Abstract

A new compact in situ method of measuring the perpendicularity of a plane wave to a substrate is proposed. Off-axis cylindrical Fresnel lenses are used to focus a portion of the incident plane wave onto target lines. The displacement of the focal line from the targets is determined by the degree of angular misalignment. The proposed design has been incorporated into a 10-mm-thick fused-silica module, which enables us to obtain an alignment precision of better than 0.0083°. This method is designed for use in optical assembly procedures that require an incident collimated beam that is normal to the alignment features. Experimental results are presented.

© 2003 Optical Society of America

PDF Article

References

  • View by:
  • |
  • |
  • |

  1. F. A. P. Tooley, IEEE J. Sel. Topics Quantum Electron. 2, 3 (1996).
    [CrossRef]
  2. M. H. Ayliffe, M. Châteauneuf, D. R. Rolston, A. G. Kirk, and D. V. Plant, Appl. Opt. 40, 6515 (2001).
    [CrossRef]
  3. B. Robertson, Y. Liu, G. C. Boisset, M. R. Taghizadeh, and D. V. Plant, Appl. Opt. 36, 9253 (1997).
    [CrossRef]
  4. M. Châteauneuf, A. G. Kirk, D. V. Plant, T. Yamamoto, and J. A. Ahearn, Appl. Opt. 41, 5552 (2002).
    [CrossRef]
  5. F. Lacroix, B. Robertson, M. H. Ayliffe, E. Bernier, F. A. P. Tooley, M. Châteauneuf, D. V. Plant, and A. G. Kirk, Proc. SPIE 3490, 107 (1998).
    [CrossRef]

2002 (1)

2001 (1)

1998 (1)

F. Lacroix, B. Robertson, M. H. Ayliffe, E. Bernier, F. A. P. Tooley, M. Châteauneuf, D. V. Plant, and A. G. Kirk, Proc. SPIE 3490, 107 (1998).
[CrossRef]

1997 (1)

1996 (1)

F. A. P. Tooley, IEEE J. Sel. Topics Quantum Electron. 2, 3 (1996).
[CrossRef]

Ahearn, J. A.

Ayliffe, M. H.

M. H. Ayliffe, M. Châteauneuf, D. R. Rolston, A. G. Kirk, and D. V. Plant, Appl. Opt. 40, 6515 (2001).
[CrossRef]

F. Lacroix, B. Robertson, M. H. Ayliffe, E. Bernier, F. A. P. Tooley, M. Châteauneuf, D. V. Plant, and A. G. Kirk, Proc. SPIE 3490, 107 (1998).
[CrossRef]

Bernier, E.

F. Lacroix, B. Robertson, M. H. Ayliffe, E. Bernier, F. A. P. Tooley, M. Châteauneuf, D. V. Plant, and A. G. Kirk, Proc. SPIE 3490, 107 (1998).
[CrossRef]

Boisset, G. C.

Châteauneuf, M.

Kirk, A. G.

Lacroix, F.

F. Lacroix, B. Robertson, M. H. Ayliffe, E. Bernier, F. A. P. Tooley, M. Châteauneuf, D. V. Plant, and A. G. Kirk, Proc. SPIE 3490, 107 (1998).
[CrossRef]

Liu, Y.

Plant, D. V.

Robertson, B.

F. Lacroix, B. Robertson, M. H. Ayliffe, E. Bernier, F. A. P. Tooley, M. Châteauneuf, D. V. Plant, and A. G. Kirk, Proc. SPIE 3490, 107 (1998).
[CrossRef]

B. Robertson, Y. Liu, G. C. Boisset, M. R. Taghizadeh, and D. V. Plant, Appl. Opt. 36, 9253 (1997).
[CrossRef]

Rolston, D. R.

Taghizadeh, M. R.

Tooley, F. A. P.

F. Lacroix, B. Robertson, M. H. Ayliffe, E. Bernier, F. A. P. Tooley, M. Châteauneuf, D. V. Plant, and A. G. Kirk, Proc. SPIE 3490, 107 (1998).
[CrossRef]

F. A. P. Tooley, IEEE J. Sel. Topics Quantum Electron. 2, 3 (1996).
[CrossRef]

Yamamoto, T.

Appl. Opt. (3)

IEEE J. Sel. Topics Quantum Electron. (1)

F. A. P. Tooley, IEEE J. Sel. Topics Quantum Electron. 2, 3 (1996).
[CrossRef]

Proc. SPIE (1)

F. Lacroix, B. Robertson, M. H. Ayliffe, E. Bernier, F. A. P. Tooley, M. Châteauneuf, D. V. Plant, and A. G. Kirk, Proc. SPIE 3490, 107 (1998).
[CrossRef]

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Metrics