Abstract

In holographic parallel laser processing, precise control of diffraction peaks is important for fabricating enormous numbers of nanometer-scale structures. Although an optimized hologram has high uniformity of the peaks in a computer reconstruction, in practice, the uniformity is decreased owing to the spatial properties of the optical system. A novel optimization method based on peak intensity measurement is proposed to improve the uniformity. The method automatically incorporates the properties of the optical system into the hologram. Improved holographic femtosecond laser processing with this adaptive optimization is demonstrated.

© 2008 Optical Society of America

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[CrossRef]

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Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

2001 (1)

T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, Appl. Phys. Lett. 79, 725 (2001).
[CrossRef]

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K. Kawamura, T. Ogawa, N. Sarukura, M. Hirano, and H. Hosono, Appl. Phys. B 71, 119 (2000).

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[CrossRef]

H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, and M. Obara, Appl. Phys. Lett. 65, 1850 (1994).
[CrossRef]

Andrés, P.

Audouard, E.

Biegert, J.

Callan, J. P.

Caraquitena, J.

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K. Chaen, H. Takahashi, S. Hasegawa, and Y. Hayasaki, Opt. Commun. 280, 165 (2007).
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B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

Climent, V.

Davis, K. M.

De Silvestri, S.

Du, D.

D. Du, X. Liu, G. Korn, and G. Mourou, Appl. Phys. Lett. 64, 3071 (1994).
[CrossRef]

Fernández-Alonso, M.

Finlay, R. J.

Gan, G. K.

K. Venkatakrishnan, N. R. Sivakumar, C. W. Hee, B. Tan, W. L. Liang, and G. K. Gan, Appl. Phys. A 77, 959 (2003).
[CrossRef]

Glezer, E. N.

Hasegawa, S.

H. Takahashi, S. Hasegawa, and Y. Hayasaki, Appl. Opt. 46, 5917 (2007).
[CrossRef] [PubMed]

S. Hasegawa and Y. Hayasaki, Opt. Rev. 14, 208 (2007).
[CrossRef]

K. Chaen, H. Takahashi, S. Hasegawa, and Y. Hayasaki, Opt. Commun. 280, 165 (2007).
[CrossRef]

S. Hasegawa, Y. Hayasaki, and N. Nishida, Opt. Lett. 31, 1705 (2006).
[CrossRef] [PubMed]

Hayasaki, Y.

S. Hasegawa and Y. Hayasaki, Opt. Rev. 14, 208 (2007).
[CrossRef]

H. Takahashi, S. Hasegawa, and Y. Hayasaki, Appl. Opt. 46, 5917 (2007).
[CrossRef] [PubMed]

K. Chaen, H. Takahashi, S. Hasegawa, and Y. Hayasaki, Opt. Commun. 280, 165 (2007).
[CrossRef]

S. Hasegawa, Y. Hayasaki, and N. Nishida, Opt. Lett. 31, 1705 (2006).
[CrossRef] [PubMed]

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, Appl. Phys. Lett. 87, 031101 (2005).
[CrossRef]

Hee, C. W.

K. Venkatakrishnan, N. R. Sivakumar, C. W. Hee, B. Tan, W. L. Liang, and G. K. Gan, Appl. Phys. A 77, 959 (2003).
[CrossRef]

Her, T.-H.

Hirano, M.

K. Kawamura, T. Ogawa, N. Sarukura, M. Hirano, and H. Hosono, Appl. Phys. B 71, 119 (2000).

Hirao, K.

Hirasawa, M.

Hosono, H.

K. Kawamura, T. Ogawa, N. Sarukura, M. Hirano, and H. Hosono, Appl. Phys. B 71, 119 (2000).

Huang, L.

Huignard, J. P.

Huot, N.

Itoh, K.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

Jiang, Y.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

Juodkazis, S.

T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, Appl. Phys. Lett. 79, 725 (2001).
[CrossRef]

Kawamura, K.

K. Kawamura, T. Ogawa, N. Sarukura, M. Hirano, and H. Hosono, Appl. Phys. B 71, 119 (2000).

Keller, U.

Kondo, T.

T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, Appl. Phys. Lett. 79, 725 (2001).
[CrossRef]

Korn, G.

D. Du, X. Liu, G. Korn, and G. Mourou, Appl. Phys. Lett. 64, 3071 (1994).
[CrossRef]

Kumagai, H.

H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, and M. Obara, Appl. Phys. Lett. 65, 1850 (1994).
[CrossRef]

Kuroiwa, Y.

Lancis, J.

Larat, C.

Li, Y.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

Liang, W. L.

K. Venkatakrishnan, N. R. Sivakumar, C. W. Hee, B. Tan, W. L. Liang, and G. K. Gan, Appl. Phys. A 77, 959 (2003).
[CrossRef]

Liu, X.

D. Du, X. Liu, G. Korn, and G. Mourou, Appl. Phys. Lett. 64, 3071 (1994).
[CrossRef]

Loiseaux, B.

Matsuo, S.

T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, Appl. Phys. Lett. 79, 725 (2001).
[CrossRef]

Mazur, E.

Midorikawa, K.

H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, and M. Obara, Appl. Phys. Lett. 65, 1850 (1994).
[CrossRef]

Milosavljevic, M.

Mínguez-Vega, G.

Misawa, H.

T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, Appl. Phys. Lett. 79, 725 (2001).
[CrossRef]

Miura, K.

Momma, C.

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

Morita, R.

Mourou, G.

D. Du, X. Liu, G. Korn, and G. Mourou, Appl. Phys. Lett. 64, 3071 (1994).
[CrossRef]

Nakagawa, N.

Nakamura, S.

H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, and M. Obara, Appl. Phys. Lett. 65, 1850 (1994).
[CrossRef]

Narita, Y.

Nishida, N.

S. Hasegawa, Y. Hayasaki, and N. Nishida, Opt. Lett. 31, 1705 (2006).
[CrossRef] [PubMed]

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, Appl. Phys. Lett. 87, 031101 (2005).
[CrossRef]

Nishii, J.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

Nisoli, M.

Nolte, S.

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

Obara, M.

H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, and M. Obara, Appl. Phys. Lett. 65, 1850 (1994).
[CrossRef]

Ogawa, T.

K. Kawamura, T. Ogawa, N. Sarukura, M. Hirano, and H. Hosono, Appl. Phys. B 71, 119 (2000).

Oka, K.

Okamoto, T.

H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, and M. Obara, Appl. Phys. Lett. 65, 1850 (1994).
[CrossRef]

Sanner, N.

Sansone, G.

Sarukura, N.

K. Kawamura, T. Ogawa, N. Sarukura, M. Hirano, and H. Hosono, Appl. Phys. B 71, 119 (2000).

Schenkel, B.

Shinagawa, T.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

Sivakumar, N. R.

K. Venkatakrishnan, N. R. Sivakumar, C. W. Hee, B. Tan, W. L. Liang, and G. K. Gan, Appl. Phys. A 77, 959 (2003).
[CrossRef]

Stagira, S.

Sugimoto, N.

Sugimoto, T.

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, Appl. Phys. Lett. 87, 031101 (2005).
[CrossRef]

Suguro, A.

Svelto, O.

Tajahuerce, E.

Takahashi, H.

H. Takahashi, S. Hasegawa, and Y. Hayasaki, Appl. Opt. 46, 5917 (2007).
[CrossRef] [PubMed]

K. Chaen, H. Takahashi, S. Hasegawa, and Y. Hayasaki, Opt. Commun. 280, 165 (2007).
[CrossRef]

Takeshima, N.

Takita, A.

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, Appl. Phys. Lett. 87, 031101 (2005).
[CrossRef]

Tan, B.

K. Venkatakrishnan, N. R. Sivakumar, C. W. Hee, B. Tan, W. L. Liang, and G. K. Gan, Appl. Phys. A 77, 959 (2003).
[CrossRef]

Tanaka, S.

Torres-Company, V.

Toyoda, K.

H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, and M. Obara, Appl. Phys. Lett. 65, 1850 (1994).
[CrossRef]

Tünnermann, A.

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

Venkatakrishnan, K.

K. Venkatakrishnan, N. R. Sivakumar, C. W. Hee, B. Tan, W. L. Liang, and G. K. Gan, Appl. Phys. A 77, 959 (2003).
[CrossRef]

von Alvensleben, F.

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

Watanabe, W.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

Yamada, K.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

Yamamoto, K.

Yamashita, M.

Appl. Opt. (1)

Appl. Phys. A (2)

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

K. Venkatakrishnan, N. R. Sivakumar, C. W. Hee, B. Tan, W. L. Liang, and G. K. Gan, Appl. Phys. A 77, 959 (2003).
[CrossRef]

Appl. Phys. B (1)

K. Kawamura, T. Ogawa, N. Sarukura, M. Hirano, and H. Hosono, Appl. Phys. B 71, 119 (2000).

Appl. Phys. Lett. (5)

T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, Appl. Phys. Lett. 79, 725 (2001).
[CrossRef]

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

D. Du, X. Liu, G. Korn, and G. Mourou, Appl. Phys. Lett. 64, 3071 (1994).
[CrossRef]

H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, and M. Obara, Appl. Phys. Lett. 65, 1850 (1994).
[CrossRef]

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, Appl. Phys. Lett. 87, 031101 (2005).
[CrossRef]

J. Opt. Soc. Am. B (1)

Opt. Commun. (1)

K. Chaen, H. Takahashi, S. Hasegawa, and Y. Hayasaki, Opt. Commun. 280, 165 (2007).
[CrossRef]

Opt. Express (2)

Opt. Lett. (6)

Opt. Rev. (1)

S. Hasegawa and Y. Hayasaki, Opt. Rev. 14, 208 (2007).
[CrossRef]

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Figures (4)

Fig. 1
Fig. 1

Holographic femtosecond laser processing system.

Fig. 2
Fig. 2

Change of the uniformity in the adaptive optimization.

Fig. 3
Fig. 3

(a) MPFL with adaptive optimization. (b) Optical reconstruction. (c) SEM image, (d) AFM image, and (e) AFM profile of the fabricated area.

Fig. 4
Fig. 4

Maximum pit diameter, minimum pit diameter, and U d of the nine pits versus the irradiation energy. The open crosses, triangles, and circles indicate the use of MPFLs without optimization, with computational optimization, and with adaptive optimization, respectively.

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