Abstract

Thermal imprinting of transparent tin phosphate glass was performed at 250°C using a fine-patterned silica mold. The glass sample was prepared by a conventional melt-quenching method and polished with a roughness of 10nm for imprinting experiments. The imprinting temperature is optimized based on experimental viscosity data. Scanning electron microscope and atomic force microscope observations revealed that a square grid pattern has a surface roughness of 10nm and 5μm×5μm squares with 1μm intervals and 90100nm depth. Diffraction spots due to the micropattern are demonstrated by illuminating He–Ne laser light.

© 2007 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Appl. Phys. Lett. 67, 3114 (1995).
    [Crossref]
  2. Y. Fainman, K. Tetz, R. Rokitski, and L. Pang, Opt. Photon. News 17(7), 24 (2006).
    [Crossref]
  3. J. P. Chu, H. Wijaya, C. W. Wu, T. R. Tsai, C. S. Wei, T. G. Nieh, and J. Wadsworth, Appl. Phys. Lett. 90, 034101 (2007).
    [Crossref]
  4. C. C. Huang, D. W. Hewak, and J. V. Badding, Opt. Express 12, 2501 (2004).
    [Crossref] [PubMed]
  5. P. G. Kazansky, V. Pruneri, and P. St. J. Russell, Opt. Lett. 20, 843 (1995).
    [Crossref] [PubMed]
  6. Y. Hirai, K. Kanakugi, T. Yamaguchi, K. Yao, S. Kitagawa, and Y. Tanaka, Microelectron. Eng. 67-68, 237 (2003).
    [Crossref]
  7. A. Y. Yi, Y. Chen, F. Klocke, G. Pongs, A. Demmer, D. Grewell, and A. Benatar, J. Micromech. Microeng. 16, 2000 (2006).
    [Crossref]
  8. H. Takebe, W. Nonaka, T. Kubo, J. Cha, and M. Kuwabara, J. Phys. Chem. Solids 68, 983 (2007).
    [Crossref]
  9. M. Guignard, L. Albrecht, and J. W. Zwanziger, Chem. Mater. 19, 286 (2007).
    [Crossref]
  10. N. Fukugami, M. Soma, M. Tada, and G. Suzuki, J. Printing Sci. Tech. 43, 441 (2006) [in Japanese].
  11. M. Bass, E. W. Van Stryland, D. R. Williams, and W. Wolf, in Handbook of Optics Volume II, 2nd ed. (McGraw-Hill, 1995), pp. 33.38-33.84.
  12. F. A. Jenkins and H. E. White, in Fundamentals of Optics, 4th ed. (McGraw-Hill, 1981), pp. 597-601.

2007 (3)

J. P. Chu, H. Wijaya, C. W. Wu, T. R. Tsai, C. S. Wei, T. G. Nieh, and J. Wadsworth, Appl. Phys. Lett. 90, 034101 (2007).
[Crossref]

H. Takebe, W. Nonaka, T. Kubo, J. Cha, and M. Kuwabara, J. Phys. Chem. Solids 68, 983 (2007).
[Crossref]

M. Guignard, L. Albrecht, and J. W. Zwanziger, Chem. Mater. 19, 286 (2007).
[Crossref]

2006 (3)

N. Fukugami, M. Soma, M. Tada, and G. Suzuki, J. Printing Sci. Tech. 43, 441 (2006) [in Japanese].

Y. Fainman, K. Tetz, R. Rokitski, and L. Pang, Opt. Photon. News 17(7), 24 (2006).
[Crossref]

A. Y. Yi, Y. Chen, F. Klocke, G. Pongs, A. Demmer, D. Grewell, and A. Benatar, J. Micromech. Microeng. 16, 2000 (2006).
[Crossref]

2004 (1)

2003 (1)

Y. Hirai, K. Kanakugi, T. Yamaguchi, K. Yao, S. Kitagawa, and Y. Tanaka, Microelectron. Eng. 67-68, 237 (2003).
[Crossref]

1995 (3)

S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Appl. Phys. Lett. 67, 3114 (1995).
[Crossref]

M. Bass, E. W. Van Stryland, D. R. Williams, and W. Wolf, in Handbook of Optics Volume II, 2nd ed. (McGraw-Hill, 1995), pp. 33.38-33.84.

P. G. Kazansky, V. Pruneri, and P. St. J. Russell, Opt. Lett. 20, 843 (1995).
[Crossref] [PubMed]

1981 (1)

F. A. Jenkins and H. E. White, in Fundamentals of Optics, 4th ed. (McGraw-Hill, 1981), pp. 597-601.

Albrecht, L.

M. Guignard, L. Albrecht, and J. W. Zwanziger, Chem. Mater. 19, 286 (2007).
[Crossref]

Badding, J. V.

Bass, M.

M. Bass, E. W. Van Stryland, D. R. Williams, and W. Wolf, in Handbook of Optics Volume II, 2nd ed. (McGraw-Hill, 1995), pp. 33.38-33.84.

Benatar, A.

A. Y. Yi, Y. Chen, F. Klocke, G. Pongs, A. Demmer, D. Grewell, and A. Benatar, J. Micromech. Microeng. 16, 2000 (2006).
[Crossref]

Cha, J.

H. Takebe, W. Nonaka, T. Kubo, J. Cha, and M. Kuwabara, J. Phys. Chem. Solids 68, 983 (2007).
[Crossref]

Chen, Y.

A. Y. Yi, Y. Chen, F. Klocke, G. Pongs, A. Demmer, D. Grewell, and A. Benatar, J. Micromech. Microeng. 16, 2000 (2006).
[Crossref]

Chou, S. Y.

S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Appl. Phys. Lett. 67, 3114 (1995).
[Crossref]

Chu, J. P.

J. P. Chu, H. Wijaya, C. W. Wu, T. R. Tsai, C. S. Wei, T. G. Nieh, and J. Wadsworth, Appl. Phys. Lett. 90, 034101 (2007).
[Crossref]

Demmer, A.

A. Y. Yi, Y. Chen, F. Klocke, G. Pongs, A. Demmer, D. Grewell, and A. Benatar, J. Micromech. Microeng. 16, 2000 (2006).
[Crossref]

Fainman, Y.

Y. Fainman, K. Tetz, R. Rokitski, and L. Pang, Opt. Photon. News 17(7), 24 (2006).
[Crossref]

Fukugami, N.

N. Fukugami, M. Soma, M. Tada, and G. Suzuki, J. Printing Sci. Tech. 43, 441 (2006) [in Japanese].

Grewell, D.

A. Y. Yi, Y. Chen, F. Klocke, G. Pongs, A. Demmer, D. Grewell, and A. Benatar, J. Micromech. Microeng. 16, 2000 (2006).
[Crossref]

Guignard, M.

M. Guignard, L. Albrecht, and J. W. Zwanziger, Chem. Mater. 19, 286 (2007).
[Crossref]

Hewak, D. W.

Hirai, Y.

Y. Hirai, K. Kanakugi, T. Yamaguchi, K. Yao, S. Kitagawa, and Y. Tanaka, Microelectron. Eng. 67-68, 237 (2003).
[Crossref]

Huang, C. C.

Jenkins, F. A.

F. A. Jenkins and H. E. White, in Fundamentals of Optics, 4th ed. (McGraw-Hill, 1981), pp. 597-601.

Kanakugi, K.

Y. Hirai, K. Kanakugi, T. Yamaguchi, K. Yao, S. Kitagawa, and Y. Tanaka, Microelectron. Eng. 67-68, 237 (2003).
[Crossref]

Kazansky, P. G.

Kitagawa, S.

Y. Hirai, K. Kanakugi, T. Yamaguchi, K. Yao, S. Kitagawa, and Y. Tanaka, Microelectron. Eng. 67-68, 237 (2003).
[Crossref]

Klocke, F.

A. Y. Yi, Y. Chen, F. Klocke, G. Pongs, A. Demmer, D. Grewell, and A. Benatar, J. Micromech. Microeng. 16, 2000 (2006).
[Crossref]

Krauss, P. R.

S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Appl. Phys. Lett. 67, 3114 (1995).
[Crossref]

Kubo, T.

H. Takebe, W. Nonaka, T. Kubo, J. Cha, and M. Kuwabara, J. Phys. Chem. Solids 68, 983 (2007).
[Crossref]

Kuwabara, M.

H. Takebe, W. Nonaka, T. Kubo, J. Cha, and M. Kuwabara, J. Phys. Chem. Solids 68, 983 (2007).
[Crossref]

Nieh, T. G.

J. P. Chu, H. Wijaya, C. W. Wu, T. R. Tsai, C. S. Wei, T. G. Nieh, and J. Wadsworth, Appl. Phys. Lett. 90, 034101 (2007).
[Crossref]

Nonaka, W.

H. Takebe, W. Nonaka, T. Kubo, J. Cha, and M. Kuwabara, J. Phys. Chem. Solids 68, 983 (2007).
[Crossref]

Pang, L.

Y. Fainman, K. Tetz, R. Rokitski, and L. Pang, Opt. Photon. News 17(7), 24 (2006).
[Crossref]

Pongs, G.

A. Y. Yi, Y. Chen, F. Klocke, G. Pongs, A. Demmer, D. Grewell, and A. Benatar, J. Micromech. Microeng. 16, 2000 (2006).
[Crossref]

Pruneri, V.

Renstrom, P. J.

S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Appl. Phys. Lett. 67, 3114 (1995).
[Crossref]

Rokitski, R.

Y. Fainman, K. Tetz, R. Rokitski, and L. Pang, Opt. Photon. News 17(7), 24 (2006).
[Crossref]

Russell, P. St. J.

Soma, M.

N. Fukugami, M. Soma, M. Tada, and G. Suzuki, J. Printing Sci. Tech. 43, 441 (2006) [in Japanese].

Suzuki, G.

N. Fukugami, M. Soma, M. Tada, and G. Suzuki, J. Printing Sci. Tech. 43, 441 (2006) [in Japanese].

Tada, M.

N. Fukugami, M. Soma, M. Tada, and G. Suzuki, J. Printing Sci. Tech. 43, 441 (2006) [in Japanese].

Takebe, H.

H. Takebe, W. Nonaka, T. Kubo, J. Cha, and M. Kuwabara, J. Phys. Chem. Solids 68, 983 (2007).
[Crossref]

Tanaka, Y.

Y. Hirai, K. Kanakugi, T. Yamaguchi, K. Yao, S. Kitagawa, and Y. Tanaka, Microelectron. Eng. 67-68, 237 (2003).
[Crossref]

Tetz, K.

Y. Fainman, K. Tetz, R. Rokitski, and L. Pang, Opt. Photon. News 17(7), 24 (2006).
[Crossref]

Tsai, T. R.

J. P. Chu, H. Wijaya, C. W. Wu, T. R. Tsai, C. S. Wei, T. G. Nieh, and J. Wadsworth, Appl. Phys. Lett. 90, 034101 (2007).
[Crossref]

Van Stryland, E. W.

M. Bass, E. W. Van Stryland, D. R. Williams, and W. Wolf, in Handbook of Optics Volume II, 2nd ed. (McGraw-Hill, 1995), pp. 33.38-33.84.

Wadsworth, J.

J. P. Chu, H. Wijaya, C. W. Wu, T. R. Tsai, C. S. Wei, T. G. Nieh, and J. Wadsworth, Appl. Phys. Lett. 90, 034101 (2007).
[Crossref]

Wei, C. S.

J. P. Chu, H. Wijaya, C. W. Wu, T. R. Tsai, C. S. Wei, T. G. Nieh, and J. Wadsworth, Appl. Phys. Lett. 90, 034101 (2007).
[Crossref]

White, H. E.

F. A. Jenkins and H. E. White, in Fundamentals of Optics, 4th ed. (McGraw-Hill, 1981), pp. 597-601.

Wijaya, H.

J. P. Chu, H. Wijaya, C. W. Wu, T. R. Tsai, C. S. Wei, T. G. Nieh, and J. Wadsworth, Appl. Phys. Lett. 90, 034101 (2007).
[Crossref]

Williams, D. R.

M. Bass, E. W. Van Stryland, D. R. Williams, and W. Wolf, in Handbook of Optics Volume II, 2nd ed. (McGraw-Hill, 1995), pp. 33.38-33.84.

Wolf, W.

M. Bass, E. W. Van Stryland, D. R. Williams, and W. Wolf, in Handbook of Optics Volume II, 2nd ed. (McGraw-Hill, 1995), pp. 33.38-33.84.

Wu, C. W.

J. P. Chu, H. Wijaya, C. W. Wu, T. R. Tsai, C. S. Wei, T. G. Nieh, and J. Wadsworth, Appl. Phys. Lett. 90, 034101 (2007).
[Crossref]

Yamaguchi, T.

Y. Hirai, K. Kanakugi, T. Yamaguchi, K. Yao, S. Kitagawa, and Y. Tanaka, Microelectron. Eng. 67-68, 237 (2003).
[Crossref]

Yao, K.

Y. Hirai, K. Kanakugi, T. Yamaguchi, K. Yao, S. Kitagawa, and Y. Tanaka, Microelectron. Eng. 67-68, 237 (2003).
[Crossref]

Yi, A. Y.

A. Y. Yi, Y. Chen, F. Klocke, G. Pongs, A. Demmer, D. Grewell, and A. Benatar, J. Micromech. Microeng. 16, 2000 (2006).
[Crossref]

Zwanziger, J. W.

M. Guignard, L. Albrecht, and J. W. Zwanziger, Chem. Mater. 19, 286 (2007).
[Crossref]

Appl. Phys. Lett. (2)

S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Appl. Phys. Lett. 67, 3114 (1995).
[Crossref]

J. P. Chu, H. Wijaya, C. W. Wu, T. R. Tsai, C. S. Wei, T. G. Nieh, and J. Wadsworth, Appl. Phys. Lett. 90, 034101 (2007).
[Crossref]

Chem. Mater. (1)

M. Guignard, L. Albrecht, and J. W. Zwanziger, Chem. Mater. 19, 286 (2007).
[Crossref]

J. Micromech. Microeng. (1)

A. Y. Yi, Y. Chen, F. Klocke, G. Pongs, A. Demmer, D. Grewell, and A. Benatar, J. Micromech. Microeng. 16, 2000 (2006).
[Crossref]

J. Phys. Chem. Solids (1)

H. Takebe, W. Nonaka, T. Kubo, J. Cha, and M. Kuwabara, J. Phys. Chem. Solids 68, 983 (2007).
[Crossref]

J. Printing Sci. Tech. (1)

N. Fukugami, M. Soma, M. Tada, and G. Suzuki, J. Printing Sci. Tech. 43, 441 (2006) [in Japanese].

Microelectron. Eng. (1)

Y. Hirai, K. Kanakugi, T. Yamaguchi, K. Yao, S. Kitagawa, and Y. Tanaka, Microelectron. Eng. 67-68, 237 (2003).
[Crossref]

Opt. Express (1)

Opt. Lett. (1)

Opt. Photon. News (1)

Y. Fainman, K. Tetz, R. Rokitski, and L. Pang, Opt. Photon. News 17(7), 24 (2006).
[Crossref]

Other (2)

M. Bass, E. W. Van Stryland, D. R. Williams, and W. Wolf, in Handbook of Optics Volume II, 2nd ed. (McGraw-Hill, 1995), pp. 33.38-33.84.

F. A. Jenkins and H. E. White, in Fundamentals of Optics, 4th ed. (McGraw-Hill, 1981), pp. 597-601.

Cited By

OSA participates in Crossref's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (4)

Fig. 1
Fig. 1

Macroscopic appearance of a Sn O P 2 O 5 glass thermally imprinted at 250 ° C for 5 min with 5N in vacuum.

Fig. 2
Fig. 2

SG micropattern thermally imprinted on the SP glass at (a) low and (b) high magnifications.

Fig. 3
Fig. 3

AFM image of the SG micropattern.

Fig. 4
Fig. 4

Optical diffraction of the SG micropattern. The pattern was irradiated by a He–Ne laser light from the perpendicular direction of glass surface.

Tables (1)

Tables Icon

Table 1 Properties of the Transparent Sn O P 2 O 5 Glass Used in This Work

Metrics