Abstract

The spectrum of xenon excited in a low-inductance vacuum spark was photographed at high resolution in the region of 9.5–15.5 nm. The observed transitions were identified as belonging to ions from Xe8+ to Xe13+. In the region of importance for extreme-ultraviolet lithography around 13.4 nm, the strongest lines were identified as 4d84d75p transitions in Xe10+. The identifications were made by use of energy parameters extrapolated along the isoelectronic sequence.

© 2003 Optical Society of America

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