Abstract

Achievement of more than 100 mW of pure continuous-wave deep-ultraviolet radiation at 213 nm has been demonstrated in an efficient all-solid-state laser system that uses two Brewster-cut CsLiB6O10 (CLBO) crystals. The first crystal is used for 266-nm generation by external resonant doubling of 532-nm radiation from a frequency-doubled Nd:YVO4 laser. Subsequent sum-frequency mixing is performed in a second CLBO crystal placed in a diode-pumped Nd:YAG laser cavity to mix the single-pass 266-nm output with circulating 1064-nm light.

© 2004 Optical Society of America

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2004 (1)

2003 (2)

K. F. Wall, J. S. Smucz, B. Pati, Y. Isyanova, and P. F. Moulton, IEEE J. Quantum Electron. 39, 1160 (2003).
[CrossRef]

D. G. Gerstenberger, T. M. Trautmann, and M. S. Bowers, Opt. Lett. 28, 1242 (2003).
[CrossRef] [PubMed]

2000 (1)

1997 (2)

1996 (1)

1990 (1)

R. C. Eckardt, H. Masuda, Y. X. Fan, and R. L. Byer, IEEE J. Quantum Electron. 26, 922 (1990).
[CrossRef]

1968 (1)

G. D. Boyd and D. A. Kleinman, J. Appl. Phys. 39, 3597 (1968).
[CrossRef]

Asakawa, Y.

Bergquist, J. C.

Berkeland, D. J.

Bowers, M. S.

Boyd, G. D.

G. D. Boyd and D. A. Kleinman, J. Appl. Phys. 39, 3597 (1968).
[CrossRef]

Byer, R. L.

R. C. Eckardt, H. Masuda, Y. X. Fan, and R. L. Byer, IEEE J. Quantum Electron. 26, 922 (1990).
[CrossRef]

Cruz, F. C.

Deki, K.

J. Sakuma, K. Deki, A. Finch, Y. Ohsako, and T. Yokota, Appl. Opt. 39, 5505 (2000).
[CrossRef]

A. Finch, Y. Ohsako, J. Sakuma, K. Deki, M. Horiguchi, Y. Mori, T. Sasaki, K. Wall, J. Harrison, P. F. Moulton, and J. Manni, in Advanced Solid-State Lasers, W. R. Bosenberg and M. M. Fejer, eds., Vol. 19 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 1998), p. 16.

Eckardt, R. C.

R. C. Eckardt, H. Masuda, Y. X. Fan, and R. L. Byer, IEEE J. Quantum Electron. 26, 922 (1990).
[CrossRef]

Eguchi, N.

H. Masuda, K. Kimura, N. Eguchi, and S. Kubota, in Advanced Solid-State Lasers, C. Marshall, ed., Vol. 50 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), p. 490.

Fan, Y. X.

R. C. Eckardt, H. Masuda, Y. X. Fan, and R. L. Byer, IEEE J. Quantum Electron. 26, 922 (1990).
[CrossRef]

Finch, A.

J. Sakuma, K. Deki, A. Finch, Y. Ohsako, and T. Yokota, Appl. Opt. 39, 5505 (2000).
[CrossRef]

A. Finch, Y. Ohsako, J. Sakuma, K. Deki, M. Horiguchi, Y. Mori, T. Sasaki, K. Wall, J. Harrison, P. F. Moulton, and J. Manni, in Advanced Solid-State Lasers, W. R. Bosenberg and M. M. Fejer, eds., Vol. 19 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 1998), p. 16.

Gerstenberger, D. G.

Harrison, J.

A. Finch, Y. Ohsako, J. Sakuma, K. Deki, M. Horiguchi, Y. Mori, T. Sasaki, K. Wall, J. Harrison, P. F. Moulton, and J. Manni, in Advanced Solid-State Lasers, W. R. Bosenberg and M. M. Fejer, eds., Vol. 19 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 1998), p. 16.

Horiguchi, M.

A. Finch, Y. Ohsako, J. Sakuma, K. Deki, M. Horiguchi, Y. Mori, T. Sasaki, K. Wall, J. Harrison, P. F. Moulton, and J. Manni, in Advanced Solid-State Lasers, W. R. Bosenberg and M. M. Fejer, eds., Vol. 19 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 1998), p. 16.

Imai, S.

S. Imai, H. Inoue, T. Nomura, and T. Tojo, in Advanced Solid-State Photonics, J. Zayhowski, ed., Vol. 83 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2003), p. 380.

Inagaki, M.

Inoue, H.

S. Imai, H. Inoue, T. Nomura, and T. Tojo, in Advanced Solid-State Photonics, J. Zayhowski, ed., Vol. 83 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2003), p. 380.

Isyanova, Y.

K. F. Wall, J. S. Smucz, B. Pati, Y. Isyanova, and P. F. Moulton, IEEE J. Quantum Electron. 39, 1160 (2003).
[CrossRef]

Kaneda, Y.

Kimura, K.

H. Masuda, K. Kimura, N. Eguchi, and S. Kubota, in Advanced Solid-State Lasers, C. Marshall, ed., Vol. 50 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), p. 490.

Kleinman, D. A.

G. D. Boyd and D. A. Kleinman, J. Appl. Phys. 39, 3597 (1968).
[CrossRef]

Kubota, S.

Y. Kaneda and S. Kubota, Appl. Opt. 36, 7766 (1997).
[CrossRef]

H. Masuda, K. Kimura, N. Eguchi, and S. Kubota, in Advanced Solid-State Lasers, C. Marshall, ed., Vol. 50 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), p. 490.

Manni, J.

A. Finch, Y. Ohsako, J. Sakuma, K. Deki, M. Horiguchi, Y. Mori, T. Sasaki, K. Wall, J. Harrison, P. F. Moulton, and J. Manni, in Advanced Solid-State Lasers, W. R. Bosenberg and M. M. Fejer, eds., Vol. 19 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 1998), p. 16.

Masuda, H.

R. C. Eckardt, H. Masuda, Y. X. Fan, and R. L. Byer, IEEE J. Quantum Electron. 26, 922 (1990).
[CrossRef]

H. Masuda, K. Kimura, N. Eguchi, and S. Kubota, in Advanced Solid-State Lasers, C. Marshall, ed., Vol. 50 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), p. 490.

Mori, Y.

Y. K. Yap, M. Inagaki, S. Nakajima, Y. Mori, and T. Sasaki, Opt. Lett. 21, 1348 (1996).
[CrossRef] [PubMed]

A. Finch, Y. Ohsako, J. Sakuma, K. Deki, M. Horiguchi, Y. Mori, T. Sasaki, K. Wall, J. Harrison, P. F. Moulton, and J. Manni, in Advanced Solid-State Lasers, W. R. Bosenberg and M. M. Fejer, eds., Vol. 19 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 1998), p. 16.

Moulton, P. F.

K. F. Wall, J. S. Smucz, B. Pati, Y. Isyanova, and P. F. Moulton, IEEE J. Quantum Electron. 39, 1160 (2003).
[CrossRef]

A. Finch, Y. Ohsako, J. Sakuma, K. Deki, M. Horiguchi, Y. Mori, T. Sasaki, K. Wall, J. Harrison, P. F. Moulton, and J. Manni, in Advanced Solid-State Lasers, W. R. Bosenberg and M. M. Fejer, eds., Vol. 19 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 1998), p. 16.

Nakajima, S.

Nomura, T.

S. Imai, H. Inoue, T. Nomura, and T. Tojo, in Advanced Solid-State Photonics, J. Zayhowski, ed., Vol. 83 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2003), p. 380.

Obara, M.

Ohsako, Y.

J. Sakuma, K. Deki, A. Finch, Y. Ohsako, and T. Yokota, Appl. Opt. 39, 5505 (2000).
[CrossRef]

A. Finch, Y. Ohsako, J. Sakuma, K. Deki, M. Horiguchi, Y. Mori, T. Sasaki, K. Wall, J. Harrison, P. F. Moulton, and J. Manni, in Advanced Solid-State Lasers, W. R. Bosenberg and M. M. Fejer, eds., Vol. 19 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 1998), p. 16.

Pati, B.

K. F. Wall, J. S. Smucz, B. Pati, Y. Isyanova, and P. F. Moulton, IEEE J. Quantum Electron. 39, 1160 (2003).
[CrossRef]

Sakuma, J.

J. Sakuma, Y. Asakawa, and M. Obara, Opt. Lett. 29, 92 (2004).
[CrossRef] [PubMed]

J. Sakuma, K. Deki, A. Finch, Y. Ohsako, and T. Yokota, Appl. Opt. 39, 5505 (2000).
[CrossRef]

A. Finch, Y. Ohsako, J. Sakuma, K. Deki, M. Horiguchi, Y. Mori, T. Sasaki, K. Wall, J. Harrison, P. F. Moulton, and J. Manni, in Advanced Solid-State Lasers, W. R. Bosenberg and M. M. Fejer, eds., Vol. 19 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 1998), p. 16.

Sasaki, T.

Y. K. Yap, M. Inagaki, S. Nakajima, Y. Mori, and T. Sasaki, Opt. Lett. 21, 1348 (1996).
[CrossRef] [PubMed]

A. Finch, Y. Ohsako, J. Sakuma, K. Deki, M. Horiguchi, Y. Mori, T. Sasaki, K. Wall, J. Harrison, P. F. Moulton, and J. Manni, in Advanced Solid-State Lasers, W. R. Bosenberg and M. M. Fejer, eds., Vol. 19 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 1998), p. 16.

Smucz, J. S.

K. F. Wall, J. S. Smucz, B. Pati, Y. Isyanova, and P. F. Moulton, IEEE J. Quantum Electron. 39, 1160 (2003).
[CrossRef]

Tojo, T.

S. Imai, H. Inoue, T. Nomura, and T. Tojo, in Advanced Solid-State Photonics, J. Zayhowski, ed., Vol. 83 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2003), p. 380.

Trautmann, T. M.

Wall, K.

A. Finch, Y. Ohsako, J. Sakuma, K. Deki, M. Horiguchi, Y. Mori, T. Sasaki, K. Wall, J. Harrison, P. F. Moulton, and J. Manni, in Advanced Solid-State Lasers, W. R. Bosenberg and M. M. Fejer, eds., Vol. 19 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 1998), p. 16.

Wall, K. F.

K. F. Wall, J. S. Smucz, B. Pati, Y. Isyanova, and P. F. Moulton, IEEE J. Quantum Electron. 39, 1160 (2003).
[CrossRef]

Yap, Y. K.

Yokota, T.

Appl. Opt. (3)

IEEE J. Quantum Electron. (2)

K. F. Wall, J. S. Smucz, B. Pati, Y. Isyanova, and P. F. Moulton, IEEE J. Quantum Electron. 39, 1160 (2003).
[CrossRef]

R. C. Eckardt, H. Masuda, Y. X. Fan, and R. L. Byer, IEEE J. Quantum Electron. 26, 922 (1990).
[CrossRef]

J. Appl. Phys. (1)

G. D. Boyd and D. A. Kleinman, J. Appl. Phys. 39, 3597 (1968).
[CrossRef]

Opt. Lett. (3)

Other (3)

A. Finch, Y. Ohsako, J. Sakuma, K. Deki, M. Horiguchi, Y. Mori, T. Sasaki, K. Wall, J. Harrison, P. F. Moulton, and J. Manni, in Advanced Solid-State Lasers, W. R. Bosenberg and M. M. Fejer, eds., Vol. 19 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 1998), p. 16.

S. Imai, H. Inoue, T. Nomura, and T. Tojo, in Advanced Solid-State Photonics, J. Zayhowski, ed., Vol. 83 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2003), p. 380.

H. Masuda, K. Kimura, N. Eguchi, and S. Kubota, in Advanced Solid-State Lasers, C. Marshall, ed., Vol. 50 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), p. 490.

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Figures (3)

Fig. 1
Fig. 1

Schematic diagram of the cw DUV-generation system: M’s, mirrors; L’s, lenses.

Fig. 2
Fig. 2

Measured (filled squares) and calculated (dashed line) 213-nm output power as a function of 266-nm input power.

Fig. 3
Fig. 3

Calculated nonlinear conversion coefficient and sum-frequency generation (SFG) wavelength as a function of fundamental wavelength in a 10-mm-long CLBO crystal: (a) various IR wavelengths with the UV wavelength fixed at 266 nm, (b) various UV wavelengths with the IR wavelength fixed at 1064 nm.

Equations (2)

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PSFM=γSFMP266P1064,
γSFM8ω1ω2deff2πn1n2nSFGc30k1+k22lhB,ξx2n1+n2,

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