Abstract

Images with a spatial resolution of 120–150?nm were obtained with 46.9?nm light from a compact capillary-discharge laser by use of the combination of a Sc–Si multilayer-coated Schwarzschild condenser and a free-standing imaging zone plate. The results are relevant to the development of compact extreme-ultraviolet laser-based imaging tools for nanoscience and nanotechnology.

© 2005 Optical Society of America

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    [CrossRef]
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2003 (1)

2002 (2)

M. Wieland, R. Frueke, T. Wilhein, C. Spielmann, M. Pohl, and U. Kleineberg, Appl. Phys. Lett. 81, 2520 (2002).
[CrossRef]

G. A. Johansson, A. Holmberg, H. M. Hertz, and M. Berglund, Rev. Sci. Instrum. 73, 1193 (2002).
[CrossRef]

2001 (1)

Y. Liu, M. Seminario, F. G. Tomasel, C. Chang, J. J. Rocca, and D. T. Attwood, Phys. Rev. A 63, 033802 (2001).
[CrossRef]

2000 (1)

E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. Chao, A. Lucero, L. Johnson, and D. Attwood, J. Vac. Sci. Technol. B 18, 2970 (2000).
[CrossRef]

1999 (1)

1998 (2)

1995 (1)

1992 (2)

1989 (1)

1987 (1)

The simulations were performed with the SPLAT program described in K. K. H. Toh and A. R. Neureuther, Proc. SPIE 772, 202 (1987). The program can be accessed at http://cuervo.eecs.berkeley.edu/Volcano/.
[CrossRef]

Alessi, D.

Y. Wang, M. A. Larotonda, B. M. Luther, D. Alessi, M. Berrill, V. N. Shlyaptsev, and J. J. Rocca, “Demonstration of saturated high repetition rate tabletop soft x-ray lasers at wavelengths down to 13.9 nm,” submitted to Phys. Rev. A.

Anderson, E.

Anderson, E. H.

E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. Chao, A. Lucero, L. Johnson, and D. Attwood, J. Vac. Sci. Technol. B 18, 2970 (2000).
[CrossRef]

Artioukov, I. A.

Asadchikov, V. E.

Attwood, D.

E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. Chao, A. Lucero, L. Johnson, and D. Attwood, J. Vac. Sci. Technol. B 18, 2970 (2000).
[CrossRef]

Attwood, D. T.

W. Chao, E. Anderson, G. P. Denbeaux, B. Harteneck, J. A. Liddle, D. L. Olynick, A. L. Pearson, F. Salmassi, C. Y. Song, and D. T. Attwood, Opt. Lett. 28, 2019 (2003).
[CrossRef] [PubMed]

Y. Liu, M. Seminario, F. G. Tomasel, C. Chang, J. J. Rocca, and D. T. Attwood, Phys. Rev. A 63, 033802 (2001).
[CrossRef]

L. B. Da Silva, J. E. Trebes, S. Mrowka, T. W. Barbee, J. Brase, J. A. Koch, R. A. London, B. J. MacGowan, D. L. Matthews, D. Minyard, G. Stone, T. Yorkey, E. Anderson, D. T. Attwood, and D. Kern, Opt. Lett. 17, 754 (1992).
[CrossRef] [PubMed]

A. R. Libertun, X. Zhang, A. Paul, D. Raymondson, E. Gershgoren, E. Gagnon, S. Backus, M. M. Murnane, H. C. Kapteyn, R. A. Bartels, Y. Liu, and D. T. Attwood, in Conference on Lasers and Electro-Optics (CLEO), Vol. 96 of OSA Trends in Optics and Photonics Series (Optical Society of America, 2004), paper JMD4.

Backus, S.

A. R. Libertun, X. Zhang, A. Paul, D. Raymondson, E. Gershgoren, E. Gagnon, S. Backus, M. M. Murnane, H. C. Kapteyn, R. A. Bartels, Y. Liu, and D. T. Attwood, in Conference on Lasers and Electro-Optics (CLEO), Vol. 96 of OSA Trends in Optics and Photonics Series (Optical Society of America, 2004), paper JMD4.

Barbee, T. W.

Bartels, R. A.

A. R. Libertun, X. Zhang, A. Paul, D. Raymondson, E. Gershgoren, E. Gagnon, S. Backus, M. M. Murnane, H. C. Kapteyn, R. A. Bartels, Y. Liu, and D. T. Attwood, in Conference on Lasers and Electro-Optics (CLEO), Vol. 96 of OSA Trends in Optics and Photonics Series (Optical Society of America, 2004), paper JMD4.

Benware, B. R.

C. D. Macchietto, B. R. Benware, and J. J. Rocca, Opt. Lett. 24, 1115 (1999).
[CrossRef]

B. R. Benware, C. D. Macchietto, C. H. Moreno, and J. J. Rocca, Phys. Rev. Lett. 81, 5804 (1998).
[CrossRef]

Berglund, M.

G. A. Johansson, A. Holmberg, H. M. Hertz, and M. Berglund, Rev. Sci. Instrum. 73, 1193 (2002).
[CrossRef]

Berrill, M.

Y. Wang, M. A. Larotonda, B. M. Luther, D. Alessi, M. Berrill, V. N. Shlyaptsev, and J. J. Rocca, “Demonstration of saturated high repetition rate tabletop soft x-ray lasers at wavelengths down to 13.9 nm,” submitted to Phys. Rev. A.

Born, M.

M. Born and E. Wolf, Principles of Optics (Cambridge U. Press, 1999), pp. 461–472, 595–606.

Brase, J.

Byer, R. L.

Chang, C.

Y. Liu, M. Seminario, F. G. Tomasel, C. Chang, J. J. Rocca, and D. T. Attwood, Phys. Rev. A 63, 033802 (2001).
[CrossRef]

Chao, W.

W. Chao, E. Anderson, G. P. Denbeaux, B. Harteneck, J. A. Liddle, D. L. Olynick, A. L. Pearson, F. Salmassi, C. Y. Song, and D. T. Attwood, Opt. Lett. 28, 2019 (2003).
[CrossRef] [PubMed]

E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. Chao, A. Lucero, L. Johnson, and D. Attwood, J. Vac. Sci. Technol. B 18, 2970 (2000).
[CrossRef]

Da Silva, L. B.

Denbeaux, G.

E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. Chao, A. Lucero, L. Johnson, and D. Attwood, J. Vac. Sci. Technol. B 18, 2970 (2000).
[CrossRef]

Denbeaux, G. P.

DiCicco, D. S.

Fedorenko, A. I.

Fedotov, V. Yu.

Frueke, R.

M. Wieland, R. Frueke, T. Wilhein, C. Spielmann, M. Pohl, and U. Kleineberg, Appl. Phys. Lett. 81, 2520 (2002).
[CrossRef]

Gagnon, E.

A. R. Libertun, X. Zhang, A. Paul, D. Raymondson, E. Gershgoren, E. Gagnon, S. Backus, M. M. Murnane, H. C. Kapteyn, R. A. Bartels, Y. Liu, and D. T. Attwood, in Conference on Lasers and Electro-Optics (CLEO), Vol. 96 of OSA Trends in Optics and Photonics Series (Optical Society of America, 2004), paper JMD4.

Gershgoren, E.

A. R. Libertun, X. Zhang, A. Paul, D. Raymondson, E. Gershgoren, E. Gagnon, S. Backus, M. M. Murnane, H. C. Kapteyn, R. A. Bartels, Y. Liu, and D. T. Attwood, in Conference on Lasers and Electro-Optics (CLEO), Vol. 96 of OSA Trends in Optics and Photonics Series (Optical Society of America, 2004), paper JMD4.

Harteneck, B.

W. Chao, E. Anderson, G. P. Denbeaux, B. Harteneck, J. A. Liddle, D. L. Olynick, A. L. Pearson, F. Salmassi, C. Y. Song, and D. T. Attwood, Opt. Lett. 28, 2019 (2003).
[CrossRef] [PubMed]

E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. Chao, A. Lucero, L. Johnson, and D. Attwood, J. Vac. Sci. Technol. B 18, 2970 (2000).
[CrossRef]

Hertz, H. M.

G. A. Johansson, A. Holmberg, H. M. Hertz, and M. Berglund, Rev. Sci. Instrum. 73, 1193 (2002).
[CrossRef]

Holmberg, A.

G. A. Johansson, A. Holmberg, H. M. Hertz, and M. Berglund, Rev. Sci. Instrum. 73, 1193 (2002).
[CrossRef]

Johansson, G. A.

G. A. Johansson, A. Holmberg, H. M. Hertz, and M. Berglund, Rev. Sci. Instrum. 73, 1193 (2002).
[CrossRef]

Johnson, L.

E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. Chao, A. Lucero, L. Johnson, and D. Attwood, J. Vac. Sci. Technol. B 18, 2970 (2000).
[CrossRef]

Kapteyn, H. C.

A. R. Libertun, X. Zhang, A. Paul, D. Raymondson, E. Gershgoren, E. Gagnon, S. Backus, M. M. Murnane, H. C. Kapteyn, R. A. Bartels, Y. Liu, and D. T. Attwood, in Conference on Lasers and Electro-Optics (CLEO), Vol. 96 of OSA Trends in Optics and Photonics Series (Optical Society of America, 2004), paper JMD4.

Kasyanov, Y. S.

Kern, D.

Kim, D.

Kleineberg, U.

M. Wieland, R. Frueke, T. Wilhein, C. Spielmann, M. Pohl, and U. Kleineberg, Appl. Phys. Lett. 81, 2520 (2002).
[CrossRef]

Koch, J. A.

Kondratenko, V. V.

Larotonda, M. A.

Y. Wang, M. A. Larotonda, B. M. Luther, D. Alessi, M. Berrill, V. N. Shlyaptsev, and J. J. Rocca, “Demonstration of saturated high repetition rate tabletop soft x-ray lasers at wavelengths down to 13.9 nm,” submitted to Phys. Rev. A.

Levashov, V. E.

Libertun, A. R.

A. R. Libertun, X. Zhang, A. Paul, D. Raymondson, E. Gershgoren, E. Gagnon, S. Backus, M. M. Murnane, H. C. Kapteyn, R. A. Bartels, Y. Liu, and D. T. Attwood, in Conference on Lasers and Electro-Optics (CLEO), Vol. 96 of OSA Trends in Optics and Photonics Series (Optical Society of America, 2004), paper JMD4.

Liddle, J. A.

Liu, Y.

Y. Liu, M. Seminario, F. G. Tomasel, C. Chang, J. J. Rocca, and D. T. Attwood, Phys. Rev. A 63, 033802 (2001).
[CrossRef]

A. R. Libertun, X. Zhang, A. Paul, D. Raymondson, E. Gershgoren, E. Gagnon, S. Backus, M. M. Murnane, H. C. Kapteyn, R. A. Bartels, Y. Liu, and D. T. Attwood, in Conference on Lasers and Electro-Optics (CLEO), Vol. 96 of OSA Trends in Optics and Photonics Series (Optical Society of America, 2004), paper JMD4.

London, R. A.

Lucero, A.

E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. Chao, A. Lucero, L. Johnson, and D. Attwood, J. Vac. Sci. Technol. B 18, 2970 (2000).
[CrossRef]

Luther, B. M.

Y. Wang, M. A. Larotonda, B. M. Luther, D. Alessi, M. Berrill, V. N. Shlyaptsev, and J. J. Rocca, “Demonstration of saturated high repetition rate tabletop soft x-ray lasers at wavelengths down to 13.9 nm,” submitted to Phys. Rev. A.

Macchietto, C. D.

C. D. Macchietto, B. R. Benware, and J. J. Rocca, Opt. Lett. 24, 1115 (1999).
[CrossRef]

B. R. Benware, C. D. Macchietto, C. H. Moreno, and J. J. Rocca, Phys. Rev. Lett. 81, 5804 (1998).
[CrossRef]

MacGowan, B. J.

Matthews, D. L.

Minyard, D.

Moreno, C. H.

B. R. Benware, C. D. Macchietto, C. H. Moreno, and J. J. Rocca, Phys. Rev. Lett. 81, 5804 (1998).
[CrossRef]

Mrowka, S.

Murnane, M. M.

A. R. Libertun, X. Zhang, A. Paul, D. Raymondson, E. Gershgoren, E. Gagnon, S. Backus, M. M. Murnane, H. C. Kapteyn, R. A. Bartels, Y. Liu, and D. T. Attwood, in Conference on Lasers and Electro-Optics (CLEO), Vol. 96 of OSA Trends in Optics and Photonics Series (Optical Society of America, 2004), paper JMD4.

Neureuther, A. R.

The simulations were performed with the SPLAT program described in K. K. H. Toh and A. R. Neureuther, Proc. SPIE 772, 202 (1987). The program can be accessed at http://cuervo.eecs.berkeley.edu/Volcano/.
[CrossRef]

Olynick, D. L.

W. Chao, E. Anderson, G. P. Denbeaux, B. Harteneck, J. A. Liddle, D. L. Olynick, A. L. Pearson, F. Salmassi, C. Y. Song, and D. T. Attwood, Opt. Lett. 28, 2019 (2003).
[CrossRef] [PubMed]

E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. Chao, A. Lucero, L. Johnson, and D. Attwood, J. Vac. Sci. Technol. B 18, 2970 (2000).
[CrossRef]

Paul, A.

A. R. Libertun, X. Zhang, A. Paul, D. Raymondson, E. Gershgoren, E. Gagnon, S. Backus, M. M. Murnane, H. C. Kapteyn, R. A. Bartels, Y. Liu, and D. T. Attwood, in Conference on Lasers and Electro-Optics (CLEO), Vol. 96 of OSA Trends in Optics and Photonics Series (Optical Society of America, 2004), paper JMD4.

Pearson, A. L.

Pershin, Yu. P.

Pohl, M.

M. Wieland, R. Frueke, T. Wilhein, C. Spielmann, M. Pohl, and U. Kleineberg, Appl. Phys. Lett. 81, 2520 (2002).
[CrossRef]

Raymondson, D.

A. R. Libertun, X. Zhang, A. Paul, D. Raymondson, E. Gershgoren, E. Gagnon, S. Backus, M. M. Murnane, H. C. Kapteyn, R. A. Bartels, Y. Liu, and D. T. Attwood, in Conference on Lasers and Electro-Optics (CLEO), Vol. 96 of OSA Trends in Optics and Photonics Series (Optical Society of America, 2004), paper JMD4.

Rocca, J. J.

Y. Liu, M. Seminario, F. G. Tomasel, C. Chang, J. J. Rocca, and D. T. Attwood, Phys. Rev. A 63, 033802 (2001).
[CrossRef]

C. D. Macchietto, B. R. Benware, and J. J. Rocca, Opt. Lett. 24, 1115 (1999).
[CrossRef]

B. R. Benware, C. D. Macchietto, C. H. Moreno, and J. J. Rocca, Phys. Rev. Lett. 81, 5804 (1998).
[CrossRef]

Y. Wang, M. A. Larotonda, B. M. Luther, D. Alessi, M. Berrill, V. N. Shlyaptsev, and J. J. Rocca, “Demonstration of saturated high repetition rate tabletop soft x-ray lasers at wavelengths down to 13.9 nm,” submitted to Phys. Rev. A.

Rosser, R.

Salmassi, F.

Seminario, M.

Y. Liu, M. Seminario, F. G. Tomasel, C. Chang, J. J. Rocca, and D. T. Attwood, Phys. Rev. A 63, 033802 (2001).
[CrossRef]

Serov, R. V.

Shlyaptsev, V. N.

Y. Wang, M. A. Larotonda, B. M. Luther, D. Alessi, M. Berrill, V. N. Shlyaptsev, and J. J. Rocca, “Demonstration of saturated high repetition rate tabletop soft x-ray lasers at wavelengths down to 13.9 nm,” submitted to Phys. Rev. A.

Song, C. Y.

Spielmann, C.

M. Wieland, R. Frueke, T. Wilhein, C. Spielmann, M. Pohl, and U. Kleineberg, Appl. Phys. Lett. 81, 2520 (2002).
[CrossRef]

Stone, G.

Suckewer, S.

Toh, K. K. H.

The simulations were performed with the SPLAT program described in K. K. H. Toh and A. R. Neureuther, Proc. SPIE 772, 202 (1987). The program can be accessed at http://cuervo.eecs.berkeley.edu/Volcano/.
[CrossRef]

Tomasel, F. G.

Y. Liu, M. Seminario, F. G. Tomasel, C. Chang, J. J. Rocca, and D. T. Attwood, Phys. Rev. A 63, 033802 (2001).
[CrossRef]

Trail, J. A.

Trebes, J. E.

Uspenskii, Yu. A.

Veklerov, E.

E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. Chao, A. Lucero, L. Johnson, and D. Attwood, J. Vac. Sci. Technol. B 18, 2970 (2000).
[CrossRef]

Vinogradov, A. V.

Wang, Y.

Y. Wang, M. A. Larotonda, B. M. Luther, D. Alessi, M. Berrill, V. N. Shlyaptsev, and J. J. Rocca, “Demonstration of saturated high repetition rate tabletop soft x-ray lasers at wavelengths down to 13.9 nm,” submitted to Phys. Rev. A.

Wieland, M.

M. Wieland, R. Frueke, T. Wilhein, C. Spielmann, M. Pohl, and U. Kleineberg, Appl. Phys. Lett. 81, 2520 (2002).
[CrossRef]

Wilhein, T.

M. Wieland, R. Frueke, T. Wilhein, C. Spielmann, M. Pohl, and U. Kleineberg, Appl. Phys. Lett. 81, 2520 (2002).
[CrossRef]

Wolf, E.

M. Born and E. Wolf, Principles of Optics (Cambridge U. Press, 1999), pp. 461–472, 595–606.

Yorkey, T.

Yulin, S. A.

Zhang, X.

A. R. Libertun, X. Zhang, A. Paul, D. Raymondson, E. Gershgoren, E. Gagnon, S. Backus, M. M. Murnane, H. C. Kapteyn, R. A. Bartels, Y. Liu, and D. T. Attwood, in Conference on Lasers and Electro-Optics (CLEO), Vol. 96 of OSA Trends in Optics and Photonics Series (Optical Society of America, 2004), paper JMD4.

Zubarev, E. N.

Appl. Phys. Lett. (1)

M. Wieland, R. Frueke, T. Wilhein, C. Spielmann, M. Pohl, and U. Kleineberg, Appl. Phys. Lett. 81, 2520 (2002).
[CrossRef]

J. Vac. Sci. Technol. B (1)

E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. Chao, A. Lucero, L. Johnson, and D. Attwood, J. Vac. Sci. Technol. B 18, 2970 (2000).
[CrossRef]

Opt. Lett. (7)

Phys. Rev. A (1)

Y. Liu, M. Seminario, F. G. Tomasel, C. Chang, J. J. Rocca, and D. T. Attwood, Phys. Rev. A 63, 033802 (2001).
[CrossRef]

Phys. Rev. Lett. (1)

B. R. Benware, C. D. Macchietto, C. H. Moreno, and J. J. Rocca, Phys. Rev. Lett. 81, 5804 (1998).
[CrossRef]

Proc. SPIE (1)

The simulations were performed with the SPLAT program described in K. K. H. Toh and A. R. Neureuther, Proc. SPIE 772, 202 (1987). The program can be accessed at http://cuervo.eecs.berkeley.edu/Volcano/.
[CrossRef]

Rev. Sci. Instrum. (1)

G. A. Johansson, A. Holmberg, H. M. Hertz, and M. Berglund, Rev. Sci. Instrum. 73, 1193 (2002).
[CrossRef]

Other (3)

A. R. Libertun, X. Zhang, A. Paul, D. Raymondson, E. Gershgoren, E. Gagnon, S. Backus, M. M. Murnane, H. C. Kapteyn, R. A. Bartels, Y. Liu, and D. T. Attwood, in Conference on Lasers and Electro-Optics (CLEO), Vol. 96 of OSA Trends in Optics and Photonics Series (Optical Society of America, 2004), paper JMD4.

Y. Wang, M. A. Larotonda, B. M. Luther, D. Alessi, M. Berrill, V. N. Shlyaptsev, and J. J. Rocca, “Demonstration of saturated high repetition rate tabletop soft x-ray lasers at wavelengths down to 13.9 nm,” submitted to Phys. Rev. A.

M. Born and E. Wolf, Principles of Optics (Cambridge U. Press, 1999), pp. 461–472, 595–606.

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