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Enhancement of lateral resolution in confocal self-interference microscopy

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Abstract

We describe confocal self-interference microscopy with enhanced lateral resolution. A uniaxial anisotropic crystal is used to cause interference between two linearly polarized beams that are reflected from the same pointlike object in the focal plane of the objective lens. Theory and the optimal design that maximizes the sensitivity of the interference signal are presented. A numerical experiment shows a 38% decrease in the lateral FWHM for simple confocal self-interference microscopy.

© 2003 Optical Society of America

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