Abstract

We present a compact and robust phase-shifting lateral shearing interferometer that produces shearing fringes in orthogonal directions without any mechanical rotation or precise alignment. It consists of two pairs of wedge plates, a beam splitter, and a single CCD camera. Both phase-shifting and tilt for lateral shearing are achieved with two pairs of wedge plates, which can reduce systematic errors caused by external vibration and atmospheric disturbance.

© 2003 Optical Society of America

Simple phase-shifting method in a wedge-plate lateral-shearing interferometer

Jae Bong Song, Yun Woo Lee, In Won Lee, and Yong-Hee Lee
Appl. Opt. 43(20) 3989-3992 (2004)

Phase-shifting lateral shearing interferometry using wedge-plate and interferometric grating

Reena Disawal, Jitendra Dhanotia, and Shashi Prakash
Appl. Opt. 53(31) 7534-7539 (2014)

Simple phase-shifting lateral shearing interferometer

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Opt. Lett. 29(11) 1264-1266 (2004)

Simple multifrequency and phase-shifting fringe-projection system based on two-wavelength lateral shearing interferometry for three-dimensional profilometry

Dalip Singh Mehta, Satish Kumar Dubey, M. Mosarraf Hossain, and Chandra Shakher
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Liquid-crystal phase-shifting lateral shearing interferometer with improved fringe contrast for 3D surface profilometry

Dalip Singh Mehta, Mohammad Inam, Jai Prakash, and A. M. Biradar
Appl. Opt. 52(25) 6119-6125 (2013)