Abstract

We introduce and demonstrate a new microscopy concept: imaging interferometric microscopy (IIM), which is related to holography, synthetic-aperture imaging, and off-axis–dark-field illumination techniques. IIM is a wavelength-division multiplex approach to image formation that combines multiple images covering different spatial-frequency regions to form a composite image with a resolution much greater than that permitted by the same optical system using conventional techniques. This new type of microscopy involves both off-axis coherent illumination and reinjection of appropriate zero-order reference beams. Images demonstrate high resolution, comparable with that of a high-numerical-aperture (NA) objective, while they retain the long working distance, the large depth of field, and the large field of view of a low-NA objective. A Fourier-optics model of IIM is in good agreement with the experiment.

© 2003 Optical Society of America

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2002

C. J. Schwarz, Y. Kuznetsova, and S. R. J. Brueck, Proc. SPIE 4689, 802 (2002).

A. V. Failla, A. Cavallo, and C. Cremer, Appl. Opt. 41, 6651 (2002).

2001

1999

S. R. J. Brueck and X. Chen, J. Vac. Sci. Technol. B 17, 908 (1999).

X. Chen and S. R. J. Brueck, Opt. Lett. 24, 124 (1999).

M. G. L. Gustafsson, Curr. Opin. Struct. Biol. 9, 627 (1999), and references therein.

1995

1994

1992

S. W. Hell and E. H. K. Stelzer, Opt. Commun. 93, 277 (1992).

1990

W. Denk, J. H. Strickler, and W. W. Webb, Science 248, 73 (1990).

1989

C. J. Oliver, J. Phys. D 22, 871 (1989).

1873

E. Abbe, Ark. Mikrosk. Anat. 9, 413 (1873).

Abbe, E.

E. Abbe, Ark. Mikrosk. Anat. 9, 413 (1873).

Brueck, S. R. J.

C. J. Schwarz, Y. Kuznetsova, and S. R. J. Brueck, Proc. SPIE 4689, 802 (2002).

S. R. J. Brueck and X. Chen, J. Vac. Sci. Technol. B 17, 908 (1999).

X. Chen and S. R. J. Brueck, Opt. Lett. 24, 124 (1999).

Cathey, W. T.

Cavallo, A.

Chen, X.

X. Chen and S. R. J. Brueck, Opt. Lett. 24, 124 (1999).

S. R. J. Brueck and X. Chen, J. Vac. Sci. Technol. B 17, 908 (1999).

Collot, L.

Cremer, C.

Denk, W.

W. Denk, J. H. Strickler, and W. W. Webb, Science 248, 73 (1990).

Dowski, E. R.

Failla, A. V.

Gross, M.

Gustafsson, M. G. L.

M. G. L. Gustafsson, Curr. Opin. Struct. Biol. 9, 627 (1999), and references therein.

Hell, S. W.

S. W. Hell and J. Wichmann, Opt. Lett. 19, 780 (1994).

S. W. Hell and E. H. K. Stelzer, Opt. Commun. 93, 277 (1992).

Kuznetsova, Y.

C. J. Schwarz, Y. Kuznetsova, and S. R. J. Brueck, Proc. SPIE 4689, 802 (2002).

Le Clerc, F.

Oliver, C. J.

C. J. Oliver, J. Phys. D 22, 871 (1989).

Schwarz, C. J.

C. J. Schwarz, Y. Kuznetsova, and S. R. J. Brueck, Proc. SPIE 4689, 802 (2002).

Stelzer, E. H. K.

S. W. Hell and E. H. K. Stelzer, Opt. Commun. 93, 277 (1992).

Strickler, J. H.

W. Denk, J. H. Strickler, and W. W. Webb, Science 248, 73 (1990).

Webb, W. W.

W. Denk, J. H. Strickler, and W. W. Webb, Science 248, 73 (1990).

Wichmann, J.

Appl. Opt.

Ark. Mikrosk. Anat.

E. Abbe, Ark. Mikrosk. Anat. 9, 413 (1873).

Curr. Opin. Struct. Biol.

M. G. L. Gustafsson, Curr. Opin. Struct. Biol. 9, 627 (1999), and references therein.

J. Phys. D

C. J. Oliver, J. Phys. D 22, 871 (1989).

J. Vac. Sci. Technol. B

S. R. J. Brueck and X. Chen, J. Vac. Sci. Technol. B 17, 908 (1999).

Opt. Commun.

S. W. Hell and E. H. K. Stelzer, Opt. Commun. 93, 277 (1992).

Opt. Lett.

Proc. SPIE

C. J. Schwarz, Y. Kuznetsova, and S. R. J. Brueck, Proc. SPIE 4689, 802 (2002).

Science

W. Denk, J. H. Strickler, and W. W. Webb, Science 248, 73 (1990).

Other

International Technology Roadmap for Semiconductors at www.public.itrs.net.

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