We investigated the extraordinary optical transmission phenomenon in the UV range by fabricating large-area, free-standing aluminum hole arrays using extreme UV interference lithography and shadow thermal evaporation. Transmission spectra show strong peaks in the UV region resulting from both surface plasmon polariton and localized surface plasmon excitations. The results indicate that the high plasmon frequency of Al is directly responsible for the presence of strong resonance peaks in the UV region, which supports the role of plasmonic phenomena in the extraordinary transmission. The simple fabrication method enables large-area production of such structures for research and industrial production purposes.
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