Abstract

The polarization modulation technique was successfully combined with parallel synchronous detection using a switching light source and a CCD camera to realize full-frame measurement of ellipsometric parameters. The detected thickness of a monolayer film of n-octadecylsiloxane agreed well with theoretical and reported experimental values. The thickness resolution for imaging and the temporal noise in parallel thickness measurements were smaller than ±0.1nm and smaller than ±0.02nm, respectively.

© 2006 Optical Society of America

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References

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  1. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, 1987).
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    [CrossRef]
  3. K. Leonhardt, U. Droste, and H. J. Tiziani, Opt. Lett. 22, 1772 (1998).
    [CrossRef]
  4. F. Linke and R. Merkel, Rev. Sci. Instrum. 76, 063701 (2005).
    [CrossRef]
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    [CrossRef] [PubMed]
  6. P. Gleyzes, F. Guernet, and A. C. Boccara, J. Opt. (Paris) 26, 251 (1995).
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    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef]
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    [CrossRef]
  11. S. Otsuki, K. Ohta, K. Tamada, and S. Wakida, Appl. Opt. 44, 5910 (2005).
    [CrossRef] [PubMed]

2005 (3)

1998 (1)

1997 (1)

1996 (1)

G. Jin, R. Jansson, and H. Arwin, Rev. Sci. Instrum. 67, 2930 (1996).
[CrossRef]

1995 (1)

P. Gleyzes, F. Guernet, and A. C. Boccara, J. Opt. (Paris) 26, 251 (1995).

1989 (2)

O. Acher, E. Bigan, and B. Drévillon, Rev. Sci. Instrum. 60, 65 (1989).
[CrossRef]

S. R. Wasserman, Y.-T. Tao, and G. M. Whitesides, Langmuir 5, 1074 (1989).
[CrossRef]

1978 (1)

Acher, O.

O. Acher, E. Bigan, and B. Drévillon, Rev. Sci. Instrum. 60, 65 (1989).
[CrossRef]

Arwin, H.

G. Jin, R. Jansson, and H. Arwin, Rev. Sci. Instrum. 67, 2930 (1996).
[CrossRef]

Azzam, R. M. A.

R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, 1987).

Bashara, N. M.

R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, 1987).

Bermudez, V. M.

Bigan, E.

O. Acher, E. Bigan, and B. Drévillon, Rev. Sci. Instrum. 60, 65 (1989).
[CrossRef]

Boccara, A. C.

P. Gleyzes, A. C. Boccara, and H. Saint-Jalmes, Opt. Lett. 22, 1529 (1997).
[CrossRef]

P. Gleyzes, F. Guernet, and A. C. Boccara, J. Opt. (Paris) 26, 251 (1995).

Drévillon, B.

O. Acher, E. Bigan, and B. Drévillon, Rev. Sci. Instrum. 60, 65 (1989).
[CrossRef]

Droste, U.

Gleyzes, P.

P. Gleyzes, A. C. Boccara, and H. Saint-Jalmes, Opt. Lett. 22, 1529 (1997).
[CrossRef]

P. Gleyzes, F. Guernet, and A. C. Boccara, J. Opt. (Paris) 26, 251 (1995).

Guernet, F.

P. Gleyzes, F. Guernet, and A. C. Boccara, J. Opt. (Paris) 26, 251 (1995).

Jansson, R.

G. Jin, R. Jansson, and H. Arwin, Rev. Sci. Instrum. 67, 2930 (1996).
[CrossRef]

Jin, G.

G. Jin, R. Jansson, and H. Arwin, Rev. Sci. Instrum. 67, 2930 (1996).
[CrossRef]

Leonhardt, K.

Linke, F.

F. Linke and R. Merkel, Rev. Sci. Instrum. 76, 063701 (2005).
[CrossRef]

Merkel, R.

F. Linke and R. Merkel, Rev. Sci. Instrum. 76, 063701 (2005).
[CrossRef]

Ohta, K.

Otsuki, S.

Ritz, V. H.

Saint-Jalmes, H.

Tamada, K.

Tao, Y.-T.

S. R. Wasserman, Y.-T. Tao, and G. M. Whitesides, Langmuir 5, 1074 (1989).
[CrossRef]

Tiziani, H. J.

Wakida, S.

Wasserman, S. R.

S. R. Wasserman, Y.-T. Tao, and G. M. Whitesides, Langmuir 5, 1074 (1989).
[CrossRef]

Whitesides, G. M.

S. R. Wasserman, Y.-T. Tao, and G. M. Whitesides, Langmuir 5, 1074 (1989).
[CrossRef]

Appl. Opt. (3)

J. Opt. (Paris) (1)

P. Gleyzes, F. Guernet, and A. C. Boccara, J. Opt. (Paris) 26, 251 (1995).

Langmuir (1)

S. R. Wasserman, Y.-T. Tao, and G. M. Whitesides, Langmuir 5, 1074 (1989).
[CrossRef]

Opt. Lett. (2)

Rev. Sci. Instrum. (3)

O. Acher, E. Bigan, and B. Drévillon, Rev. Sci. Instrum. 60, 65 (1989).
[CrossRef]

G. Jin, R. Jansson, and H. Arwin, Rev. Sci. Instrum. 67, 2930 (1996).
[CrossRef]

F. Linke and R. Merkel, Rev. Sci. Instrum. 76, 063701 (2005).
[CrossRef]

Other (1)

R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, 1987).

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Figures (2)

Fig. 1
Fig. 1

(a) Δ distribution of an ODS film irradiated through a mask by vacuum UV light. (b) Line profiles along the cross sections indicated in (a).

Fig. 2
Fig. 2

Variation of Δ with time at different 20 areas on a patterned ODS surface. (a) ODS surface (nonirradiated area), (b) silica surface (irradiated area). Typical data for each surface are shown by the thick black curves.

Equations (14)

Equations on this page are rendered with MathJax. Learn more.

I ( t ) = I 0 [ I DC + I S sin ( α sin ω t ) + I C cos ( α sin ω t ) ] ,
I DC = 1 ( cos 2 P + cos 2 A ) cos 2 Ψ + cos 2 P cos 2 A ,
I S = sin 2 P sin 2 A sin 2 Ψ sin Δ ,
I C = sin 2 P sin 2 A sin 2 Ψ cos Δ ,
I ( t ) = I 0 [ I DC + I C J 0 ( α ) ] + 2 I 0 I S m = 0 { J 2 m + 1 ( α ) sin [ ( 2 m + 1 ) ω t ] } + 2 I 0 I C m = 1 [ J 2 m ( α ) cos ( 2 m ω t ) ] ,
M ( t ) = 1 4 + 2 π m = 1 sin ( m π 4 ) m cos ( m ω t ) .
S p = 0 , 1 , 2 , 3 = 1 4 I 0 [ I DC + I C J 0 ( α ) ] 2 π I 0 I S m = 0 { J 2 m + 1 ( α ) 2 m + 1 sin [ ( 2 m + 1 ) π 4 ] sin [ ( 2 m + 1 ) p π 2 ] } + 2 π I 0 I C m = 1 [ J 2 m ( α ) 2 m sin [ m π 2 ] cos [ m p π ] ] .
S DC = S 0 + S 1 + S 2 + S 3 = I 0 [ I DC + I C J 0 ( α ) ] ,
S S = S 3 S 1 = I 0 I S J S ,
S C = S 0 S 1 + S 2 S 3 = I 0 I C J C ,
J S = 4 π m = 0 { ( 1 ) m J 2 m + 1 ( α ) 2 m + 1 sin [ ( 2 m + 1 ) π 4 ] } ,
J C = 8 π m = 0 [ ( 1 ) m J 4 m + 2 ( α ) 4 m + 2 ] .
I S = I S I C sin δ 0 ,
I C = I C + I S sin δ 0 ,

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