef] [PubMed]
  7. S. S. Wang and R. Magnusson, Appl. Opt. 34, 2414 (1995).
    [CrossRef] [PubMed]
  8. Z. S. Liu and R. Magnusson, IEEE Photon. Technol. Lett. 14, 1091 (2002).
    [CrossRef]
  9. Z. S. Wang, T. Sang, L. Wang, J. T. Zhu, Y. G. Wu, and L. Y. Chen, Appl. Phys. Lett. 88, 251115 (2006).
    [CrossRef]
  10. Z. S. Liu, S. Tibuleac, D. Shin, P. P. Young, and R. Magnusson, Opt. Lett. 23, 1556 (1998).
    [CrossRef]
  11. P. S. Priambodo and T. A. Maldonado, Appl. Phys. Lett. 83, 3248 (2003).
    [CrossRef]
  12. D. W. Dobbs, I. Gershkovich, and B. T. Cuningham, Appl. Phys. Lett. 89, 123113 (2006).
    [CrossRef]
  13. K. J. Lee and R. Magnusson, in Frontiers in Optics, OSA Technical Digest (CD) (Optical Society of America, 2007), paper JWC38.
  14. G. Niederer, M. Salt, H. P. Herzig, T. Overstolz, W. Noell, and N. F. de Rooij, in IEEE/Lasers and Electro-Optics Society International Conference Optical MEMS (IEEE, 2002), p. 99.
    [CrossRef]

2008 (1)

J. Y. Ma, S. J. Liu, D. W. Zhang, J. K. Yao, C. Xu, J. D. Shao, Y. X. Jin, and Z. X. Fan, J. Opt. A 10, 025302 (2008).
[CrossRef]

2007 (1)

2006 (3)

B. Lin, P. Li, and B. T. Cuningham, Sens. Actuators B 114, 559 (2006).
[CrossRef]

Z. S. Wang, T. Sang, L. Wang, J. T. Zhu, Y. G. Wu, and L. Y. Chen, Appl. Phys. Lett. 88, 251115 (2006).
[CrossRef]

D. W. Dobbs, I. Gershkovich, and B. T. Cuningham, Appl. Phys. Lett. 89, 123113 (2006).
[CrossRef]

2004 (1)

2003 (1)

P. S. Priambodo and T. A. Maldonado, Appl. Phys. Lett. 83, 3248 (2003).
[CrossRef]

2002 (1)

Z. S. Liu and R. Magnusson, IEEE Photon. Technol. Lett. 14, 1091 (2002).
[CrossRef]

1998 (1)

1995 (1)

1994 (1)

1992 (1)

R. Magnusson and S. S. Wang, Appl. Phys. Lett. 61, 1022 (1992).
[CrossRef]

Chang, J. Y.

Chen, L. Y.

Z. S. Wang, T. Sang, L. Wang, J. T. Zhu, Y. G. Wu, and L. Y. Chen, Appl. Phys. Lett. 88, 251115 (2006).
[CrossRef]

Cuningham, B. T.

D. W. Dobbs, I. Gershkovich, and B. T. Cuningham, Appl. Phys. Lett. 89, 123113 (2006).
[CrossRef]

B. Lin, P. Li, and B. T. Cuningham, Sens. Actuators B 114, 559 (2006).
[CrossRef]

de Rooij, N. F.

G. Niederer, M. Salt, H. P. Herzig, T. Overstolz, W. Noell, and N. F. de Rooij, in IEEE/Lasers and Electro-Optics Society International Conference Optical MEMS (IEEE, 2002), p. 99.
[CrossRef]

Ding, Y.

Dobbs, D. W.

D. W. Dobbs, I. Gershkovich, and B. T. Cuningham, Appl. Phys. Lett. 89, 123113 (2006).
[CrossRef]

Fan, Z. X.

J. Y. Ma, S. J. Liu, D. W. Zhang, J. K. Yao, C. Xu, J. D. Shao, Y. X. Jin, and Z. X. Fan, J. Opt. A 10, 025302 (2008).
[CrossRef]

Gershkovich, I.

D. W. Dobbs, I. Gershkovich, and B. T. Cuningham, Appl. Phys. Lett. 89, 123113 (2006).
[CrossRef]

Herzig, H. P.

G. Niederer, M. Salt, H. P. Herzig, T. Overstolz, W. Noell, and N. F. de Rooij, in IEEE/Lasers and Electro-Optics Society International Conference Optical MEMS (IEEE, 2002), p. 99.
[CrossRef]

Hsu, C. L.

Huang, H. I.

Jin, Y. X.

J. Y. Ma, S. J. Liu, D. W. Zhang, J. K. Yao, C. Xu, J. D. Shao, Y. X. Jin, and Z. X. Fan, J. Opt. A 10, 025302 (2008).
[CrossRef]

Lan, H. C.

Lee, C. C.

Lee, K. J.

K. J. Lee and R. Magnusson, in Frontiers in Optics, OSA Technical Digest (CD) (Optical Society of America, 2007), paper JWC38.

Li, P.

B. Lin, P. Li, and B. T. Cuningham, Sens. Actuators B 114, 559 (2006).
[CrossRef]

Lin, B.

B. Lin, P. Li, and B. T. Cuningham, Sens. Actuators B 114, 559 (2006).
[CrossRef]

Lin, J. S.

Liu, S. J.

J. Y. Ma, S. J. Liu, D. W. Zhang, J. K. Yao, C. Xu, J. D. Shao, Y. X. Jin, and Z. X. Fan, J. Opt. A 10, 025302 (2008).
[CrossRef]

Liu, Y. C.

Liu, Z. S.

Ma, J. Y.

J. Y. Ma, S. J. Liu, D. W. Zhang, J. K. Yao, C. Xu, J. D. Shao, Y. X. Jin, and Z. X. Fan, J. Opt. A 10, 025302 (2008).
[CrossRef]

Magnusson, R.

Y. Ding and R. Magnusson, Opt. Express 12, 5661 (2004).
[CrossRef] [PubMed]

Z. S. Liu and R. Magnusson, IEEE Photon. Technol. Lett. 14, 1091 (2002).
[CrossRef]

Z. S. Liu, S. Tibuleac, D. Shin, P. P. Young, and R. Magnusson, Opt. Lett. 23, 1556 (1998).
[CrossRef]

S. S. Wang and R. Magnusson, Appl. Opt. 34, 2414 (1995).
[CrossRef] [PubMed]

S. S. Wang and R. Magnusson, Opt. Lett. 19, 919 (1994).
[CrossRef] [PubMed]

R. Magnusson and S. S. Wang, Appl. Phys. Lett. 61, 1022 (1992).
[CrossRef]

K. J. Lee and R. Magnusson, in Frontiers in Optics, OSA Technical Digest (CD) (Optical Society of America, 2007), paper JWC38.

Maldonado, T. A.

P. S. Priambodo and T. A. Maldonado, Appl. Phys. Lett. 83, 3248 (2003).
[CrossRef]

Niederer, G.

G. Niederer, M. Salt, H. P. Herzig, T. Overstolz, W. Noell, and N. F. de Rooij, in IEEE/Lasers and Electro-Optics Society International Conference Optical MEMS (IEEE, 2002), p. 99.
[CrossRef]

Noell, W.

G. Niederer, M. Salt, H. P. Herzig, T. Overstolz, W. Noell, and N. F. de Rooij, in IEEE/Lasers and Electro-Optics Society International Conference Optical MEMS (IEEE, 2002), p. 99.
[CrossRef]

Overstolz, T.

G. Niederer, M. Salt, H. P. Herzig, T. Overstolz, W. Noell, and N. F. de Rooij, in IEEE/Lasers and Electro-Optics Society International Conference Optical MEMS (IEEE, 2002), p. 99.
[CrossRef]

Priambodo, P. S.

P. S. Priambodo and T. A. Maldonado, Appl. Phys. Lett. 83, 3248 (2003).
[CrossRef]

Salt, M.

G. Niederer, M. Salt, H. P. Herzig, T. Overstolz, W. Noell, and N. F. de Rooij, in IEEE/Lasers and Electro-Optics Society International Conference Optical MEMS (IEEE, 2002), p. 99.
[CrossRef]

Sang, T.

Z. S. Wang, T. Sang, L. Wang, J. T. Zhu, Y. G. Wu, and L. Y. Chen, Appl. Phys. Lett. 88, 251115 (2006).
[CrossRef]

Shao, J. D.

J. Y. Ma, S. J. Liu, D. W. Zhang, J. K. Yao, C. Xu, J. D. Shao, Y. X. Jin, and Z. X. Fan, J. Opt. A 10, 025302 (2008).
[CrossRef]

Shin, D.

Su, C. C.

Tibuleac, S.

Tu, Z. R.

Wang, L.

Z. S. Wang, T. Sang, L. Wang, J. T. Zhu, Y. G. Wu, and L. Y. Chen, Appl. Phys. Lett. 88, 251115 (2006).
[CrossRef]

Wang, S. S.

Wang, Z. S.

Z. S. Wang, T. Sang, L. Wang, J. T. Zhu, Y. G. Wu, and L. Y. Chen, Appl. Phys. Lett. 88, 251115 (2006).
[CrossRef]

Wu, M. L.

Wu, Y. G.

Z. S. Wang, T. Sang, L. Wang, J. T. Zhu, Y. G. Wu, and L. Y. Chen, Appl. Phys. Lett. 88, 251115 (2006).
[CrossRef]

Xu, C.

J. Y. Ma, S. J. Liu, D. W. Zhang, J. K. Yao, C. Xu, J. D. Shao, Y. X. Jin, and Z. X. Fan, J. Opt. A 10, 025302 (2008).
[CrossRef]

Yao, J. K.

J. Y. Ma, S. J. Liu, D. W. Zhang, J. K. Yao, C. Xu, J. D. Shao, Y. X. Jin, and Z. X. Fan, J. Opt. A 10, 025302 (2008).
[CrossRef]

Young, P. P.

Zhang, D. W.

J. Y. Ma, S. J. Liu, D. W. Zhang, J. K. Yao, C. Xu, J. D. Shao, Y. X. Jin, and Z. X. Fan, J. Opt. A 10, 025302 (2008).
[CrossRef]

Zhu, J. T.

Z. S. Wang, T. Sang, L. Wang, J. T. Zhu, Y. G. Wu, and L. Y. Chen, Appl. Phys. Lett. 88, 251115 (2006).
[CrossRef]

Appl. Opt. (1)

Appl. Phys. Lett. (4)

R. Magnusson and S. S. Wang, Appl. Phys. Lett. 61, 1022 (1992).
[CrossRef]

Z. S. Wang, T. Sang, L. Wang, J. T. Zhu, Y. G. Wu, and L. Y. Chen, Appl. Phys. Lett. 88, 251115 (2006).
[CrossRef]

P. S. Priambodo and T. A. Maldonado, Appl. Phys. Lett. 83, 3248 (2003).
[CrossRef]

D. W. Dobbs, I. Gershkovich, and B. T. Cuningham, Appl. Phys. Lett. 89, 123113 (2006).
[CrossRef]

IEEE Photon. Technol. Lett. (1)

Z. S. Liu and R. Magnusson, IEEE Photon. Technol. Lett. 14, 1091 (2002).
[CrossRef]

J. Opt. A (1)

J. Y. Ma, S. J. Liu, D. W. Zhang, J. K. Yao, C. Xu, J. D. Shao, Y. X. Jin, and Z. X. Fan, J. Opt. A 10, 025302 (2008).
[CrossRef]

Opt. Express (1)

Opt. Lett. (3)

Sens. Actuators B (1)

B. Lin, P. Li, and B. T. Cuningham, Sens. Actuators B 114, 559 (2006).
[CrossRef]

Other (2)

K. J. Lee and R. Magnusson, in Frontiers in Optics, OSA Technical Digest (CD) (Optical Society of America, 2007), paper JWC38.

G. Niederer, M. Salt, H. P. Herzig, T. Overstolz, W. Noell, and N. F. de Rooij, in IEEE/Lasers and Electro-Optics Society International Conference Optical MEMS (IEEE, 2002), p. 99.
[CrossRef]

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Figures (5)

Fig. 1
Fig. 1

Structure of two layer GMRF. The parameters are n c = n L = 1.0 (air), n H = n 1 = 1.95 ( Hf O 2 ) , n s = 1.45 (glass), Λ = 406 nm , and incident angle θ = 0 ° (in air, the cover region).

Fig. 2
Fig. 2

Reflectance responses of GMRF with different groove depths.

Fig. 3
Fig. 3

Deviations of resonant peak value and deviations of groove depth (solid curve); linear fit of relationship (dashed curve).

Fig. 4
Fig. 4

Structure of GMRF after being coated with Hf O 2 film.

Fig. 5
Fig. 5

Reflectance responses of GMRFs (solid curve, designed GMRF; dashed curve, overetched GMRF with cover layer).

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