Abstract

A guided-mode resonance (GMR) filter with wide angular tolerances is experimentally demonstrated as an authentication label illuminated with unpolarized white light. The proposed filter, based on a free-standing silicon nitride membrane suspended on a silicon substrate, is fabricated by using anisotropic wet etching to remove the substrate beneath the silicon nitride layer. Both grating and waveguide structures without a lower cladding layer, i.e., a substrate, are fabricated simultaneously on a silicon nitride membrane. Since the silicon nitride is transparent within the spectra of visible and infrared light, such suspended-membrane-type GMR filters are well suited for applications within the visible spectrum. Moreover, the high refractive index of silicon nitride allows the proposed filters to have strongly modulated gratings and an immunity to high angular deviation. The measured reflection resonance has an angular tolerance up to ±5° under normal incidence for the wavelength of 629.5nm.

© 2007 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Silicon-based and suspended-membrane-type guided-mode resonance filters with a spectrum-modifying layer design

Mount-Learn Wu, Che-Lung Hsu, Yung-Chih Liu, Chih-Ming Wang, and Jenq-Yang Chang
Opt. Lett. 31(22) 3333-3335 (2006)

Guided-mode resonance filter with high-index substrate

Wenxing Liu, Hong Chen, and Zhenquan Lai
Opt. Lett. 37(22) 4648-4650 (2012)

Full-color reflectance-tunable filter based on liquid crystal cladded guided-mode resonant grating

Chun-Ta Wang, Hao-Hsiang Hou, Ping-Chien Chang, Cheng-Chang Li, Hung-Chang Jau, Yung-Jr Hung, and Tsung-Hsien Lin
Opt. Express 24(20) 22892-22898 (2016)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription