Abstract

We describe how focused-ion-beam (FIB) etching of slanted rib waveguide walls can be used to modify the differential group delay in a waveguide and introduce TE to TM mode conversion in a silicon-on-insulator rib waveguide. We achieved mode conversion by modifying the geometric cross section of a single-mode rib by FIB trimming. Waveguides with different lengths of 45° slant angle rib waveguide walls were fabricated and characterized. We measured the differential group delays and the mode conversion achieved for waveguides with different lengths of a FIB-trimmed slanted rib wall.

© 2003 Optical Society of America

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  1. G. Rickman, G. T. Reed, and F. Namavar, J. Lightwave Technol. 12,1771 (1994).
  2. E. Hecht, Optics, 4th ed. (Addison-Wesley, San Francisco, Calif., 2002).
  3. T. Ando, T. Murata, H. Nakayama, J. Yamauchi, and H. Nakano, IEEE Photon. Technol. Lett. 14,1288 (2002).
  4. H. Heidrich, P. Albrecht, M. Hamacher, H.-P. Nolting, H. Schroeter-Janssen, and C. M. Weinert, IEEE Photon. Technol. Lett. 4, 34 (1992).
  5. H. Porte, J.-P. Goedgebuer, R. Ferriere, and N. Fort, IEEE J. Quantum Electron. 25,1760 (1989).
  6. W. Y. Hwang, J. J. Kim, T. Zyung, M. C. Oh, and S. Y. Shin, IEEE J. Quantum Electron. 32,1054 (1996).
  7. V. P. Hiinkov, R. Opitz, and W. Sohler, J. Lightwave Technol. 6,903 (1988).
  8. S. S. A. Obayya, B. M. A. Rahman, K. T. V. Grattan, and H. A. El-Mikati, IEEE Photon. Technol. Lett. 13,681 (2001).
  9. E. A. J. Marcatilli, Bell Syst. Tech. J. 48,2071 (1969).

2002 (1)

T. Ando, T. Murata, H. Nakayama, J. Yamauchi, and H. Nakano, IEEE Photon. Technol. Lett. 14,1288 (2002).

2001 (1)

S. S. A. Obayya, B. M. A. Rahman, K. T. V. Grattan, and H. A. El-Mikati, IEEE Photon. Technol. Lett. 13,681 (2001).

1996 (1)

W. Y. Hwang, J. J. Kim, T. Zyung, M. C. Oh, and S. Y. Shin, IEEE J. Quantum Electron. 32,1054 (1996).

1994 (1)

G. Rickman, G. T. Reed, and F. Namavar, J. Lightwave Technol. 12,1771 (1994).

1992 (1)

H. Heidrich, P. Albrecht, M. Hamacher, H.-P. Nolting, H. Schroeter-Janssen, and C. M. Weinert, IEEE Photon. Technol. Lett. 4, 34 (1992).

1989 (1)

H. Porte, J.-P. Goedgebuer, R. Ferriere, and N. Fort, IEEE J. Quantum Electron. 25,1760 (1989).

1988 (1)

V. P. Hiinkov, R. Opitz, and W. Sohler, J. Lightwave Technol. 6,903 (1988).

1969 (1)

E. A. J. Marcatilli, Bell Syst. Tech. J. 48,2071 (1969).

Albrecht, P.

H. Heidrich, P. Albrecht, M. Hamacher, H.-P. Nolting, H. Schroeter-Janssen, and C. M. Weinert, IEEE Photon. Technol. Lett. 4, 34 (1992).

Ando, T.

T. Ando, T. Murata, H. Nakayama, J. Yamauchi, and H. Nakano, IEEE Photon. Technol. Lett. 14,1288 (2002).

El-Mikati, H. A.

S. S. A. Obayya, B. M. A. Rahman, K. T. V. Grattan, and H. A. El-Mikati, IEEE Photon. Technol. Lett. 13,681 (2001).

Ferriere, R.

H. Porte, J.-P. Goedgebuer, R. Ferriere, and N. Fort, IEEE J. Quantum Electron. 25,1760 (1989).

Fort, N.

H. Porte, J.-P. Goedgebuer, R. Ferriere, and N. Fort, IEEE J. Quantum Electron. 25,1760 (1989).

Goedgebuer, J.-P.

H. Porte, J.-P. Goedgebuer, R. Ferriere, and N. Fort, IEEE J. Quantum Electron. 25,1760 (1989).

Grattan, K. T. V.

S. S. A. Obayya, B. M. A. Rahman, K. T. V. Grattan, and H. A. El-Mikati, IEEE Photon. Technol. Lett. 13,681 (2001).

Hamacher, M.

H. Heidrich, P. Albrecht, M. Hamacher, H.-P. Nolting, H. Schroeter-Janssen, and C. M. Weinert, IEEE Photon. Technol. Lett. 4, 34 (1992).

Hecht, E.

E. Hecht, Optics, 4th ed. (Addison-Wesley, San Francisco, Calif., 2002).

Heidrich, H.

H. Heidrich, P. Albrecht, M. Hamacher, H.-P. Nolting, H. Schroeter-Janssen, and C. M. Weinert, IEEE Photon. Technol. Lett. 4, 34 (1992).

Hiinkov, V. P.

V. P. Hiinkov, R. Opitz, and W. Sohler, J. Lightwave Technol. 6,903 (1988).

Hwang, W. Y.

W. Y. Hwang, J. J. Kim, T. Zyung, M. C. Oh, and S. Y. Shin, IEEE J. Quantum Electron. 32,1054 (1996).

Kim, J. J.

W. Y. Hwang, J. J. Kim, T. Zyung, M. C. Oh, and S. Y. Shin, IEEE J. Quantum Electron. 32,1054 (1996).

Marcatilli, E. A. J.

E. A. J. Marcatilli, Bell Syst. Tech. J. 48,2071 (1969).

Murata, T.

T. Ando, T. Murata, H. Nakayama, J. Yamauchi, and H. Nakano, IEEE Photon. Technol. Lett. 14,1288 (2002).

Nakano, H.

T. Ando, T. Murata, H. Nakayama, J. Yamauchi, and H. Nakano, IEEE Photon. Technol. Lett. 14,1288 (2002).

Nakayama, H.

T. Ando, T. Murata, H. Nakayama, J. Yamauchi, and H. Nakano, IEEE Photon. Technol. Lett. 14,1288 (2002).

Namavar, F.

G. Rickman, G. T. Reed, and F. Namavar, J. Lightwave Technol. 12,1771 (1994).

Nolting, H.-P.

H. Heidrich, P. Albrecht, M. Hamacher, H.-P. Nolting, H. Schroeter-Janssen, and C. M. Weinert, IEEE Photon. Technol. Lett. 4, 34 (1992).

Obayya, S. S. A.

S. S. A. Obayya, B. M. A. Rahman, K. T. V. Grattan, and H. A. El-Mikati, IEEE Photon. Technol. Lett. 13,681 (2001).

Oh, M. C.

W. Y. Hwang, J. J. Kim, T. Zyung, M. C. Oh, and S. Y. Shin, IEEE J. Quantum Electron. 32,1054 (1996).

Opitz, R.

V. P. Hiinkov, R. Opitz, and W. Sohler, J. Lightwave Technol. 6,903 (1988).

Porte, H.

H. Porte, J.-P. Goedgebuer, R. Ferriere, and N. Fort, IEEE J. Quantum Electron. 25,1760 (1989).

Rahman, B. M. A.

S. S. A. Obayya, B. M. A. Rahman, K. T. V. Grattan, and H. A. El-Mikati, IEEE Photon. Technol. Lett. 13,681 (2001).

Reed, G. T.

G. Rickman, G. T. Reed, and F. Namavar, J. Lightwave Technol. 12,1771 (1994).

Rickman, G.

G. Rickman, G. T. Reed, and F. Namavar, J. Lightwave Technol. 12,1771 (1994).

Schroeter-Janssen, H.

H. Heidrich, P. Albrecht, M. Hamacher, H.-P. Nolting, H. Schroeter-Janssen, and C. M. Weinert, IEEE Photon. Technol. Lett. 4, 34 (1992).

Shin, S. Y.

W. Y. Hwang, J. J. Kim, T. Zyung, M. C. Oh, and S. Y. Shin, IEEE J. Quantum Electron. 32,1054 (1996).

Sohler, W.

V. P. Hiinkov, R. Opitz, and W. Sohler, J. Lightwave Technol. 6,903 (1988).

Weinert, C. M.

H. Heidrich, P. Albrecht, M. Hamacher, H.-P. Nolting, H. Schroeter-Janssen, and C. M. Weinert, IEEE Photon. Technol. Lett. 4, 34 (1992).

Yamauchi, J.

T. Ando, T. Murata, H. Nakayama, J. Yamauchi, and H. Nakano, IEEE Photon. Technol. Lett. 14,1288 (2002).

Zyung, T.

W. Y. Hwang, J. J. Kim, T. Zyung, M. C. Oh, and S. Y. Shin, IEEE J. Quantum Electron. 32,1054 (1996).

Bell Syst. Tech. J. (1)

E. A. J. Marcatilli, Bell Syst. Tech. J. 48,2071 (1969).

IEEE J. Quantum Electron. (2)

H. Porte, J.-P. Goedgebuer, R. Ferriere, and N. Fort, IEEE J. Quantum Electron. 25,1760 (1989).

W. Y. Hwang, J. J. Kim, T. Zyung, M. C. Oh, and S. Y. Shin, IEEE J. Quantum Electron. 32,1054 (1996).

IEEE Photon. Technol. Lett. (3)

S. S. A. Obayya, B. M. A. Rahman, K. T. V. Grattan, and H. A. El-Mikati, IEEE Photon. Technol. Lett. 13,681 (2001).

T. Ando, T. Murata, H. Nakayama, J. Yamauchi, and H. Nakano, IEEE Photon. Technol. Lett. 14,1288 (2002).

H. Heidrich, P. Albrecht, M. Hamacher, H.-P. Nolting, H. Schroeter-Janssen, and C. M. Weinert, IEEE Photon. Technol. Lett. 4, 34 (1992).

J. Lightwave Technol. (1)

G. Rickman, G. T. Reed, and F. Namavar, J. Lightwave Technol. 12,1771 (1994).

J. Lightwave Technol. (1)

V. P. Hiinkov, R. Opitz, and W. Sohler, J. Lightwave Technol. 6,903 (1988).

Other (1)

E. Hecht, Optics, 4th ed. (Addison-Wesley, San Francisco, Calif., 2002).

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