Abstract

Images with a spatial resolution of 120150nm were obtained with 46.9nm light from a compact capillary-discharge laser by use of the combination of a Sc–Si multilayer-coated Schwarzschild condenser and a free-standing imaging zone plate. The results are relevant to the development of compact extreme-ultraviolet laser-based imaging tools for nanoscience and nanotechnology.

© 2005 Optical Society of America

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