Abstract

Two-dimensional periodic microstructures, including both microholes and micro-orbicular platforms, have been fabricated on the surface of silica glass by a single shot of three interfered femtosecond laser pulses. The three-dimensional structure of a fabricated hexagonal lattice can be revealed by atomic force microscopy. The formation of the microstructure and the dynamic process of the interaction between the femtosecond laser and the silica glass have been discussed.

© 2008 Optical Society of America

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2007 (3)

Y. Hayasaki and D. Kawamura, Appl. Phys. A 87, 691 (2007).
[CrossRef]

Y. Nakata, N. Miyanaga, and T. Okada, Appl. Surf. Sci. 253, 6555 (2007).
[CrossRef]

Z. Guo, S. Qu, Y. Han, and S. Liu, Opt. Commun. 280, 23 (2007).
[CrossRef]

2006 (5)

S. Juodkazis, H. Misawa, T. Hashimoto, E. Gamaly, and B. L. Davies, Appl. Phys. Lett. 88, 201909 (2006).
[CrossRef]

J. Svensson, N. Bulgakova, O. Nerushev, and E. Campbell, Phys. Rev. B 73, 205413 (2006).
[CrossRef]

J. Guo, J. Si, G. Qian, B. Hua, J. Qiu, M. Wang, and K. Hirao, Chem. Phys. Lett. 424, 189 (2006).
[CrossRef]

D. Kawamura, A. Takita, Y. Hayasaki, and N. Nishida, Appl. Phys. A 85, 39 (2006).
[CrossRef]

R. Piparia, E. W. Rothe, and R. J. Baird, Appl. Phys. Lett. 89, 223113 (2006).
[CrossRef]

2005 (4)

Q. Zhao, J. Qiua, C. Zhao, X. Jiang, and C. Zhu, Appl. Surf. Sci. 241, 416 (2005).
[CrossRef]

S. M. Huang, and Z. Sun, B. S. Luk'yanchuk, M. H. Hong, and L. P. Shi, Appl. Phys. Lett. 86, 161911 (2005).
[CrossRef]

S. Kanehira, J. Si, J. Qiu, K. Fujita, K. Hirao, Nano Lett. 5, 1591 (2005).
[CrossRef] [PubMed]

Q. Zhao, J. Qiu, X. Jiang, E. Dai, C. Zhou, and C. Zhu, Opt. Express 13, 2089 (2005).
[CrossRef] [PubMed]

2004 (2)

J. Si, Z. Meng, S. Kanehira, J. Qiu, B. Hua, and K. Hirao, Chem. Phys. Lett. 399, 276 (2004).
[CrossRef]

S. Qu, C. Zhao, Q. Zhao, J. Qiu, C. Zhu, and K. Hirao, Opt. Lett. 29, 2058 (2004).
[CrossRef] [PubMed]

2003 (5)

Y. Shimotsuma, P. Kazansky, J. Qiu, and K. Hirao, Phys. Rev. Lett. 91, 247405 (2003).
[CrossRef] [PubMed]

T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, and H. Misawa, Appl. Phys. Lett. 82, 2758 (2003).
[CrossRef]

Y. Nakata, T. Okada, and M. Maeda, Jpn. J. Appl. Phys. 42, L1452 (2003).
[CrossRef]

Y. Lu, S. Theppakuttai, and S. C. Chen, Appl. Phys. Lett. 82, 4143 (2003).
[CrossRef]

J. Eizenkop, I. Avrutsky, G. Auner, D. G. Georgiev, and V. Chaudhary, J. Appl. Phys. 101, 094301 (2003).
[CrossRef]

2002 (1)

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

2001 (2)

C. B. Schaffer, A. Brodeur, J. F. García, and E. Mazur, Opt. Lett. 26, 93 (2001).
[CrossRef]

K. Kawamura, N. Sarukura, M. Hirano, N. Ito, and H. Hosono, Appl. Phys. Lett. 79, 1228 (2001).
[CrossRef]

Auner, G.

J. Eizenkop, I. Avrutsky, G. Auner, D. G. Georgiev, and V. Chaudhary, J. Appl. Phys. 101, 094301 (2003).
[CrossRef]

Avrutsky, I.

J. Eizenkop, I. Avrutsky, G. Auner, D. G. Georgiev, and V. Chaudhary, J. Appl. Phys. 101, 094301 (2003).
[CrossRef]

Baird, R. J.

R. Piparia, E. W. Rothe, and R. J. Baird, Appl. Phys. Lett. 89, 223113 (2006).
[CrossRef]

Brodeur, A.

Bulgakova, N.

J. Svensson, N. Bulgakova, O. Nerushev, and E. Campbell, Phys. Rev. B 73, 205413 (2006).
[CrossRef]

Campbell, E.

J. Svensson, N. Bulgakova, O. Nerushev, and E. Campbell, Phys. Rev. B 73, 205413 (2006).
[CrossRef]

Chaudhary, V.

J. Eizenkop, I. Avrutsky, G. Auner, D. G. Georgiev, and V. Chaudhary, J. Appl. Phys. 101, 094301 (2003).
[CrossRef]

Chen, S. C.

Y. Lu, S. Theppakuttai, and S. C. Chen, Appl. Phys. Lett. 82, 4143 (2003).
[CrossRef]

Dai, E.

Davies, B. L.

S. Juodkazis, H. Misawa, T. Hashimoto, E. Gamaly, and B. L. Davies, Appl. Phys. Lett. 88, 201909 (2006).
[CrossRef]

Eizenkop, J.

J. Eizenkop, I. Avrutsky, G. Auner, D. G. Georgiev, and V. Chaudhary, J. Appl. Phys. 101, 094301 (2003).
[CrossRef]

Fujita, K.

S. Kanehira, J. Si, J. Qiu, K. Fujita, K. Hirao, Nano Lett. 5, 1591 (2005).
[CrossRef] [PubMed]

Gamaly, E.

S. Juodkazis, H. Misawa, T. Hashimoto, E. Gamaly, and B. L. Davies, Appl. Phys. Lett. 88, 201909 (2006).
[CrossRef]

García, J. F.

Georgiev, D. G.

J. Eizenkop, I. Avrutsky, G. Auner, D. G. Georgiev, and V. Chaudhary, J. Appl. Phys. 101, 094301 (2003).
[CrossRef]

Guo, J.

J. Guo, J. Si, G. Qian, B. Hua, J. Qiu, M. Wang, and K. Hirao, Chem. Phys. Lett. 424, 189 (2006).
[CrossRef]

Guo, Z.

Z. Guo, S. Qu, Y. Han, and S. Liu, Opt. Commun. 280, 23 (2007).
[CrossRef]

Han, Y.

Z. Guo, S. Qu, Y. Han, and S. Liu, Opt. Commun. 280, 23 (2007).
[CrossRef]

Hashimoto, T.

S. Juodkazis, H. Misawa, T. Hashimoto, E. Gamaly, and B. L. Davies, Appl. Phys. Lett. 88, 201909 (2006).
[CrossRef]

Hayasaki, Y.

Y. Hayasaki and D. Kawamura, Appl. Phys. A 87, 691 (2007).
[CrossRef]

D. Kawamura, A. Takita, Y. Hayasaki, and N. Nishida, Appl. Phys. A 85, 39 (2006).
[CrossRef]

Hirano, M.

K. Kawamura, N. Sarukura, M. Hirano, N. Ito, and H. Hosono, Appl. Phys. Lett. 79, 1228 (2001).
[CrossRef]

Hirao, K.

J. Guo, J. Si, G. Qian, B. Hua, J. Qiu, M. Wang, and K. Hirao, Chem. Phys. Lett. 424, 189 (2006).
[CrossRef]

S. Kanehira, J. Si, J. Qiu, K. Fujita, K. Hirao, Nano Lett. 5, 1591 (2005).
[CrossRef] [PubMed]

S. Qu, C. Zhao, Q. Zhao, J. Qiu, C. Zhu, and K. Hirao, Opt. Lett. 29, 2058 (2004).
[CrossRef] [PubMed]

J. Si, Z. Meng, S. Kanehira, J. Qiu, B. Hua, and K. Hirao, Chem. Phys. Lett. 399, 276 (2004).
[CrossRef]

Y. Shimotsuma, P. Kazansky, J. Qiu, and K. Hirao, Phys. Rev. Lett. 91, 247405 (2003).
[CrossRef] [PubMed]

Hong, M. H.

S. M. Huang, and Z. Sun, B. S. Luk'yanchuk, M. H. Hong, and L. P. Shi, Appl. Phys. Lett. 86, 161911 (2005).
[CrossRef]

Hosono, H.

K. Kawamura, N. Sarukura, M. Hirano, N. Ito, and H. Hosono, Appl. Phys. Lett. 79, 1228 (2001).
[CrossRef]

Hua, B.

J. Guo, J. Si, G. Qian, B. Hua, J. Qiu, M. Wang, and K. Hirao, Chem. Phys. Lett. 424, 189 (2006).
[CrossRef]

J. Si, Z. Meng, S. Kanehira, J. Qiu, B. Hua, and K. Hirao, Chem. Phys. Lett. 399, 276 (2004).
[CrossRef]

Huang, S. M.

S. M. Huang, and Z. Sun, B. S. Luk'yanchuk, M. H. Hong, and L. P. Shi, Appl. Phys. Lett. 86, 161911 (2005).
[CrossRef]

Ito, N.

K. Kawamura, N. Sarukura, M. Hirano, N. Ito, and H. Hosono, Appl. Phys. Lett. 79, 1228 (2001).
[CrossRef]

Itoh, K.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

Jiang, X.

Q. Zhao, J. Qiu, X. Jiang, E. Dai, C. Zhou, and C. Zhu, Opt. Express 13, 2089 (2005).
[CrossRef] [PubMed]

Q. Zhao, J. Qiua, C. Zhao, X. Jiang, and C. Zhu, Appl. Surf. Sci. 241, 416 (2005).
[CrossRef]

Jiang, Y.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

Juodkazis, S.

S. Juodkazis, H. Misawa, T. Hashimoto, E. Gamaly, and B. L. Davies, Appl. Phys. Lett. 88, 201909 (2006).
[CrossRef]

T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, and H. Misawa, Appl. Phys. Lett. 82, 2758 (2003).
[CrossRef]

Kanehira, S.

S. Kanehira, J. Si, J. Qiu, K. Fujita, K. Hirao, Nano Lett. 5, 1591 (2005).
[CrossRef] [PubMed]

J. Si, Z. Meng, S. Kanehira, J. Qiu, B. Hua, and K. Hirao, Chem. Phys. Lett. 399, 276 (2004).
[CrossRef]

Kawamura, D.

Y. Hayasaki and D. Kawamura, Appl. Phys. A 87, 691 (2007).
[CrossRef]

D. Kawamura, A. Takita, Y. Hayasaki, and N. Nishida, Appl. Phys. A 85, 39 (2006).
[CrossRef]

Kawamura, K.

K. Kawamura, N. Sarukura, M. Hirano, N. Ito, and H. Hosono, Appl. Phys. Lett. 79, 1228 (2001).
[CrossRef]

Kazansky, P.

Y. Shimotsuma, P. Kazansky, J. Qiu, and K. Hirao, Phys. Rev. Lett. 91, 247405 (2003).
[CrossRef] [PubMed]

Kondo, T.

T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, and H. Misawa, Appl. Phys. Lett. 82, 2758 (2003).
[CrossRef]

Li, Y.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

Liu, S.

Z. Guo, S. Qu, Y. Han, and S. Liu, Opt. Commun. 280, 23 (2007).
[CrossRef]

Lu, Y.

Y. Lu, S. Theppakuttai, and S. C. Chen, Appl. Phys. Lett. 82, 4143 (2003).
[CrossRef]

Luk'yanchuk, B. S.

S. M. Huang, and Z. Sun, B. S. Luk'yanchuk, M. H. Hong, and L. P. Shi, Appl. Phys. Lett. 86, 161911 (2005).
[CrossRef]

Maeda, M.

Y. Nakata, T. Okada, and M. Maeda, Jpn. J. Appl. Phys. 42, L1452 (2003).
[CrossRef]

Matsuo, S.

T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, and H. Misawa, Appl. Phys. Lett. 82, 2758 (2003).
[CrossRef]

Mazur, E.

Meng, Z.

J. Si, Z. Meng, S. Kanehira, J. Qiu, B. Hua, and K. Hirao, Chem. Phys. Lett. 399, 276 (2004).
[CrossRef]

Misawa, H.

S. Juodkazis, H. Misawa, T. Hashimoto, E. Gamaly, and B. L. Davies, Appl. Phys. Lett. 88, 201909 (2006).
[CrossRef]

T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, and H. Misawa, Appl. Phys. Lett. 82, 2758 (2003).
[CrossRef]

Miyanaga, N.

Y. Nakata, N. Miyanaga, and T. Okada, Appl. Surf. Sci. 253, 6555 (2007).
[CrossRef]

Mizeikis, V.

T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, and H. Misawa, Appl. Phys. Lett. 82, 2758 (2003).
[CrossRef]

Nakata, Y.

Y. Nakata, N. Miyanaga, and T. Okada, Appl. Surf. Sci. 253, 6555 (2007).
[CrossRef]

Y. Nakata, T. Okada, and M. Maeda, Jpn. J. Appl. Phys. 42, L1452 (2003).
[CrossRef]

Nerushev, O.

J. Svensson, N. Bulgakova, O. Nerushev, and E. Campbell, Phys. Rev. B 73, 205413 (2006).
[CrossRef]

Nishida, N.

D. Kawamura, A. Takita, Y. Hayasaki, and N. Nishida, Appl. Phys. A 85, 39 (2006).
[CrossRef]

Nishii, J.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

Okada, T.

Y. Nakata, N. Miyanaga, and T. Okada, Appl. Surf. Sci. 253, 6555 (2007).
[CrossRef]

Y. Nakata, T. Okada, and M. Maeda, Jpn. J. Appl. Phys. 42, L1452 (2003).
[CrossRef]

Piparia, R.

R. Piparia, E. W. Rothe, and R. J. Baird, Appl. Phys. Lett. 89, 223113 (2006).
[CrossRef]

Qian, G.

J. Guo, J. Si, G. Qian, B. Hua, J. Qiu, M. Wang, and K. Hirao, Chem. Phys. Lett. 424, 189 (2006).
[CrossRef]

Qiu, J.

J. Guo, J. Si, G. Qian, B. Hua, J. Qiu, M. Wang, and K. Hirao, Chem. Phys. Lett. 424, 189 (2006).
[CrossRef]

S. Kanehira, J. Si, J. Qiu, K. Fujita, K. Hirao, Nano Lett. 5, 1591 (2005).
[CrossRef] [PubMed]

Q. Zhao, J. Qiu, X. Jiang, E. Dai, C. Zhou, and C. Zhu, Opt. Express 13, 2089 (2005).
[CrossRef] [PubMed]

S. Qu, C. Zhao, Q. Zhao, J. Qiu, C. Zhu, and K. Hirao, Opt. Lett. 29, 2058 (2004).
[CrossRef] [PubMed]

J. Si, Z. Meng, S. Kanehira, J. Qiu, B. Hua, and K. Hirao, Chem. Phys. Lett. 399, 276 (2004).
[CrossRef]

Y. Shimotsuma, P. Kazansky, J. Qiu, and K. Hirao, Phys. Rev. Lett. 91, 247405 (2003).
[CrossRef] [PubMed]

Qiua, J.

Q. Zhao, J. Qiua, C. Zhao, X. Jiang, and C. Zhu, Appl. Surf. Sci. 241, 416 (2005).
[CrossRef]

Qu, S.

Rothe, E. W.

R. Piparia, E. W. Rothe, and R. J. Baird, Appl. Phys. Lett. 89, 223113 (2006).
[CrossRef]

Sarukura, N.

K. Kawamura, N. Sarukura, M. Hirano, N. Ito, and H. Hosono, Appl. Phys. Lett. 79, 1228 (2001).
[CrossRef]

Schaffer, C. B.

Shi, L. P.

S. M. Huang, and Z. Sun, B. S. Luk'yanchuk, M. H. Hong, and L. P. Shi, Appl. Phys. Lett. 86, 161911 (2005).
[CrossRef]

Shimotsuma, Y.

Y. Shimotsuma, P. Kazansky, J. Qiu, and K. Hirao, Phys. Rev. Lett. 91, 247405 (2003).
[CrossRef] [PubMed]

Shinagawa, T.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

Si, J.

J. Guo, J. Si, G. Qian, B. Hua, J. Qiu, M. Wang, and K. Hirao, Chem. Phys. Lett. 424, 189 (2006).
[CrossRef]

S. Kanehira, J. Si, J. Qiu, K. Fujita, K. Hirao, Nano Lett. 5, 1591 (2005).
[CrossRef] [PubMed]

J. Si, Z. Meng, S. Kanehira, J. Qiu, B. Hua, and K. Hirao, Chem. Phys. Lett. 399, 276 (2004).
[CrossRef]

Sun, Z.

S. M. Huang, and Z. Sun, B. S. Luk'yanchuk, M. H. Hong, and L. P. Shi, Appl. Phys. Lett. 86, 161911 (2005).
[CrossRef]

Svensson, J.

J. Svensson, N. Bulgakova, O. Nerushev, and E. Campbell, Phys. Rev. B 73, 205413 (2006).
[CrossRef]

Takita, A.

D. Kawamura, A. Takita, Y. Hayasaki, and N. Nishida, Appl. Phys. A 85, 39 (2006).
[CrossRef]

Theppakuttai, S.

Y. Lu, S. Theppakuttai, and S. C. Chen, Appl. Phys. Lett. 82, 4143 (2003).
[CrossRef]

Wang, M.

J. Guo, J. Si, G. Qian, B. Hua, J. Qiu, M. Wang, and K. Hirao, Chem. Phys. Lett. 424, 189 (2006).
[CrossRef]

Watanabe, W.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

Yamada, K.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

Zhao, C.

Q. Zhao, J. Qiua, C. Zhao, X. Jiang, and C. Zhu, Appl. Surf. Sci. 241, 416 (2005).
[CrossRef]

S. Qu, C. Zhao, Q. Zhao, J. Qiu, C. Zhu, and K. Hirao, Opt. Lett. 29, 2058 (2004).
[CrossRef] [PubMed]

Zhao, Q.

Zhou, C.

Zhu, C.

Appl. Phys. A (2)

D. Kawamura, A. Takita, Y. Hayasaki, and N. Nishida, Appl. Phys. A 85, 39 (2006).
[CrossRef]

Y. Hayasaki and D. Kawamura, Appl. Phys. A 87, 691 (2007).
[CrossRef]

Appl. Phys. Lett. (7)

S. Juodkazis, H. Misawa, T. Hashimoto, E. Gamaly, and B. L. Davies, Appl. Phys. Lett. 88, 201909 (2006).
[CrossRef]

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

K. Kawamura, N. Sarukura, M. Hirano, N. Ito, and H. Hosono, Appl. Phys. Lett. 79, 1228 (2001).
[CrossRef]

T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, and H. Misawa, Appl. Phys. Lett. 82, 2758 (2003).
[CrossRef]

Y. Lu, S. Theppakuttai, and S. C. Chen, Appl. Phys. Lett. 82, 4143 (2003).
[CrossRef]

S. M. Huang, and Z. Sun, B. S. Luk'yanchuk, M. H. Hong, and L. P. Shi, Appl. Phys. Lett. 86, 161911 (2005).
[CrossRef]

R. Piparia, E. W. Rothe, and R. J. Baird, Appl. Phys. Lett. 89, 223113 (2006).
[CrossRef]

Appl. Surf. Sci. (2)

Y. Nakata, N. Miyanaga, and T. Okada, Appl. Surf. Sci. 253, 6555 (2007).
[CrossRef]

Q. Zhao, J. Qiua, C. Zhao, X. Jiang, and C. Zhu, Appl. Surf. Sci. 241, 416 (2005).
[CrossRef]

Chem. Phys. Lett. (2)

J. Guo, J. Si, G. Qian, B. Hua, J. Qiu, M. Wang, and K. Hirao, Chem. Phys. Lett. 424, 189 (2006).
[CrossRef]

J. Si, Z. Meng, S. Kanehira, J. Qiu, B. Hua, and K. Hirao, Chem. Phys. Lett. 399, 276 (2004).
[CrossRef]

J. Appl. Phys. (1)

J. Eizenkop, I. Avrutsky, G. Auner, D. G. Georgiev, and V. Chaudhary, J. Appl. Phys. 101, 094301 (2003).
[CrossRef]

Jpn. J. Appl. Phys. (1)

Y. Nakata, T. Okada, and M. Maeda, Jpn. J. Appl. Phys. 42, L1452 (2003).
[CrossRef]

Nano Lett. (1)

S. Kanehira, J. Si, J. Qiu, K. Fujita, K. Hirao, Nano Lett. 5, 1591 (2005).
[CrossRef] [PubMed]

Opt. Commun. (1)

Z. Guo, S. Qu, Y. Han, and S. Liu, Opt. Commun. 280, 23 (2007).
[CrossRef]

Opt. Express (1)

Opt. Lett. (2)

Phys. Rev. B (1)

J. Svensson, N. Bulgakova, O. Nerushev, and E. Campbell, Phys. Rev. B 73, 205413 (2006).
[CrossRef]

Phys. Rev. Lett. (1)

Y. Shimotsuma, P. Kazansky, J. Qiu, and K. Hirao, Phys. Rev. Lett. 91, 247405 (2003).
[CrossRef] [PubMed]

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Figures (3)

Fig. 1
Fig. 1

(a) Geometric sketch of the three interfered beams, and the sample is laid in the x–y plane. (b) Calculated intensity distribution of the interference by three noncoplanar beams. (c) Photo of the periodic microstructure fabricated in silica glass, taken by an optical microscopy with a 100 × optical objective.

Fig. 2
Fig. 2

Photoinduced periodic microstructure fabricated in silica glass by three noncoplanar beams with different pulse energies. (a) Pulse energy is 75 μ J per pulse, and (b) energy is 30 μ J per pulse. (c),(d) Three-dimensional image of the microstructures of (a) and (b), respectively. (e),(f) Cross section of the microstructure in the direction of white line showed in (a) and (b), respectively.

Fig. 3
Fig. 3

(a) Photo of the periodic structure induced by a single shot of three pulses with the energy of 50 taken by an AFM. Three-dimensional analyzed photos of the three selected parts I, II, and III in (a) are shown in (b)–(d).

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