Abstract

A new white-light interferometry point sensor utilizing a chromatically dispersed depth detection field is addressed. Monitoring the interference in the optical frequency domain allows for microscopic height detection without the necessity of a mechanical axial scan. The problem of limited dynamic range in previously reported spectral interferometric schemes is solved by forming a high-contrast interference window due to the chromatically dispersed focusing of the detection field. In a proof-of-principle experiment, the position of a reflecting object could be retrieved with a focus of 0.8 NA over an axial range of 30μm by analyzing the phase of the emerging interference wavelets.

© 2006 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. G. Molesini, G. Pedrini, P. Poggi, and F. Quercioli, Opt. Commun. 49, 229 (1984).
    [CrossRef]
  2. M. A. Browne, O. Akinyemi, and A. Boyde, Scanning 14, 145 (1992).
    [CrossRef]
  3. H. J. Tiziani and H. M. Uhde, Appl. Opt. 33, 1838 (1994).
    [CrossRef] [PubMed]
  4. S. D. Cha, P. C. Lin, L. J. Zhu, P. C. Sun, and Y. Fainman, Appl. Opt. 39, 2605 (2000).
    [CrossRef]
  5. G. Li, P. C. Sun, C. Lin, and Y. Fainman, Opt. Lett. 25, 1505 (2000).
    [CrossRef]
  6. D. S. Mehta, M. Sugai, H. Hinosugi, S. Saito, M. Takeda, T. Kurokawa, H. Takahashi, M. Ando, M. Shishido, and T. Yoshizawa, Appl. Opt. 41, 3874 (2002).
    [CrossRef] [PubMed]
  7. J. Schwider and L. Zhou, Opt. Lett. 19, 995 (1994).
    [CrossRef] [PubMed]
  8. P. Sandoz, G. Tribillon, and H. Perrin, J. Mod. Opt. 43, 710 (1996).
  9. J. Calatroni, A. L. Guerrero, C. Sainz, and R. Escalona, Opt. Laser Technol. 28, 485 (1996).
    [CrossRef]
  10. T. Endo, Y. Yasuno, S. Makita, M. Itoh, and T. Yatagai, Opt. Express 13, 695 (2005).
    [CrossRef] [PubMed]
  11. P. Pavlicek and G. Häusler, Appl. Opt. 44, 2978 (2005).
    [CrossRef] [PubMed]
  12. E. Papastathopoulos, K. Körner, and W. Osten, in FRINGE 2005 Proceedings of the Fifth International Workshop on Automatic Processing of Fringe Patterns, W.Osten, ed. (Springer, 2005), pp. 694-701.

2005

2002

2000

1996

P. Sandoz, G. Tribillon, and H. Perrin, J. Mod. Opt. 43, 710 (1996).

J. Calatroni, A. L. Guerrero, C. Sainz, and R. Escalona, Opt. Laser Technol. 28, 485 (1996).
[CrossRef]

1994

1992

M. A. Browne, O. Akinyemi, and A. Boyde, Scanning 14, 145 (1992).
[CrossRef]

1984

G. Molesini, G. Pedrini, P. Poggi, and F. Quercioli, Opt. Commun. 49, 229 (1984).
[CrossRef]

Akinyemi, O.

M. A. Browne, O. Akinyemi, and A. Boyde, Scanning 14, 145 (1992).
[CrossRef]

Ando, M.

Boyde, A.

M. A. Browne, O. Akinyemi, and A. Boyde, Scanning 14, 145 (1992).
[CrossRef]

Browne, M. A.

M. A. Browne, O. Akinyemi, and A. Boyde, Scanning 14, 145 (1992).
[CrossRef]

Calatroni, J.

J. Calatroni, A. L. Guerrero, C. Sainz, and R. Escalona, Opt. Laser Technol. 28, 485 (1996).
[CrossRef]

Cha, S. D.

Endo, T.

Escalona, R.

J. Calatroni, A. L. Guerrero, C. Sainz, and R. Escalona, Opt. Laser Technol. 28, 485 (1996).
[CrossRef]

Fainman, Y.

Guerrero, A. L.

J. Calatroni, A. L. Guerrero, C. Sainz, and R. Escalona, Opt. Laser Technol. 28, 485 (1996).
[CrossRef]

Häusler, G.

Hinosugi, H.

Itoh, M.

Körner, K.

E. Papastathopoulos, K. Körner, and W. Osten, in FRINGE 2005 Proceedings of the Fifth International Workshop on Automatic Processing of Fringe Patterns, W.Osten, ed. (Springer, 2005), pp. 694-701.

Kurokawa, T.

Li, G.

Lin, C.

Lin, P. C.

Makita, S.

Mehta, D. S.

Molesini, G.

G. Molesini, G. Pedrini, P. Poggi, and F. Quercioli, Opt. Commun. 49, 229 (1984).
[CrossRef]

Osten, W.

E. Papastathopoulos, K. Körner, and W. Osten, in FRINGE 2005 Proceedings of the Fifth International Workshop on Automatic Processing of Fringe Patterns, W.Osten, ed. (Springer, 2005), pp. 694-701.

Papastathopoulos, E.

E. Papastathopoulos, K. Körner, and W. Osten, in FRINGE 2005 Proceedings of the Fifth International Workshop on Automatic Processing of Fringe Patterns, W.Osten, ed. (Springer, 2005), pp. 694-701.

Pavlicek, P.

Pedrini, G.

G. Molesini, G. Pedrini, P. Poggi, and F. Quercioli, Opt. Commun. 49, 229 (1984).
[CrossRef]

Perrin, H.

P. Sandoz, G. Tribillon, and H. Perrin, J. Mod. Opt. 43, 710 (1996).

Poggi, P.

G. Molesini, G. Pedrini, P. Poggi, and F. Quercioli, Opt. Commun. 49, 229 (1984).
[CrossRef]

Quercioli, F.

G. Molesini, G. Pedrini, P. Poggi, and F. Quercioli, Opt. Commun. 49, 229 (1984).
[CrossRef]

Sainz, C.

J. Calatroni, A. L. Guerrero, C. Sainz, and R. Escalona, Opt. Laser Technol. 28, 485 (1996).
[CrossRef]

Saito, S.

Sandoz, P.

P. Sandoz, G. Tribillon, and H. Perrin, J. Mod. Opt. 43, 710 (1996).

Schwider, J.

Shishido, M.

Sugai, M.

Sun, P. C.

Takahashi, H.

Takeda, M.

Tiziani, H. J.

Tribillon, G.

P. Sandoz, G. Tribillon, and H. Perrin, J. Mod. Opt. 43, 710 (1996).

Uhde, H. M.

Yasuno, Y.

Yatagai, T.

Yoshizawa, T.

Zhou, L.

Zhu, L. J.

Appl. Opt.

J. Mod. Opt.

P. Sandoz, G. Tribillon, and H. Perrin, J. Mod. Opt. 43, 710 (1996).

Opt. Commun.

G. Molesini, G. Pedrini, P. Poggi, and F. Quercioli, Opt. Commun. 49, 229 (1984).
[CrossRef]

Opt. Express

Opt. Laser Technol.

J. Calatroni, A. L. Guerrero, C. Sainz, and R. Escalona, Opt. Laser Technol. 28, 485 (1996).
[CrossRef]

Opt. Lett.

Scanning

M. A. Browne, O. Akinyemi, and A. Boyde, Scanning 14, 145 (1992).
[CrossRef]

Other

E. Papastathopoulos, K. Körner, and W. Osten, in FRINGE 2005 Proceedings of the Fifth International Workshop on Automatic Processing of Fringe Patterns, W.Osten, ed. (Springer, 2005), pp. 694-701.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (2)

Fig. 1
Fig. 1

Schematic representation of the interferometric setup. GVD, group velocity dispersion.

Fig. 2
Fig. 2

Resulting interference wavelets acquired for various axial positions of the reflecting object. The retrieved position is indicated accordingly at the top right of each graph.

Equations (1)

Equations on this page are rendered with MathJax. Learn more.

z = OPD 2 = 1 2 d ϕ d k .

Metrics